{"created":"2021-03-01T06:11:58.907729+00:00","id":5421,"links":{},"metadata":{"_buckets":{"deposit":"46b3e682-5981-4956-859d-fc8abdf151a4"},"_deposit":{"id":"5421","owners":[],"pid":{"revision_id":0,"type":"depid","value":"5421"},"status":"published"},"_oai":{"id":"oai:nagoya.repo.nii.ac.jp:00005421","sets":["320:321:322"]},"author_link":["13900","13901","13902","13903","13904"],"item_10_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1997-10-15","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"8","bibliographicPageEnd":"4061","bibliographicPageStart":"4055","bibliographicVolumeNumber":"82","bibliographic_titles":[{"bibliographic_title":"Journal of Applied Physics","bibliographic_titleLang":"en"}]}]},"item_10_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"Diamond films were successfully synthesized in both parallel-plate radio frequency (rf: 13.56 MHz) CH_4 and CH_3OH plasmas with injection of H and OH radicals generated in the remote microwave (2.45 GHz) H_2 /H_2O plasma. Effects of H, OH, and CH_3 radicals on the diamond film formation in the rf plasma reactor were investigated by the formation of diamond films employing radical injection technique and the measurement of density in the plasma. Under the condition of diamond film formation, CH_3 density was measured by infrared diode laser absorption spectroscopy (IRLAS). The kinetics of CH_3 in rf CH_4 and CH_3OH plasmas with injection of H and OH radicals were evaluated from the results of optical emission spectroscopy and lifetime of CH_3 radicals estimated by IRLAS.","subitem_description_language":"en","subitem_description_type":"Abstract"}]},"item_10_identifier_60":{"attribute_name":"URI","attribute_value_mlt":[{"subitem_identifier_type":"HDL","subitem_identifier_uri":"http://hdl.handle.net/2237/7026"}]},"item_10_publisher_32":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"American Institute of Physics","subitem_publisher_language":"en"}]},"item_10_relation_11":{"attribute_name":"DOI","attribute_value_mlt":[{"subitem_relation_type":"isVersionOf","subitem_relation_type_id":{"subitem_relation_type_id_text":"https://doi.org/10.1063/1.365715","subitem_relation_type_select":"DOI"}}]},"item_10_rights_12":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"Copyright (1997) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.","subitem_rights_language":"en"}]},"item_10_select_15":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_select_item":"publisher"}]},"item_10_source_id_7":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"0021-8979","subitem_source_identifier_type":"PISSN"}]},"item_10_text_14":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_text_value":"application/pdf"}]},"item_1615787544753":{"attribute_name":"出版タイプ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"open access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_abf2"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Ikeda, M.","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"13900","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Ito, H.","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"13901","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Hiramatsu, M.","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"13902","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Hori, M.","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"13903","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Goto, T.","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"13904","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2018-02-19"}],"displaytype":"detail","filename":"JApplPhys_82_4055.pdf","filesize":[{"value":"334.4 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"JApplPhys_82_4055.pdf","objectType":"fulltext","url":"https://nagoya.repo.nii.ac.jp/record/5421/files/JApplPhys_82_4055.pdf"},"version_id":"6c3adb8e-db85-445f-8911-025200661153"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"Effects of H, OH, and CH_3 radicals on diamond film formation in parallel-plate radio frequency plasma reactor","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Effects of H, OH, and CH_3 radicals on diamond film formation in parallel-plate radio frequency plasma reactor","subitem_title_language":"en"}]},"item_type_id":"10","owner":"1","path":["322"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2006-10-23"},"publish_date":"2006-10-23","publish_status":"0","recid":"5421","relation_version_is_last":true,"title":["Effects of H, OH, and CH_3 radicals on diamond film formation in parallel-plate radio frequency plasma reactor"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-01-16T03:49:56.415766+00:00"}