{"_buckets": {"deposit": "2724f395-dfff-4cd9-8785-64cefbec0a1f"}, "_deposit": {"id": "5423", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "5423"}, "status": "published"}, "_oai": {"id": "oai:nagoya.repo.nii.ac.jp:00005423", "sets": ["322"]}, "author_link": ["13907", "13908", "13909", "13910"], "item_10_biblio_info_6": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "1997-11-15", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "10", "bibliographicPageEnd": "4780", "bibliographicPageStart": "4777", "bibliographicVolumeNumber": "82", "bibliographic_titles": [{"bibliographic_title": "Journal of Applied Physics", "bibliographic_titleLang": "en"}]}]}, "item_10_description_4": {"attribute_name": "抄録", "attribute_value_mlt": [{"subitem_description": "The absolute density of the cyanogen fluoride (FCN) molecule has been measured in a CHF_3 /N_2 electron-cyclotron-resonance (ECR) plasma using infrared diode laser absorption spectroscopy. The R(22) rotational-vibrational line at 1060.340 cm^-1 in the ν_1 fundamental of ^19F^12C^14N was used for the spectroscopy. The extinction process of FCN in the afterglow was discussed on the basis of the decay rate after discharge termination. Moreover, the absolute FCN density in a CHF_3 ECR plasma during etching of silicon nitride has been calculated on the basis of the data shown in our previous study [K. Miyata et al., J. Vac. Sci. Technol. A 15, 568 (1997)]. It was found that approximately 10% of nitrogen atoms coming from silicon nitride formed FCN.", "subitem_description_language": "en", "subitem_description_type": "Abstract"}]}, "item_10_identifier_60": {"attribute_name": "URI", "attribute_value_mlt": [{"subitem_identifier_type": "HDL", "subitem_identifier_uri": "http://hdl.handle.net/2237/7027"}]}, "item_10_publisher_32": {"attribute_name": "出版者", "attribute_value_mlt": [{"subitem_publisher": "American Institute of Physics", "subitem_publisher_language": "en"}]}, "item_10_relation_11": {"attribute_name": "DOI", "attribute_value_mlt": [{"subitem_relation_type": "isVersionOf", "subitem_relation_type_id": {"subitem_relation_type_id_text": "https://doi.org/10.1063/1.366335", "subitem_relation_type_select": "DOI"}}]}, "item_10_rights_12": {"attribute_name": "権利", "attribute_value_mlt": [{"subitem_rights": "Copyright (1997) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.", "subitem_rights_language": "en"}]}, "item_10_select_15": {"attribute_name": "著者版フラグ", "attribute_value_mlt": [{"subitem_select_item": "publisher"}]}, "item_10_source_id_7": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "0021-8979", "subitem_source_identifier_type": "PISSN"}]}, "item_10_text_14": {"attribute_name": "フォーマット", "attribute_value_mlt": [{"subitem_text_value": "application/pdf"}]}, "item_1615787544753": {"attribute_name": "出版タイプ", "attribute_value_mlt": [{"subitem_version_resource": "http://purl.org/coar/version/c_970fb48d4fbd8a85", "subitem_version_type": "VoR"}]}, "item_access_right": {"attribute_name": "アクセス権", "attribute_value_mlt": [{"subitem_access_right": "open access", "subitem_access_right_uri": "http://purl.org/coar/access_right/c_abf2"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "Miyata, Koji", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "13907", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Arai, Hiroyoshi", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "13908", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Hori, Masaru", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "13909", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Goto, Toshio", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "13910", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2018-02-19"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "JApplPhys_82_4777.pdf", "filesize": [{"value": "79.7 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_note", "mimetype": "application/pdf", "size": 79700.0, "url": {"label": "JApplPhys_82_4777.pdf", "objectType": "fulltext", "url": "https://nagoya.repo.nii.ac.jp/record/5423/files/JApplPhys_82_4777.pdf"}, "version_id": "59b3cfaa-b90b-4295-bcc7-0c2019d4c225"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "journal article", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "Absolute density measurement of cyanogen fluoride in CHF_3/N_2 electron cyclotron resonance plasma using infrared diode laser absorption spectroscopy", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "Absolute density measurement of cyanogen fluoride in CHF_3/N_2 electron cyclotron resonance plasma using infrared diode laser absorption spectroscopy", "subitem_title_language": "en"}]}, "item_type_id": "10", "owner": "1", "path": ["322"], "permalink_uri": "http://hdl.handle.net/2237/7027", "pubdate": {"attribute_name": "PubDate", "attribute_value": "2006-10-23"}, "publish_date": "2006-10-23", "publish_status": "0", "recid": "5423", "relation": {}, "relation_version_is_last": true, "title": ["Absolute density measurement of cyanogen fluoride in CHF_3/N_2 electron cyclotron resonance plasma using infrared diode laser absorption spectroscopy"], "weko_shared_id": -1}