{"created":"2021-03-01T06:11:59.158720+00:00","id":5425,"links":{},"metadata":{"_buckets":{"deposit":"78a035e2-8009-415d-b8d4-9eeb13c01c14"},"_deposit":{"id":"5425","owners":[],"pid":{"revision_id":0,"type":"depid","value":"5425"},"status":"published"},"_oai":{"id":"oai:nagoya.repo.nii.ac.jp:00005425","sets":["320:321:322"]},"author_link":["13914","13915","13916","13917"],"item_10_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1998-06-15","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"12","bibliographicPageEnd":"7487","bibliographicPageStart":"7482","bibliographicVolumeNumber":"83","bibliographic_titles":[{"bibliographic_title":"Journal of Applied Physics","bibliographic_titleLang":"en"}]}]},"item_10_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"Absolute density and reaction kinetics of fluorine (F) atoms in high-density octafluorocyclobutane (c-C_4F_8) plasmas were examined using vacuum ultraviolet absorption spectroscopy. The F atom densities, corresponding to electron densities ranging from 1*10^11 to 5*10^12 cm^-3, were 1 *10^12-5*10^13 cm^-3 for gas pressures of 2-7 mTorr and rf powers of 0.2-1.5 kW. The F atom density was linearly dependent on the electron density for n_e<1.5*10^12 cm^-3. According to lifetime measurements in the afterglow, two decay processes were found in the F atom density: exponential (first-order kinetics) and linear (zero-order kinetics) decay components. The linear-decay component became significant at high gas pressures. The time constant of the exponential-decay component ranged from 5 to 100 ms, which corresponds to surface loss probabilities of 10^-1-10^-3. The surface loss probability varied inversely with the F atom density.","subitem_description_language":"en","subitem_description_type":"Abstract"}]},"item_10_identifier_60":{"attribute_name":"URI","attribute_value_mlt":[{"subitem_identifier_type":"HDL","subitem_identifier_uri":"http://hdl.handle.net/2237/7029"}]},"item_10_publisher_32":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"American Institute of Physics","subitem_publisher_language":"en"}]},"item_10_relation_11":{"attribute_name":"DOI","attribute_value_mlt":[{"subitem_relation_type":"isVersionOf","subitem_relation_type_id":{"subitem_relation_type_id_text":"https://doi.org/10.1063/1.367511","subitem_relation_type_select":"DOI"}}]},"item_10_rights_12":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"Copyright (1998) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.","subitem_rights_language":"en"}]},"item_10_select_15":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_select_item":"publisher"}]},"item_10_source_id_7":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"0021-8979","subitem_source_identifier_type":"PISSN"}]},"item_10_text_14":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_text_value":"application/pdf"}]},"item_1615787544753":{"attribute_name":"出版タイプ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"open access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_abf2"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Sasaki, K.","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"13914","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Kawai, Y.","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"13915","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Suzuki, C.","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"13916","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Kadota, K.","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"13917","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2018-02-19"}],"displaytype":"detail","filename":"JApplPhys_83_7482.pdf","filesize":[{"value":"140.8 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"JApplPhys_83_7482.pdf","objectType":"fulltext","url":"https://nagoya.repo.nii.ac.jp/record/5425/files/JApplPhys_83_7482.pdf"},"version_id":"7e6c4c89-99e8-4e88-a6aa-d6a6e3a9b1e9"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"Absolute density and reaction kinetics of fluorine atoms in high-density c-C_4F_8 plasmas","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Absolute density and reaction kinetics of fluorine atoms in high-density c-C_4F_8 plasmas","subitem_title_language":"en"}]},"item_type_id":"10","owner":"1","path":["322"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2006-10-24"},"publish_date":"2006-10-24","publish_status":"0","recid":"5425","relation_version_is_last":true,"title":["Absolute density and reaction kinetics of fluorine atoms in high-density c-C_4F_8 plasmas"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-01-16T03:50:00.823307+00:00"}