{"created":"2021-03-01T06:11:59.284616+00:00","id":5427,"links":{},"metadata":{"_buckets":{"deposit":"14028b5b-e4fa-4b71-8e73-178f268c99f4"},"_deposit":{"id":"5427","owners":[],"pid":{"revision_id":0,"type":"depid","value":"5427"},"status":"published"},"_oai":{"id":"oai:nagoya.repo.nii.ac.jp:00005427","sets":["320:321:322"]},"author_link":["13920","13921","13922","13923"],"item_10_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1997-12-15","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"12","bibliographicPageEnd":"5943","bibliographicPageStart":"5938","bibliographicVolumeNumber":"82","bibliographic_titles":[{"bibliographic_title":"Journal of Applied Physics","bibliographic_titleLang":"en"}]}]},"item_10_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"Reaction processes of fluorine (F) atoms in high-density carbon–tetrafluoride (CF_4) plasmas were investigated using vacuum ultraviolet absorption spectroscopy. A scaling law n_F^∝(n_en_{CF_4})^{0.5– 0.7} was found experimentally, where n_F is the F atom density and n_e and n_{CF_4} stand for the electron and parent gas (CF_4) densities, respectively. The lifetime measurement in the afterglow showed that the decay curve of the F atom density was composed of two components: a rapid decay in the initial afterglow and an exponential decrease in the late afterglow. The decay time constant in the initial afterglow τ_1 satisfied the scaling law τ_1^∝(n_en_{CF_4})^{-(0.3– 0.4)}, which is a consistent relationship with the scaling law for the F atom density. The two scaling laws and the lifetimes of CFx radicals suggest that the major loss process of F atoms in the initial afterglow is the reaction with CF_x radicals (probably, x=3) on the wall surface. The loss process in the late afterglow was simple diffusion to the wall surface. The surface loss probability of F atoms on the chamber wall was evaluated from the decay time constant in the late afterglow, and was on the order of 10^-3.","subitem_description_language":"en","subitem_description_type":"Abstract"}]},"item_10_identifier_60":{"attribute_name":"URI","attribute_value_mlt":[{"subitem_identifier_type":"HDL","subitem_identifier_uri":"http://hdl.handle.net/2237/7031"}]},"item_10_publisher_32":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"American Institute of Physics","subitem_publisher_language":"en"}]},"item_10_relation_11":{"attribute_name":"DOI","attribute_value_mlt":[{"subitem_relation_type":"isVersionOf","subitem_relation_type_id":{"subitem_relation_type_id_text":"https://doi.org/10.1063/1.366495","subitem_relation_type_select":"DOI"}}]},"item_10_rights_12":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"Copyright (1997) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.","subitem_rights_language":"en"}]},"item_10_select_15":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_select_item":"publisher"}]},"item_10_source_id_7":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"0021-8979","subitem_source_identifier_type":"PISSN"}]},"item_10_text_14":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_text_value":"application/pdf"}]},"item_1615787544753":{"attribute_name":"出版タイプ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"open access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_abf2"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Sasaki, K.","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"13920","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Kawai, Y.","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"13921","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Suzuki, C.","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"13922","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Kadota, K.","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"13923","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2018-02-19"}],"displaytype":"detail","filename":"JApplPhys_82_5938.pdf","filesize":[{"value":"129.9 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"JApplPhys_82_5938.pdf","objectType":"fulltext","url":"https://nagoya.repo.nii.ac.jp/record/5427/files/JApplPhys_82_5938.pdf"},"version_id":"3142e145-9463-4c6e-83ea-71bb1026343c"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"Kinetics of fluorine atoms in high-density carbon–tetrafluoride plasmas","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Kinetics of fluorine atoms in high-density carbon–tetrafluoride plasmas","subitem_title_language":"en"}]},"item_type_id":"10","owner":"1","path":["322"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2006-10-24"},"publish_date":"2006-10-24","publish_status":"0","recid":"5427","relation_version_is_last":true,"title":["Kinetics of fluorine atoms in high-density carbon–tetrafluoride plasmas"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-01-16T03:50:01.402397+00:00"}