{"_buckets": {"deposit": "cee36776-79fd-444d-ae4f-20e5d88cbee4"}, "_deposit": {"id": "5435", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "5435"}, "status": "published"}, "_oai": {"id": "oai:nagoya.repo.nii.ac.jp:00005435"}, "item_10_biblio_info_6": {"attribute_name": "\u66f8\u8a8c\u60c5\u5831", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "1999-01", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "1", "bibliographicPageEnd": "81", "bibliographicPageStart": "76", "bibliographicVolumeNumber": "70", "bibliographic_titles": [{"bibliographic_title": "Review of Scientific Instruments"}]}]}, "item_10_description_4": {"attribute_name": "\u6284\u9332", "attribute_value_mlt": [{"subitem_description": "Vacuum ultraviolet absorption spectroscopy was developed for the measurement of absolute\nfluorine (F) atom density in reactive plasmas. In order to minimize the influence of radiation\ntrapping (self-absorption)in the light source, fluorescence at a wavelength of 95.85 nm from the F\natoms in an electron\u2013cyclotron resonance (ECR) CF4 plasma, which was operated with a low\nmicrowave power (0.1 kW) and a low gas pressure (1 mTorr), was employed as the probe emission.\nA windowless transmission system for the probe emission was constructed by connecting the ECR\nlight source with the target plasma and the detection system using vacuum tubes having small slits.\nThe connection tubes were differentially evacuated with turbomolecular pumps to prevent neutral\nparticles from passing through between the ECR and target plasmas. The present method was\napplied to high-density CF4 and C4F8 plasmas produced by helicon-wave discharges. The accuracy\nof the measurement was examined carefully by evaluating various sources of error. In the present\narticle, we have emphasized the evaluation of the radiation trapping effect in the light source\nplasma.", "subitem_description_type": "Abstract"}]}, "item_10_identifier_60": {"attribute_name": "URI", "attribute_value_mlt": [{"subitem_identifier_type": "HDL", "subitem_identifier_uri": "http://hdl.handle.net/2237/7042"}]}, "item_10_publisher_32": {"attribute_name": "\u51fa\u7248\u8005", "attribute_value_mlt": [{"subitem_publisher": "American Institute of Physics"}]}, "item_10_relation_11": {"attribute_name": "DOI", "attribute_value_mlt": [{"subitem_relation_type_id": {"subitem_relation_type_id_text": "http://dx.doi.org/10.1063/1.1149543", "subitem_relation_type_select": "DOI"}}]}, "item_10_rights_12": {"attribute_name": "\u6a29\u5229", "attribute_value_mlt": [{"subitem_rights": "Copyright (1999) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics."}]}, "item_10_select_15": {"attribute_name": "\u8457\u8005\u7248\u30d5\u30e9\u30b0", "attribute_value_mlt": [{"subitem_select_item": "publisher"}]}, "item_10_source_id_7": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "0034-6748", "subitem_source_identifier_type": "ISSN"}]}, "item_10_text_14": {"attribute_name": "\u30d5\u30a9\u30fc\u30de\u30c3\u30c8", "attribute_value_mlt": [{"subitem_text_value": "application/pdf"}]}, "item_creator": {"attribute_name": "\u8457\u8005", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "Sasaki, K."}], "nameIdentifiers": [{"nameIdentifier": "13956", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Kawai, Y."}], "nameIdentifiers": [{"nameIdentifier": "13957", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Kadota, K."}], "nameIdentifiers": [{"nameIdentifier": "13958", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "\u30d5\u30a1\u30a4\u30eb\u60c5\u5831", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2018-02-19"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "RevSciInstrum_70_76.pdf", "filesize": [{"value": "123.5 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 123500.0, "url": {"label": "RevSciInstrum_70_76.pdf", "url": "https://nagoya.repo.nii.ac.jp/record/5435/files/RevSciInstrum_70_76.pdf"}, "version_id": "122fd6d1-2b28-45c9-a572-eee19d3e04c7"}]}, "item_language": {"attribute_name": "\u8a00\u8a9e", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "\u8cc7\u6e90\u30bf\u30a4\u30d7", "attribute_value_mlt": [{"resourcetype": "journal article", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "Determination of fluorine atom density in reactive plasmas by vacuum ultraviolet absorption spectroscopy at 95.85 nm", "item_titles": {"attribute_name": "\u30bf\u30a4\u30c8\u30eb", "attribute_value_mlt": [{"subitem_title": "Determination of fluorine atom density in reactive plasmas by vacuum ultraviolet absorption spectroscopy at 95.85 nm"}]}, "item_type_id": "10", "owner": "1", "path": ["320/321/322"], "permalink_uri": "http://hdl.handle.net/2237/7042", "pubdate": {"attribute_name": "\u516c\u958b\u65e5", "attribute_value": "2006-10-24"}, "publish_date": "2006-10-24", "publish_status": "0", "recid": "5435", "relation": {}, "relation_version_is_last": true, "title": ["Determination of fluorine atom density in reactive plasmas by vacuum ultraviolet absorption spectroscopy at 95.85 nm"], "weko_shared_id": 3}