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  1. B200 工学部/工学研究科
  2. B200a 雑誌掲載論文
  3. 学術雑誌

Determination of fluorine atom density in reactive plasmas by vacuum ultraviolet absorption spectroscopy at 95.85 nm

http://hdl.handle.net/2237/7042
http://hdl.handle.net/2237/7042
d849c05e-c547-4bac-b619-40d124eee88c
名前 / ファイル ライセンス アクション
RevSciInstrum_70_76.pdf RevSciInstrum_70_76.pdf (123.5 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2006-10-24
タイトル
タイトル Determination of fluorine atom density in reactive plasmas by vacuum ultraviolet absorption spectroscopy at 95.85 nm
言語 en
著者 Sasaki, K.

× Sasaki, K.

WEKO 13956

en Sasaki, K.

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Kawai, Y.

× Kawai, Y.

WEKO 13957

en Kawai, Y.

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Kadota, K.

× Kadota, K.

WEKO 13958

en Kadota, K.

Search repository
アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
権利
言語 en
権利情報 Copyright (1999) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.
抄録
内容記述 Vacuum ultraviolet absorption spectroscopy was developed for the measurement of absolute fluorine (F) atom density in reactive plasmas. In order to minimize the influence of radiation trapping (self-absorption)in the light source, fluorescence at a wavelength of 95.85 nm from the F atoms in an electron–cyclotron resonance (ECR) CF4 plasma, which was operated with a low microwave power (0.1 kW) and a low gas pressure (1 mTorr), was employed as the probe emission. A windowless transmission system for the probe emission was constructed by connecting the ECR light source with the target plasma and the detection system using vacuum tubes having small slits. The connection tubes were differentially evacuated with turbomolecular pumps to prevent neutral particles from passing through between the ECR and target plasmas. The present method was applied to high-density CF4 and C4F8 plasmas produced by helicon-wave discharges. The accuracy of the measurement was examined carefully by evaluating various sources of error. In the present article, we have emphasized the evaluation of the radiation trapping effect in the light source plasma.
言語 en
内容記述タイプ Abstract
出版者
言語 en
出版者 American Institute of Physics
言語
言語 eng
資源タイプ
資源タイプresource http://purl.org/coar/resource_type/c_6501
タイプ journal article
出版タイプ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
DOI
関連タイプ isVersionOf
識別子タイプ DOI
関連識別子 https://doi.org/10.1063/1.1149543
ISSN
収録物識別子タイプ PISSN
収録物識別子 0034-6748
書誌情報 en : Review of Scientific Instruments

巻 70, 号 1, p. 76-81, 発行日 1999-01
フォーマット
application/pdf
著者版フラグ
値 publisher
URI
識別子 http://hdl.handle.net/2237/7042
識別子タイプ HDL
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