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Determination of fluorine atom density in reactive plasmas by vacuum ultraviolet absorption spectroscopy at 95.85 nm
http://hdl.handle.net/2237/7042
http://hdl.handle.net/2237/7042d849c05e-c547-4bac-b619-40d124eee88c
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
RevSciInstrum_70_76.pdf (123.5 kB)
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| アイテムタイプ | 学術雑誌論文 / Journal Article(1) | |||||
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| 公開日 | 2006-10-24 | |||||
| タイトル | ||||||
| タイトル | Determination of fluorine atom density in reactive plasmas by vacuum ultraviolet absorption spectroscopy at 95.85 nm | |||||
| 言語 | en | |||||
| 著者 |
Sasaki, K.
× Sasaki, K.× Kawai, Y.× Kadota, K. |
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| アクセス権 | ||||||
| アクセス権 | open access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
| 権利 | ||||||
| 権利情報 | Copyright (1999) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. | |||||
| 言語 | en | |||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Vacuum ultraviolet absorption spectroscopy was developed for the measurement of absolute fluorine (F) atom density in reactive plasmas. In order to minimize the influence of radiation trapping (self-absorption)in the light source, fluorescence at a wavelength of 95.85 nm from the F atoms in an electron–cyclotron resonance (ECR) CF4 plasma, which was operated with a low microwave power (0.1 kW) and a low gas pressure (1 mTorr), was employed as the probe emission. A windowless transmission system for the probe emission was constructed by connecting the ECR light source with the target plasma and the detection system using vacuum tubes having small slits. The connection tubes were differentially evacuated with turbomolecular pumps to prevent neutral particles from passing through between the ECR and target plasmas. The present method was applied to high-density CF4 and C4F8 plasmas produced by helicon-wave discharges. The accuracy of the measurement was examined carefully by evaluating various sources of error. In the present article, we have emphasized the evaluation of the radiation trapping effect in the light source plasma. | |||||
| 言語 | en | |||||
| 出版者 | ||||||
| 出版者 | American Institute of Physics | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプresource | http://purl.org/coar/resource_type/c_6501 | |||||
| タイプ | journal article | |||||
| 出版タイプ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
| DOI | ||||||
| 関連タイプ | isVersionOf | |||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | https://doi.org/10.1063/1.1149543 | |||||
| ISSN | ||||||
| 収録物識別子タイプ | PISSN | |||||
| 収録物識別子 | 0034-6748 | |||||
| 書誌情報 |
en : Review of Scientific Instruments 巻 70, 号 1, p. 76-81, 発行日 1999-01 |
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| フォーマット | ||||||
| 値 | application/pdf | |||||
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| 値 | publisher | |||||
| URI | ||||||
| 識別子 | http://hdl.handle.net/2237/7042 | |||||
| 識別子タイプ | HDL | |||||
