@article{oai:nagoya.repo.nii.ac.jp:00005493,
 author = {Nagai, Hisao and Hiramatsu, Mineo and Hori, Masaru and Goto, Toshio},
 issue = {7},
 journal = {Review of Scientific Instruments},
 month = {Jul},
 note = {The compact measurement system for absolute density of oxygen (O) atom has been developed, which employs a vacuum ultraviolet absorption spectroscopy (VUVAS) technique with a high-pressure microdischarge hollow cathode lamp (MHCL) as a light source. The influences of self-absorption, emission line profile of the MHCL, and background absorption of oxygen molecule (O_2) on the determination of absolute O atom density were taken into consideration. This system has been applied for measuring absolute O atom densities in an inductively coupled O_2 plasma. O atom densities were estimated to be on the order of 1*10^12–1*10^13 cm^-3 at an input power of 100 W and an O_2 pressure ranging from 1.3 to 26.7 Pa. The behavior of O atom density measured using VUVAS technique was consistent with that obtained by actinometry technique using O emission intensities of 844.6 nm and 777.4 nm lines. Moreover, the lifetime of O atom in the afterglow plasma has been measured. The decay curves of the O atom density were fitted with exponential functions. The extinction process of O atom in the inductively coupled O_2 plasma has been discussed.},
 pages = {3453--3459},
 title = {Measurement of oxygen atom density employing vacuum ultraviolet absorption spectroscopy with microdischarge hollow cathode lamp},
 volume = {74},
 year = {2003}
}