@article{oai:nagoya.repo.nii.ac.jp:00005501, author = {Razzak, M. A. and Kondo, K. and Uesugi, Y. and Takamura, S.}, journal = {The 30th International Conference on Plasma Science (ICOPS 2003) IEEE Conference Record - Abstracts}, month = {}, pages = {446--446}, title = {Transition from Electrostatic to Electromagnetic Mode in Atmospheric Pressure RF Ar Inductively Coupled Plasma}, year = {2003} }