{"created":"2021-03-01T06:12:12.814117+00:00","id":5643,"links":{},"metadata":{"_buckets":{"deposit":"4fcc059d-3925-49da-8b90-6fdb37b39aed"},"_deposit":{"id":"5643","owners":[],"pid":{"revision_id":0,"type":"depid","value":"5643"},"status":"published"},"_oai":{"id":"oai:nagoya.repo.nii.ac.jp:00005643","sets":["320:321:322"]},"author_link":["14918","14919","14920"],"item_10_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2000-11-27","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"22","bibliographicPageEnd":"3525","bibliographicPageStart":"3523","bibliographicVolumeNumber":"77","bibliographic_titles":[{"bibliographic_title":"Applied Physics Letters","bibliographic_titleLang":"en"}]}]},"item_10_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"Spatial distributions of electron density n_e , electron temperature T_e , and wave field intensity in a planar microwave discharge at low pressures (10–100 mTorr) are measured with the discharge power as a parameter. Two different modes of electron heating are found: a bulk heating mode characterized with high T_e(～10 eV) in underdense plasma, and a surface heating mode with low T_e(～3 eV) in overdense plasma with a hot layer near the plasma-dielectric boundary. Abrupt transition between the two modes takes place near the cutoff density n_c where the electron plasma frequency coincides with the discharge frequency (2.45 GHz). In the underdense case (n_e<n_c), the microwave penetrates the bulk plasma and heats the majority of electrons confined in the dc ambipolar potential well, leading to high T_e . In the overdense case (n_e>n_c), the evanescent wave (surface wave) near the microwave window strongly heats the electrons in the boundary layer, which are transported to the bulk region and ionize the neutral particles to therein produce relatively cold electrons.","subitem_description_language":"en","subitem_description_type":"Abstract"}]},"item_10_identifier_60":{"attribute_name":"URI","attribute_value_mlt":[{"subitem_identifier_type":"HDL","subitem_identifier_uri":"http://hdl.handle.net/2237/7248"}]},"item_10_publisher_32":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"American Institute of Physics","subitem_publisher_language":"en"}]},"item_10_relation_11":{"attribute_name":"DOI","attribute_value_mlt":[{"subitem_relation_type":"isVersionOf","subitem_relation_type_id":{"subitem_relation_type_id_text":"https://doi.org/10.1063/1.1329322","subitem_relation_type_select":"DOI"}}]},"item_10_rights_12":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"Copyright (2000) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.","subitem_rights_language":"en"}]},"item_10_select_15":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_select_item":"publisher"}]},"item_10_source_id_7":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"0003-6951","subitem_source_identifier_type":"PISSN"}]},"item_10_text_14":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_text_value":"application/pdf"}]},"item_1615787544753":{"attribute_name":"出版タイプ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"open access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_abf2"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Sugai, H.","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"14918","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Ghanashev, I.","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"14919","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Mizuno, K.","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"14920","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2018-02-19"}],"displaytype":"detail","filename":"ApplPhysLett_77_3523.pdf","filesize":[{"value":"168.5 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"ApplPhysLett_77_3523.pdf","objectType":"fulltext","url":"https://nagoya.repo.nii.ac.jp/record/5643/files/ApplPhysLett_77_3523.pdf"},"version_id":"5c8b917a-cc97-4422-95ea-31285be61162"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"Transition of electron heating mode in a planar microwave discharge at low pressures","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Transition of electron heating mode in a planar microwave discharge at low pressures","subitem_title_language":"en"}]},"item_type_id":"10","owner":"1","path":["322"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2007-01-15"},"publish_date":"2007-01-15","publish_status":"0","recid":"5643","relation_version_is_last":true,"title":["Transition of electron heating mode in a planar microwave discharge at low pressures"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-01-16T03:50:22.205716+00:00"}