@article{oai:nagoya.repo.nii.ac.jp:00005644,
 author = {Stamate, E. and Sugai, H. and Ohe, K.},
 issue = {17},
 journal = {Applied Physics Letters},
 month = {Apr},
 note = {A thermal probe for plasma diagnostics is introduced. The method is based upon measuring the equilibrium temperature of a conducting sphere as a function of its applied bias. The resulting temperature–voltage characteristic is processed using a theoretical model that accounts for charge and thermodynamic balance. The thermal probe is capable of detecting negative ions and shows sensitivity to certain chemical reactions. Measurements performed in Ar, Ar/SF_6, and O_2 show good agreement among the plasma parameters using thermal and Langmuir probes.},
 pages = {3066--3068},
 title = {Principle and application of a thermal probe to reactive plasmas},
 volume = {80},
 year = {2002}
}