@article{oai:nagoya.repo.nii.ac.jp:00005674,
 author = {Tanaka, Yasunori and Yokomizu, Yasunobu and Ishikawa, Motohiro and Matsumura, Toshiro},
 issue = {5},
 journal = {IEEE Transactions on Plasma Science},
 month = {Oct},
 note = {Numerical computation was performed to derive particle compositions of high-pressure SF_6 plasmas in which the electron temperature T_e is greater than gas temperature T_g. The effective excitation temperature T^{ex} for each of particles was proposed to express the distribution of particles in excited states. Furthermore, the relation equations for chemical equilibrium in  two-temperature plasma were developed on the basis of the second law of thermodynamics. At fixed T_g in the range of 6000-9000 K, the increasing T_e from 9000-20000 K encourages the dissociation and ionization of particles, causing the composition of SF_6 plasma at 0.1 MPa to differ markedly from the composition under the condition of thermal equilibrium.},
 pages = {991--995},
 title = {Particle Composition of High-Pressure SF_6 Plasma with Electron Temperature Greater than Gas Temperature},
 volume = {25},
 year = {1997}
}