@article{oai:nagoya.repo.nii.ac.jp:00007717, author = {Sasaki, H. and Takagi, S. and Shikida, M. and Sato, K.}, journal = {International Symposium on Micro-NanoMechatronics and Human Science}, month = {}, note = {We have previously proposed an arrayed vertical motion system based on a tulip-shaped electrostatic clutch for producing haptic displays. The system has an advantage in that it is able to individually operate arrayed minute projection with high-power and large strokes (Output: 600 mN and displacement: 60 μm). This time, We added a new electrostatic latch mechanism to the system to individually control the projection state. We used MEMS technologies to fabricate a 4x4 array electrostatic latch mechanism. The total size of the mechanism was 6.0 x 6.0 x 0.5 mm. We evaluated the relationship between the applied voltage and a holding force of a few mN was obtained for the spring device.}, pages = {494--498}, title = {Projection Clutching System for Force Transmission System based on Tulip-shaped Electrostatic Clutch}, year = {2007} }