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Characteristics of On-Wall In Tube Thermal Flexible Mass-Flow Sensors
http://hdl.handle.net/2237/9539
http://hdl.handle.net/2237/9539cdcf1049-2c53-43cb-8016-b37b2b78e333
名前 / ファイル | ライセンス | アクション |
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2008-03-03 | |||||
タイトル | ||||||
タイトル | Characteristics of On-Wall In Tube Thermal Flexible Mass-Flow Sensors | |||||
言語 | en | |||||
著者 |
Tan, Z.Y.
× Tan, Z.Y.× Shikida, M.× Hirota, M.× Sato, K. |
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アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
権利 | ||||||
言語 | en | |||||
権利情報 | Copyright © 2006 IEEE. Reprinted from (relevant publication info). This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of Nagoya University’s products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org. | |||||
抄録 | ||||||
内容記述 | We developed a wall-mounted in-tube thermal flexible sensor for measuring mass flow that can measure the flow rate in both hydraunlically developing and fully-developed regions. The flexible structure was achieved by using polymer MEMS technologies. It has high linearity with a TCR of 0.0026K^{-1}, and a steady maximum value for the response time is reached within 7μs. The measuring distance from the tube entrance is 8.3 D (D=inner diameter of tube). This is much shorter than 64D, the theoretically calculated distance necessary for the formation of a fully-developed flow condition. | |||||
言語 | en | |||||
内容記述タイプ | Abstract | |||||
出版者 | ||||||
言語 | en | |||||
出版者 | IEEE | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプresource | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
出版タイプ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
DOI | ||||||
関連タイプ | isVersionOf | |||||
識別子タイプ | DOI | |||||
関連識別子 | https://doi.org/10.1109/MEMSYS.2006.1627876 | |||||
ISBN | ||||||
関連タイプ | isPartOf | |||||
識別子タイプ | ISBN | |||||
関連識別子 | 0-7803-9475-5 | |||||
ISSN | ||||||
収録物識別子タイプ | PISSN | |||||
収録物識別子 | 1084-6999 | |||||
書誌情報 |
en : 19th IEEE International Conference on Micro Electro Mechanical Systems p. 622-625, 発行日 2006 |
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フォーマット | ||||||
application/pdf | ||||||
著者版フラグ | ||||||
値 | publisher | |||||
URI | ||||||
識別子 | http://hdl.handle.net/2237/9539 | |||||
識別子タイプ | HDL |