@article{oai:nagoya.repo.nii.ac.jp:00007819,
 author = {Tan, Z.Y. and Shikida, M. and Hirota, M. and Sato, K.},
 journal = {19th IEEE International Conference on Micro Electro Mechanical Systems},
 month = {},
 note = {We developed a wall-mounted in-tube thermal flexible sensor for measuring mass flow that can measure the flow rate in both hydraunlically developing and fully-developed regions. The flexible structure was achieved by using polymer MEMS technologies. It has high linearity with a TCR of 0.0026K^{-1}, and a steady maximum value for the response time is reached within 7μs. The measuring distance from the tube entrance is 8.3 D (D=inner diameter of tube). This is much shorter than 64D, the theoretically calculated distance necessary for the formation of a fully-developed flow condition.},
 pages = {622--625},
 title = {Characteristics of On-Wall In Tube Thermal Flexible Mass-Flow Sensors},
 year = {2006}
}