@article{oai:nagoya.repo.nii.ac.jp:00007835,
 author = {Takagi, S. and Sasaki, H. and Shikida, M. and Sato, K.},
 journal = {Solid-State Sensors, Actuators and Microsystems Conference},
 month = {},
 note = {We have previously proposed an arrayed vertical motion system based on a tulip-shaped electrostatic clutch for producing haptic displays. The system has an advantage in that it is able to individually operate arrayed end-effecter elements with high-power and large strokes (Output: 600 mN and displacement: 60μm). We added a new electrostatic latch mechanism to the system to individually control the projection state. We used MEMS technologies to fabricate a 4x4 array electrostatic latch mechanism. The total size of the mechanism was 6.0 x 6.0 x 0.5mm. We evaluated the relationship between the applied voltage and a holding force of a few mN was obtained for the spring device.},
 pages = {1147--1150},
 title = {Electrostatic Latch Mechanism for Handling Projection on Arrayed Vertical Motion System},
 year = {2007}
}