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Mechanical Properties of Silicon-Based Membrane Windows Applied for a Miniature Electron Beam Radiation System
http://hdl.handle.net/2237/9570
http://hdl.handle.net/2237/9570d5e8b01c-efb5-4362-bf6e-d39d133ce330
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
shik_14.pdf (518.5 kB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2008-03-04 | |||||
| タイトル | ||||||
| タイトル | Mechanical Properties of Silicon-Based Membrane Windows Applied for a Miniature Electron Beam Radiation System | |||||
| 言語 | en | |||||
| 著者 |
Yamaguchi, M.
× Yamaguchi, M.× Yamada, Y.× Goto, Y.× Shikida, M.× Sato, K. |
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| アクセス権 | ||||||
| アクセス権 | open access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
| 権利 | ||||||
| 言語 | en | |||||
| 権利情報 | Copyright © 2007 IEEE. Reprinted from (relevant publication info). This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of Nagoya University’s products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org. | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Silicon | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | SiN | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | SiC | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Membrane | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Electron Beam | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Residential Stress | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Young's Modulus | |||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | This paper presents the mechanical properties of silicon-based membranes windows applied for miniature electron beam radiation system. The membranes were used for the physical separation between the vacuum and atmosphere, and used as an EB-permeable membrane window. We used MEMS technologies to fabricate the thin Si-based membrane window structure. The size of each window is 6 mm in length and 2 mm in width. Four different types of membrane windows were fabricated to compare the mechanical properties. Residential stress, Young's modulus, and breakage pressure were evaluated by using bulge test technique. SiN/SiO2/Si membrane showed the highest breakage pressure and operated more than one thousand hours. | |||||
| 言語 | en | |||||
| 出版者 | ||||||
| 出版者 | IEEE | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプresource | http://purl.org/coar/resource_type/c_6501 | |||||
| タイプ | journal article | |||||
| 出版タイプ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
| DOI | ||||||
| 関連タイプ | isVersionOf | |||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | https://doi.org/10.1109/SENSOR.2007.4300462 | |||||
| ISBN | ||||||
| 関連タイプ | isPartOf | |||||
| 識別子タイプ | ISBN | |||||
| 関連識別子 | 1-4244-0842-3 | |||||
| 書誌情報 |
en : Solid-State Sensors, Actuators and Microsystems Conference p. 1633-1636, 発行日 2007 |
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| フォーマット | ||||||
| 値 | application/pdf | |||||
| 著者版フラグ | ||||||
| 値 | publisher | |||||
| URI | ||||||
| 識別子 | http://hdl.handle.net/2237/9570 | |||||
| 識別子タイプ | HDL | |||||
