@article{oai:nagoya.repo.nii.ac.jp:00007850, author = {Yamaguchi, M. and Yamada, Y. and Goto, Y. and Shikida, M. and Sato, K.}, journal = {Solid-State Sensors, Actuators and Microsystems Conference}, month = {}, note = {This paper presents the mechanical properties of silicon-based membranes windows applied for miniature electron beam radiation system. The membranes were used for the physical separation between the vacuum and atmosphere, and used as an EB-permeable membrane window. We used MEMS technologies to fabricate the thin Si-based membrane window structure. The size of each window is 6 mm in length and 2 mm in width. Four different types of membrane windows were fabricated to compare the mechanical properties. Residential stress, Young's modulus, and breakage pressure were evaluated by using bulge test technique. SiN/SiO2/Si membrane showed the highest breakage pressure and operated more than one thousand hours.}, pages = {1633--1636}, title = {Mechanical Properties of Silicon-Based Membrane Windows Applied for a Miniature Electron Beam Radiation System}, year = {2007} }