{"created":"2021-03-01T06:14:31.801509+00:00","id":7850,"links":{},"metadata":{"_buckets":{"deposit":"1425776e-9480-4179-a000-99154cd8f364"},"_deposit":{"id":"7850","owners":[],"pid":{"revision_id":0,"type":"depid","value":"7850"},"status":"published"},"_oai":{"id":"oai:nagoya.repo.nii.ac.jp:00007850","sets":["320:321:322"]},"author_link":["22417","22418","22419","22420","22421"],"item_10_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2007","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"1636","bibliographicPageStart":"1633","bibliographic_titles":[{"bibliographic_title":"Solid-State Sensors, Actuators and Microsystems Conference","bibliographic_titleLang":"en"}]}]},"item_10_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"This paper presents the mechanical properties of silicon-based membranes windows applied for miniature electron beam radiation system. The membranes were used for the physical separation between the vacuum and atmosphere, and used as an EB-permeable membrane window. We used MEMS technologies to fabricate the thin Si-based membrane window structure. The size of each window is 6 mm in length and 2 mm in width. Four different types of membrane windows were fabricated to compare the mechanical properties. Residential stress, Young's modulus, and breakage pressure were evaluated by using bulge test technique. SiN/SiO2/Si membrane showed the highest breakage pressure and operated more than one thousand hours.","subitem_description_language":"en","subitem_description_type":"Abstract"}]},"item_10_identifier_60":{"attribute_name":"URI","attribute_value_mlt":[{"subitem_identifier_type":"HDL","subitem_identifier_uri":"http://hdl.handle.net/2237/9570"}]},"item_10_publisher_32":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"IEEE","subitem_publisher_language":"en"}]},"item_10_relation_11":{"attribute_name":"DOI","attribute_value_mlt":[{"subitem_relation_type":"isVersionOf","subitem_relation_type_id":{"subitem_relation_type_id_text":"https://doi.org/10.1109/SENSOR.2007.4300462","subitem_relation_type_select":"DOI"}}]},"item_10_relation_8":{"attribute_name":"ISBN","attribute_value_mlt":[{"subitem_relation_type":"isPartOf","subitem_relation_type_id":{"subitem_relation_type_id_text":"1-4244-0842-3","subitem_relation_type_select":"ISBN"}}]},"item_10_rights_12":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"Copyright © 2007 IEEE. Reprinted from (relevant publication info). This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of Nagoya University’s products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org.","subitem_rights_language":"en"}]},"item_10_select_15":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_select_item":"publisher"}]},"item_10_text_14":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_text_value":"application/pdf"}]},"item_1615787544753":{"attribute_name":"出版タイプ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"open access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_abf2"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Yamaguchi, M.","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"22417","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Yamada, Y.","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"22418","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Goto, Y.","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"22419","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Shikida, M.","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"22420","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Sato, K.","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"22421","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2018-02-19"}],"displaytype":"detail","filename":"shik_14.pdf","filesize":[{"value":"518.5 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"shik_14.pdf","objectType":"fulltext","url":"https://nagoya.repo.nii.ac.jp/record/7850/files/shik_14.pdf"},"version_id":"f0881729-d0f2-4f7d-b9c6-b0460d1e4e4b"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"Silicon","subitem_subject_scheme":"Other"},{"subitem_subject":"SiN","subitem_subject_scheme":"Other"},{"subitem_subject":"SiC","subitem_subject_scheme":"Other"},{"subitem_subject":"Membrane","subitem_subject_scheme":"Other"},{"subitem_subject":"Electron Beam","subitem_subject_scheme":"Other"},{"subitem_subject":"Residential Stress","subitem_subject_scheme":"Other"},{"subitem_subject":"Young's Modulus","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"Mechanical Properties of Silicon-Based Membrane Windows Applied for a Miniature Electron Beam Radiation System","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Mechanical Properties of Silicon-Based Membrane Windows Applied for a Miniature Electron Beam Radiation System","subitem_title_language":"en"}]},"item_type_id":"10","owner":"1","path":["322"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2008-03-04"},"publish_date":"2008-03-04","publish_status":"0","recid":"7850","relation_version_is_last":true,"title":["Mechanical Properties of Silicon-Based Membrane Windows Applied for a Miniature Electron Beam Radiation System"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-01-16T03:53:19.735467+00:00"}