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  1. B200 工学部/工学研究科
  2. B200e 会議資料
  3. 国際会議

Miniaturization of on-wall in-tube flexible thermal flow sensor using heat shrinkable tube

http://hdl.handle.net/2237/11139
http://hdl.handle.net/2237/11139
1c449f8e-5639-4338-9862-8ee401c14123
名前 / ファイル ライセンス アクション
08_MEMS_Naito.pdf 08_MEMS_Naito.pdf (1.3 MB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2009-02-23
タイトル
タイトル Miniaturization of on-wall in-tube flexible thermal flow sensor using heat shrinkable tube
言語 en
著者 Naito, J.

× Naito, J.

WEKO 26787

en Naito, J.

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Shikida, M.

× Shikida, M.

WEKO 26788

en Shikida, M.

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Hirota, M.

× Hirota, M.

WEKO 26789

en Hirota, M.

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Tan, Z.Y.

× Tan, Z.Y.

WEKO 26790

en Tan, Z.Y.

Search repository
Sato, K.

× Sato, K.

WEKO 26791

en Sato, K.

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佐藤, 一雄

× 佐藤, 一雄

WEKO 26792

ja 佐藤, 一雄

Search repository
アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
権利
言語 en
権利情報 Copyright © 2008 IEEE. Reprinted from IEEE 21st International Conference on Micro Electro Mechanical Systems, 2008, MEMS, p.924-927. This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of Nagoya University’s products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org.
抄録
内容記述 We previously proposed a novel type of on-wall in-tube thermal flow sensor, and experimentally evaluated its performance. The sensor has an advantage that it can measure the flow-rate both at near the tube entrance (hydraulically developing region) [1] and at bent tube (axially asymmetric flow) [2]. With the requirements of further miniaturization of the sensor in the fields of the portable fuel cells and chemical analyzers, we newly developed the fabrication process to miniaturize it less than 2.0 mm in external diameter by using a heat shrinkable tube. The film sensor fabricated by photolithography was inserted inside tube manually. By applying heat shrinking process, the film was automatically mounted on the inner wall surface, and the outer size of the tube was miniaturized to almost of the half size from its original. The final inner and outer diameters of the tube were 1.2 mm and 1.7 mm, respectively. We evaluated the fundamental performance of this flow sensor. The electrical resistance at the sensor linearly increased with temperature. The obtained temperature coefficient of resistance of the sensing element was 0.0023 K-1. We measured the relationship between the input power consumption and the gas flow rate, and finally evaluated the response time. We obtained a value of 100 msec by forming a cavity structure under the heat element.
言語 en
内容記述タイプ Abstract
出版者
言語 en
出版者 IEEE
言語
言語 eng
資源タイプ
資源タイプresource http://purl.org/coar/resource_type/c_6501
タイプ journal article
出版タイプ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
DOI
関連タイプ isVersionOf
識別子タイプ DOI
関連識別子 https://doi.org/10.1109/MEMSYS.2008.4443808
ISBN
関連タイプ isPartOf
識別子タイプ ISBN
関連識別子 978-1-4244-1793-3
ISSN
収録物識別子タイプ PISSN
収録物識別子 1084-6999
書誌情報 en : IEEE 21st International Conference on Micro Electro Mechanical Systems (MEMS 2008)

p. 924-927, 発行日 2008-01
フォーマット
application/pdf
著者版フラグ
値 publisher
URI
識別子 http://hdl.handle.net/2237/11139
識別子タイプ HDL
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