ログイン
言語:

WEKO3

  • トップ
  • ランキング
To
lat lon distance
To

Field does not validate



インデックスリンク

インデックスツリー

メールアドレスを入力してください。

WEKO

One fine body…

WEKO

One fine body…

アイテム

{"_buckets": {"deposit": "2efc217a-572a-42c8-b140-463c5c7d0002"}, "_deposit": {"id": "10782", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "10782"}, "status": "published"}, "_oai": {"id": "oai:nagoya.repo.nii.ac.jp:00010782", "sets": ["322"]}, "author_link": ["32382", "32383", "32384"], "item_10_biblio_info_6": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2009-06-29", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "4", "bibliographicPageEnd": "835", "bibliographicPageStart": "831", "bibliographicVolumeNumber": "27", "bibliographic_titles": [{"bibliographic_title": "Journal of Vacuum Science and Technology A", "bibliographic_titleLang": "en"}]}]}, "item_10_description_4": {"attribute_name": "抄録", "attribute_value_mlt": [{"subitem_description": "Fluorination of Al2O3 and Y2O3 surfaces was investigated by irradiating high-density, helicon-wave CF4 /O2 and SF6 /O2 plasmas. The Al2O3 surface bombarded by high-flux positive ions of the CF4 /O2 plasma was fluorinated significantly. On contrast, Y2O3 was less fluorinated than Al2O3 when they were irradiated by the same CF4 /O2 plasma. The analysis of the Al2O3 surface irradiated by the CF4 /O2 plasma suggests that the fluorination is triggered by reactions between fluorocarbon deposit and Al–O bonding with the assistance of ion bombardment. On the other hand, irradiation of the SF6 /O2 plasma induced less significant fluorination on the Al2O3 surface. This suggests a lower reaction probability between sulfur fluoride deposit and Al–O bonding. The difference in the fluorination of the Al2O3 and Y2O3 surfaces induced by the irradiations of the CF4 /O2 and SF6 /O2 plasmas is understood by comparing the bonding energies of C–O, S–O, Al–O, and Y–O.", "subitem_description_language": "en", "subitem_description_type": "Abstract"}]}, "item_10_identifier_60": {"attribute_name": "URI", "attribute_value_mlt": [{"subitem_identifier_type": "HDL", "subitem_identifier_uri": "http://hdl.handle.net/2237/12625"}, {"subitem_identifier_type": "DOI", "subitem_identifier_uri": "http://dx.doi.org/10.1116/1.3112624"}]}, "item_10_publisher_32": {"attribute_name": "出版者", "attribute_value_mlt": [{"subitem_publisher": "American Institite of Physics", "subitem_publisher_language": "en"}]}, "item_10_relation_11": {"attribute_name": "DOI", "attribute_value_mlt": [{"subitem_relation_type": "isVersionOf", "subitem_relation_type_id": {"subitem_relation_type_id_text": "https://doi.org/10.1116/1.3112624", "subitem_relation_type_select": "DOI"}}]}, "item_10_rights_12": {"attribute_name": "権利", "attribute_value_mlt": [{"subitem_rights": "Copyright (2009) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior per mission of the author and the American Institute of Physics.", "subitem_rights_language": "en"}]}, "item_10_select_15": {"attribute_name": "著者版フラグ", "attribute_value_mlt": [{"subitem_select_item": "publisher"}]}, "item_10_source_id_7": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "0734-2101", "subitem_source_identifier_type": "PISSN"}]}, "item_10_text_14": {"attribute_name": "フォーマット", "attribute_value_mlt": [{"subitem_text_value": "application/pdf"}]}, "item_1615787544753": {"attribute_name": "出版タイプ", "attribute_value_mlt": [{"subitem_version_resource": "http://purl.org/coar/version/c_970fb48d4fbd8a85", "subitem_version_type": "VoR"}]}, "item_access_right": {"attribute_name": "アクセス権", "attribute_value_mlt": [{"subitem_access_right": "open access", "subitem_access_right_uri": "http://purl.org/coar/access_right/c_abf2"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "Miwa, Kazuhiro", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "32382", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Takada, Noriharu", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "32383", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Sasaki, Koichi", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "32384", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2018-02-20"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "JVA000831.pdf", "filesize": [{"value": "438.0 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_note", "mimetype": "application/pdf", "size": 438000.0, "url": {"label": "JVA000831.pdf", "objectType": "fulltext", "url": "https://nagoya.repo.nii.ac.jp/record/10782/files/JVA000831.pdf"}, "version_id": "27b95c2a-9cbc-4dc6-8bc0-3728a6f21dd0"}]}, "item_keyword": {"attribute_name": "キーワード", "attribute_value_mlt": [{"subitem_subject": "alumina", "subitem_subject_scheme": "Other"}, {"subitem_subject": "bonds (chemical)", "subitem_subject_scheme": "Other"}, {"subitem_subject": "ion-surface impact", "subitem_subject_scheme": "Other"}, {"subitem_subject": "plasma materials", "subitem_subject_scheme": "Other"}, {"subitem_subject": "processing", "subitem_subject_scheme": "Other"}, {"subitem_subject": "surface chemistry", "subitem_subject_scheme": "Other"}, {"subitem_subject": "yttrium compounds", "subitem_subject_scheme": "Other"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "journal article", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "Fluorination mechanisms of Al2O3 and Y2O3 surfaces irradiated by high-density CF4/O2 and SF6/O2 plasmas", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "Fluorination mechanisms of Al2O3 and Y2O3 surfaces irradiated by high-density CF4/O2 and SF6/O2 plasmas", "subitem_title_language": "en"}]}, "item_type_id": "10", "owner": "1", "path": ["322"], "permalink_uri": "http://hdl.handle.net/2237/12625", "pubdate": {"attribute_name": "PubDate", "attribute_value": "2010-01-20"}, "publish_date": "2010-01-20", "publish_status": "0", "recid": "10782", "relation": {}, "relation_version_is_last": true, "title": ["Fluorination mechanisms of Al2O3 and Y2O3 surfaces irradiated by high-density CF4/O2 and SF6/O2 plasmas"], "weko_shared_id": -1}
  1. B200 工学部/工学研究科
  2. B200a 雑誌掲載論文
  3. 学術雑誌

Fluorination mechanisms of Al2O3 and Y2O3 surfaces irradiated by high-density CF4/O2 and SF6/O2 plasmas

http://hdl.handle.net/2237/12625
http://hdl.handle.net/2237/12625
cd78c9a2-b226-4b5c-a237-ed4878e8bea8
名前 / ファイル ライセンス アクション
JVA000831.pdf JVA000831.pdf (438.0 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2010-01-20
タイトル
タイトル Fluorination mechanisms of Al2O3 and Y2O3 surfaces irradiated by high-density CF4/O2 and SF6/O2 plasmas
言語 en
著者 Miwa, Kazuhiro

× Miwa, Kazuhiro

WEKO 32382

en Miwa, Kazuhiro

Search repository
Takada, Noriharu

× Takada, Noriharu

WEKO 32383

en Takada, Noriharu

Search repository
Sasaki, Koichi

× Sasaki, Koichi

WEKO 32384

en Sasaki, Koichi

Search repository
アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
権利
言語 en
権利情報 Copyright (2009) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior per mission of the author and the American Institute of Physics.
キーワード
主題Scheme Other
主題 alumina
キーワード
主題Scheme Other
主題 bonds (chemical)
キーワード
主題Scheme Other
主題 ion-surface impact
キーワード
主題Scheme Other
主題 plasma materials
キーワード
主題Scheme Other
主題 processing
キーワード
主題Scheme Other
主題 surface chemistry
キーワード
主題Scheme Other
主題 yttrium compounds
抄録
内容記述 Fluorination of Al2O3 and Y2O3 surfaces was investigated by irradiating high-density, helicon-wave CF4 /O2 and SF6 /O2 plasmas. The Al2O3 surface bombarded by high-flux positive ions of the CF4 /O2 plasma was fluorinated significantly. On contrast, Y2O3 was less fluorinated than Al2O3 when they were irradiated by the same CF4 /O2 plasma. The analysis of the Al2O3 surface irradiated by the CF4 /O2 plasma suggests that the fluorination is triggered by reactions between fluorocarbon deposit and Al–O bonding with the assistance of ion bombardment. On the other hand, irradiation of the SF6 /O2 plasma induced less significant fluorination on the Al2O3 surface. This suggests a lower reaction probability between sulfur fluoride deposit and Al–O bonding. The difference in the fluorination of the Al2O3 and Y2O3 surfaces induced by the irradiations of the CF4 /O2 and SF6 /O2 plasmas is understood by comparing the bonding energies of C–O, S–O, Al–O, and Y–O.
言語 en
内容記述タイプ Abstract
出版者
言語 en
出版者 American Institite of Physics
言語
言語 eng
資源タイプ
資源タイプresource http://purl.org/coar/resource_type/c_6501
タイプ journal article
出版タイプ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
DOI
関連タイプ isVersionOf
識別子タイプ DOI
関連識別子 https://doi.org/10.1116/1.3112624
ISSN
収録物識別子タイプ PISSN
収録物識別子 0734-2101
書誌情報 en : Journal of Vacuum Science and Technology A

巻 27, 号 4, p. 831-835, 発行日 2009-06-29
フォーマット
application/pdf
著者版フラグ
値 publisher
URI
識別子 http://hdl.handle.net/2237/12625
識別子タイプ HDL
URI
識別子 http://dx.doi.org/10.1116/1.3112624
識別子タイプ DOI
戻る
0
views
See details
Views

Versions

Ver.1 2021-03-01 19:19:40.918809
Show All versions

Share

Mendeley Twitter Facebook Print Addthis

Cite as

エクスポート

OAI-PMH
  • OAI-PMH JPCOAR
  • OAI-PMH DublinCore
  • OAI-PMH DDI
Other Formats
  • JSON
  • BIBTEX

Confirm


Powered by WEKO3


Powered by WEKO3