{"_buckets": {"deposit": "2efc217a-572a-42c8-b140-463c5c7d0002"}, "_deposit": {"id": "10782", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "10782"}, "status": "published"}, "_oai": {"id": "oai:nagoya.repo.nii.ac.jp:00010782", "sets": ["322"]}, "author_link": ["32382", "32383", "32384"], "item_10_biblio_info_6": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2009-06-29", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "4", "bibliographicPageEnd": "835", "bibliographicPageStart": "831", "bibliographicVolumeNumber": "27", "bibliographic_titles": [{"bibliographic_title": "Journal of Vacuum Science and Technology A", "bibliographic_titleLang": "en"}]}]}, "item_10_description_4": {"attribute_name": "抄録", "attribute_value_mlt": [{"subitem_description": "Fluorination of Al2O3 and Y2O3 surfaces was investigated by irradiating high-density, helicon-wave CF4 /O2 and SF6 /O2 plasmas. The Al2O3 surface bombarded by high-flux positive ions of the CF4 /O2 plasma was fluorinated significantly. On contrast, Y2O3 was less fluorinated than Al2O3 when they were irradiated by the same CF4 /O2 plasma. The analysis of the Al2O3 surface irradiated by the CF4 /O2 plasma suggests that the fluorination is triggered by reactions between fluorocarbon deposit and Al–O bonding with the assistance of ion bombardment. On the other hand, irradiation of the SF6 /O2 plasma induced less significant fluorination on the Al2O3 surface. This suggests a lower reaction probability between sulfur fluoride deposit and Al–O bonding. The difference in the fluorination of the Al2O3 and Y2O3 surfaces induced by the irradiations of the CF4 /O2 and SF6 /O2 plasmas is understood by comparing the bonding energies of C–O, S–O, Al–O, and Y–O.", "subitem_description_language": "en", "subitem_description_type": "Abstract"}]}, "item_10_identifier_60": {"attribute_name": "URI", "attribute_value_mlt": [{"subitem_identifier_type": "HDL", "subitem_identifier_uri": "http://hdl.handle.net/2237/12625"}, {"subitem_identifier_type": "DOI", "subitem_identifier_uri": "http://dx.doi.org/10.1116/1.3112624"}]}, "item_10_publisher_32": {"attribute_name": "出版者", "attribute_value_mlt": [{"subitem_publisher": "American Institite of Physics", "subitem_publisher_language": "en"}]}, "item_10_relation_11": {"attribute_name": "DOI", "attribute_value_mlt": [{"subitem_relation_type": "isVersionOf", "subitem_relation_type_id": {"subitem_relation_type_id_text": "https://doi.org/10.1116/1.3112624", "subitem_relation_type_select": "DOI"}}]}, "item_10_rights_12": {"attribute_name": "権利", "attribute_value_mlt": [{"subitem_rights": "Copyright (2009) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior per　mission of the author and the American Institute of Physics.", "subitem_rights_language": "en"}]}, "item_10_select_15": {"attribute_name": "著者版フラグ", "attribute_value_mlt": [{"subitem_select_item": "publisher"}]}, "item_10_source_id_7": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "0734-2101", "subitem_source_identifier_type": "PISSN"}]}, "item_10_text_14": {"attribute_name": "フォーマット", "attribute_value_mlt": [{"subitem_text_value": "application/pdf"}]}, "item_1615787544753": {"attribute_name": "出版タイプ", "attribute_value_mlt": [{"subitem_version_resource": "http://purl.org/coar/version/c_970fb48d4fbd8a85", "subitem_version_type": "VoR"}]}, "item_access_right": {"attribute_name": "アクセス権", "attribute_value_mlt": [{"subitem_access_right": "open access", "subitem_access_right_uri": "http://purl.org/coar/access_right/c_abf2"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "Miwa, Kazuhiro", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "32382", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Takada, Noriharu", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "32383", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Sasaki, Koichi", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "32384", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2018-02-20"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "JVA000831.pdf", "filesize": [{"value": "438.0 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_note", "mimetype": "application/pdf", "size": 438000.0, "url": {"label": "JVA000831.pdf", "objectType": "fulltext", "url": "https://nagoya.repo.nii.ac.jp/record/10782/files/JVA000831.pdf"}, "version_id": "27b95c2a-9cbc-4dc6-8bc0-3728a6f21dd0"}]}, "item_keyword": {"attribute_name": "キーワード", "attribute_value_mlt": [{"subitem_subject": "alumina", "subitem_subject_scheme": "Other"}, {"subitem_subject": "bonds (chemical)", "subitem_subject_scheme": "Other"}, {"subitem_subject": "ion-surface impact", "subitem_subject_scheme": "Other"}, {"subitem_subject": "plasma materials", "subitem_subject_scheme": "Other"}, {"subitem_subject": "processing", "subitem_subject_scheme": "Other"}, {"subitem_subject": "surface chemistry", "subitem_subject_scheme": "Other"}, {"subitem_subject": "yttrium compounds", "subitem_subject_scheme": "Other"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "journal article", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "Fluorination mechanisms of Al2O3 and Y2O3 surfaces irradiated by high-density CF4/O2 and SF6/O2 plasmas", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "Fluorination mechanisms of Al2O3 and Y2O3 surfaces irradiated by high-density CF4/O2 and SF6/O2 plasmas", "subitem_title_language": "en"}]}, "item_type_id": "10", "owner": "1", "path": ["322"], "permalink_uri": "http://hdl.handle.net/2237/12625", "pubdate": {"attribute_name": "PubDate", "attribute_value": "2010-01-20"}, "publish_date": "2010-01-20", "publish_status": "0", "recid": "10782", "relation": {}, "relation_version_is_last": true, "title": ["Fluorination mechanisms of Al2O3 and Y2O3 surfaces irradiated by high-density CF4/O2 and SF6/O2 plasmas"], "weko_shared_id": -1}