{"_buckets": {"deposit": "2efc217a-572a-42c8-b140-463c5c7d0002"}, "_deposit": {"id": "10782", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "10782"}, "status": "published"}, "_oai": {"id": "oai:nagoya.repo.nii.ac.jp:00010782"}, "item_10_biblio_info_6": {"attribute_name": "\u66f8\u8a8c\u60c5\u5831", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2009-06-29", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "4", "bibliographicPageEnd": "835", "bibliographicPageStart": "831", "bibliographicVolumeNumber": "27", "bibliographic_titles": [{"bibliographic_title": "Journal of Vacuum Science and Technology A"}]}]}, "item_10_description_4": {"attribute_name": "\u6284\u9332", "attribute_value_mlt": [{"subitem_description": "Fluorination of Al2O3 and Y2O3 surfaces was investigated by irradiating high-density, helicon-wave CF4 /O2 and SF6 /O2 plasmas. The Al2O3 surface bombarded by high-flux positive ions of the CF4 /O2 plasma was fluorinated significantly. On contrast, Y2O3 was less fluorinated than Al2O3 when they were irradiated by the same CF4 /O2 plasma. The analysis of the Al2O3 surface irradiated by the CF4 /O2 plasma suggests that the fluorination is triggered by reactions between fluorocarbon deposit and Al\u2013O bonding with the assistance of ion bombardment. On the other hand, irradiation of the SF6 /O2 plasma induced less significant fluorination on the Al2O3 surface. This suggests a lower reaction probability between sulfur fluoride deposit and Al\u2013O bonding. The difference in the fluorination of the Al2O3 and Y2O3 surfaces induced by the irradiations of the CF4 /O2 and SF6 /O2 plasmas is understood by comparing the bonding energies of C\u2013O, S\u2013O, Al\u2013O, and Y\u2013O.", "subitem_description_type": "Abstract"}]}, "item_10_identifier_60": {"attribute_name": "URI", "attribute_value_mlt": [{"subitem_identifier_type": "HDL", "subitem_identifier_uri": "http://hdl.handle.net/2237/12625"}, {"subitem_identifier_type": "DOI", "subitem_identifier_uri": "http://dx.doi.org/10.1116/1.3112624"}]}, "item_10_publisher_32": {"attribute_name": "\u51fa\u7248\u8005", "attribute_value_mlt": [{"subitem_publisher": "American Institite of Physics"}]}, "item_10_rights_12": {"attribute_name": "\u6a29\u5229", "attribute_value_mlt": [{"subitem_rights": "Copyright (2009) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior per\u3000mission of the author and the American Institute of Physics."}]}, "item_10_select_15": {"attribute_name": "\u8457\u8005\u7248\u30d5\u30e9\u30b0", "attribute_value_mlt": [{"subitem_select_item": "publisher"}]}, "item_10_source_id_7": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "0734-2101", "subitem_source_identifier_type": "ISSN"}]}, "item_10_text_14": {"attribute_name": "\u30d5\u30a9\u30fc\u30de\u30c3\u30c8", "attribute_value_mlt": [{"subitem_text_value": "application/pdf"}]}, "item_creator": {"attribute_name": "\u8457\u8005", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "Miwa, Kazuhiro"}], "nameIdentifiers": [{"nameIdentifier": "32382", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Takada, Noriharu"}], "nameIdentifiers": [{"nameIdentifier": "32383", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Sasaki, Koichi"}], "nameIdentifiers": [{"nameIdentifier": "32384", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "\u30d5\u30a1\u30a4\u30eb\u60c5\u5831", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2018-02-20"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "JVA000831.pdf", "filesize": [{"value": "438.0 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 438000.0, "url": {"label": "JVA000831.pdf", "url": "https://nagoya.repo.nii.ac.jp/record/10782/files/JVA000831.pdf"}, "version_id": "27b95c2a-9cbc-4dc6-8bc0-3728a6f21dd0"}]}, "item_keyword": {"attribute_name": "\u30ad\u30fc\u30ef\u30fc\u30c9", "attribute_value_mlt": [{"subitem_subject": "alumina", "subitem_subject_scheme": "Other"}, {"subitem_subject": "bonds (chemical)", "subitem_subject_scheme": "Other"}, {"subitem_subject": "ion-surface impact", "subitem_subject_scheme": "Other"}, {"subitem_subject": "plasma materials", "subitem_subject_scheme": "Other"}, {"subitem_subject": "processing", "subitem_subject_scheme": "Other"}, {"subitem_subject": "surface chemistry", "subitem_subject_scheme": "Other"}, {"subitem_subject": "yttrium compounds", "subitem_subject_scheme": "Other"}]}, "item_language": {"attribute_name": "\u8a00\u8a9e", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "\u8cc7\u6e90\u30bf\u30a4\u30d7", "attribute_value_mlt": [{"resourcetype": "journal article", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "Fluorination mechanisms of Al2O3 and Y2O3 surfaces irradiated by high-density CF4/O2 and SF6/O2 plasmas", "item_titles": {"attribute_name": "\u30bf\u30a4\u30c8\u30eb", "attribute_value_mlt": [{"subitem_title": "Fluorination mechanisms of Al2O3 and Y2O3 surfaces irradiated by high-density CF4/O2 and SF6/O2 plasmas"}]}, "item_type_id": "10", "owner": "1", "path": ["320/321/322"], "permalink_uri": "http://hdl.handle.net/2237/12625", "pubdate": {"attribute_name": "\u516c\u958b\u65e5", "attribute_name_i18n": "\u516c\u958b\u65e5", "attribute_value": "2010-01-20"}, "publish_date": "2010-01-20", "publish_status": "0", "recid": "10782", "relation": {}, "relation_version_is_last": true, "title": ["Fluorination mechanisms of Al2O3 and Y2O3 surfaces irradiated by high-density CF4/O2 and SF6/O2 plasmas"], "weko_shared_id": null}