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Micro-Machined Stent-Type Flow Sensor for Evaluation of Nasal Respiration
http://hdl.handle.net/2237/13915
http://hdl.handle.net/2237/139154c626421-54f0-491f-97e9-8a47739f77ed
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
09_MEMS_Yokota.pdf (2.1 MB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
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| 公開日 | 2010-08-02 | |||||
| タイトル | ||||||
| タイトル | Micro-Machined Stent-Type Flow Sensor for Evaluation of Nasal Respiration | |||||
| 言語 | en | |||||
| 著者 |
Yokota, T
× Yokota, T× Naito, J× Shikida, M× Sato, K |
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| アクセス権 | ||||||
| アクセス権 | open access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
| 権利 | ||||||
| 言語 | en | |||||
| 権利情報 | ©2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. | |||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | We present a thermal flow sensor that is suitable for measuring nasal respiration. To fix the flow sensor inside the nasal passage, we integrated it onto a stent structure, which is normally used as a medical device. The sensor was monolithically integrated on the Ti substrate by applying photolithography and wet etching processes. The developed fabrication has advantage that it is able to fabricate the both of the cavity for the thermal isolation and the stent structure during the same process. We mounted the flow sensor onto the inner surface of the silicone tube by inflating the balloon tube. The mechanical strength of the cylindrical stent under the compression condition was also studied, and it showed an elastic deformation when the force was less than 0.08 N. The developed flow sensor could detect the flow direction at the flow range of 0-2000 ccm. A response time of less than 260 msec was obtained by forming a cavity under the sensor. | |||||
| 言語 | en | |||||
| 出版者 | ||||||
| 出版者 | IEEE | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| 出版タイプ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
| DOI | ||||||
| 関連タイプ | isVersionOf | |||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | https://doi.org/10.1109/MEMSYS.2009.4805427 | |||||
| ISSN | ||||||
| 収録物識別子タイプ | PISSN | |||||
| 収録物識別子 | 1084-6999 | |||||
| 書誌情報 |
en : IEEE 22nd International Conference on Micro Electro Mechanical Systems (MEMS 2009) p. 495-498, 発行日 2009-01-25 |
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| フォーマット | ||||||
| 値 | application/pdf | |||||
| 著者版フラグ | ||||||
| 値 | publisher | |||||
| URI | ||||||
| 識別子 | http://hdl.handle.net/2237/13915 | |||||
| 識別子タイプ | HDL | |||||
| URI | ||||||
| 識別子 | http://dx.doi.org/10.1109/MEMSYS.2009.4805427 | |||||
| 識別子タイプ | DOI | |||||
