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{"_buckets": {"deposit": "270b552b-9d34-430b-8dc1-703435541270"}, "_deposit": {"id": "12040", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "12040"}, "status": "published"}, "_oai": {"id": "oai:nagoya.repo.nii.ac.jp:00012040", "sets": ["322"]}, "author_link": ["38181", "38182", "38183"], "item_10_biblio_info_6": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2009-01-25", "bibliographicIssueDateType": "Issued"}, "bibliographicPageEnd": "668", "bibliographicPageStart": "665", "bibliographic_titles": [{"bibliographic_title": "IEEE 22nd International Conference on Micro Electro Mechanical Systems (MEMS 2009)", "bibliographic_titleLang": "en"}]}]}, "item_10_description_4": {"attribute_name": "抄録", "attribute_value_mlt": [{"subitem_description": "Fatigue tests of silicon stepped cantilevers fabricated from silicon on insulator (SOI) wafers were conducted under the bending mode to evaluate the effect of cyclic loading on fractures occurring in silicon and Si/SiO2 interfaces. The specimen in the quasi-static mode fractured at the stress concentration site on the silicon specimens. However, during the fatigue tests the cantilever broke after 104 cycles with stress amplitude of nearly half of the bending strength at the fixed end comprising the Si/SiO2 interface. The results demonstrated that the cyclic stress durability in the Si/SiO2 interface is significantly lower than that of the silicon body.", "subitem_description_language": "en", "subitem_description_type": "Abstract"}]}, "item_10_identifier_60": {"attribute_name": "URI", "attribute_value_mlt": [{"subitem_identifier_type": "HDL", "subitem_identifier_uri": "http://hdl.handle.net/2237/13916"}, {"subitem_identifier_type": "DOI", "subitem_identifier_uri": "http://dx.doi.org/10.1109/MEMSYS.2009.4805470"}]}, "item_10_publisher_32": {"attribute_name": "出版者", "attribute_value_mlt": [{"subitem_publisher": "IEEE", "subitem_publisher_language": "en"}]}, "item_10_relation_11": {"attribute_name": "DOI", "attribute_value_mlt": [{"subitem_relation_type": "isVersionOf", "subitem_relation_type_id": {"subitem_relation_type_id_text": "https://doi.org/10.1109/MEMSYS.2009.4805470", "subitem_relation_type_select": "DOI"}}]}, "item_10_rights_12": {"attribute_name": "権利", "attribute_value_mlt": [{"subitem_rights": "©2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.", "subitem_rights_language": "en"}]}, "item_10_select_15": {"attribute_name": "著者版フラグ", "attribute_value_mlt": [{"subitem_select_item": "publisher"}]}, "item_10_source_id_7": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "1084-6999", "subitem_source_identifier_type": "PISSN"}]}, "item_10_text_14": {"attribute_name": "フォーマット", "attribute_value_mlt": [{"subitem_text_value": "application/pdf"}]}, "item_1615787544753": {"attribute_name": "出版タイプ", "attribute_value_mlt": [{"subitem_version_resource": "http://purl.org/coar/version/c_970fb48d4fbd8a85", "subitem_version_type": "VoR"}]}, "item_access_right": {"attribute_name": "アクセス権", "attribute_value_mlt": [{"subitem_access_right": "open access", "subitem_access_right_uri": "http://purl.org/coar/access_right/c_abf2"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "Ando, T", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "38181", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Takumi, T", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "38182", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Sato, K", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "38183", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2018-02-20"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "09_MEMS_Ando.pdf", "filesize": [{"value": "816.3 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_note", "mimetype": "application/pdf", "size": 816300.0, "url": {"label": "09_MEMS_Ando.pdf", "objectType": "fulltext", "url": "https://nagoya.repo.nii.ac.jp/record/12040/files/09_MEMS_Ando.pdf"}, "version_id": "a1792369-1387-4c27-b59e-fb566d8a943a"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "journal article", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "Degradation of Mechanical Strength at Si/SiO2 Interface on SOI Wafers under Cyclic Loading", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "Degradation of Mechanical Strength at Si/SiO2 Interface on SOI Wafers under Cyclic Loading", "subitem_title_language": "en"}]}, "item_type_id": "10", "owner": "1", "path": ["322"], "permalink_uri": "http://hdl.handle.net/2237/13916", "pubdate": {"attribute_name": "PubDate", "attribute_value": "2010-08-03"}, "publish_date": "2010-08-03", "publish_status": "0", "recid": "12040", "relation": {}, "relation_version_is_last": true, "title": ["Degradation of Mechanical Strength at Si/SiO2 Interface on SOI Wafers under Cyclic Loading"], "weko_shared_id": -1}
  1. B200 工学部/工学研究科
  2. B200a 雑誌掲載論文
  3. 学術雑誌

Degradation of Mechanical Strength at Si/SiO2 Interface on SOI Wafers under Cyclic Loading

http://hdl.handle.net/2237/13916
http://hdl.handle.net/2237/13916
c09d2a92-bd03-4113-8e1a-8915c19cab68
名前 / ファイル ライセンス アクション
09_MEMS_Ando.pdf 09_MEMS_Ando.pdf (816.3 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2010-08-03
タイトル
タイトル Degradation of Mechanical Strength at Si/SiO2 Interface on SOI Wafers under Cyclic Loading
言語 en
著者 Ando, T

× Ando, T

WEKO 38181

en Ando, T

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Takumi, T

× Takumi, T

WEKO 38182

en Takumi, T

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Sato, K

× Sato, K

WEKO 38183

en Sato, K

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アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
権利
言語 en
権利情報 ©2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
抄録
内容記述 Fatigue tests of silicon stepped cantilevers fabricated from silicon on insulator (SOI) wafers were conducted under the bending mode to evaluate the effect of cyclic loading on fractures occurring in silicon and Si/SiO2 interfaces. The specimen in the quasi-static mode fractured at the stress concentration site on the silicon specimens. However, during the fatigue tests the cantilever broke after 104 cycles with stress amplitude of nearly half of the bending strength at the fixed end comprising the Si/SiO2 interface. The results demonstrated that the cyclic stress durability in the Si/SiO2 interface is significantly lower than that of the silicon body.
言語 en
内容記述タイプ Abstract
出版者
言語 en
出版者 IEEE
言語
言語 eng
資源タイプ
資源タイプresource http://purl.org/coar/resource_type/c_6501
タイプ journal article
出版タイプ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
DOI
関連タイプ isVersionOf
識別子タイプ DOI
関連識別子 https://doi.org/10.1109/MEMSYS.2009.4805470
ISSN
収録物識別子タイプ PISSN
収録物識別子 1084-6999
書誌情報 en : IEEE 22nd International Conference on Micro Electro Mechanical Systems (MEMS 2009)

p. 665-668, 発行日 2009-01-25
フォーマット
application/pdf
著者版フラグ
値 publisher
URI
識別子 http://hdl.handle.net/2237/13916
識別子タイプ HDL
URI
識別子 http://dx.doi.org/10.1109/MEMSYS.2009.4805470
識別子タイプ DOI
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