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  1. B200 工学部/工学研究科
  2. B200a 雑誌掲載論文
  3. 学術雑誌

Properties of M-AFM probe affected by nanostructural metal coatings

http://hdl.handle.net/2237/13920
http://hdl.handle.net/2237/13920
b50e15aa-a7ff-4a72-963a-02b08adec939
名前 / ファイル ライセンス アクション
hosoi.pdf hosoi.pdf (481.8 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2010-08-03
タイトル
タイトル Properties of M-AFM probe affected by nanostructural metal coatings
言語 en
著者 Hosoi, A.

× Hosoi, A.

WEKO 38193

en Hosoi, A.

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Hamada, M.

× Hamada, M.

WEKO 38194

en Hamada, M.

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Fujimoto, A.

× Fujimoto, A.

WEKO 38195

en Fujimoto, A.

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Ju, Y.

× Ju, Y.

WEKO 38196

en Ju, Y.

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アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
権利
言語 en
権利情報 ©2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
抄録
内容記述タイプ Abstract
内容記述 In order to develop a new structure microwave probe, the fabrication of the atomic force microscope (AFM) probe on a GaAs wafer was studied and characteristics of the AFM probe with different nanostructural metal coating were evaluated in order to understand the performance of the probe for the topography of materials and the propagation of microwave signals. The fabricated probe had a tip of 8 mum high and curvature radius approximately 30 nm. The dimensions of the cantilever are 250 times 30 times 15 mum. A waveguide was introduced by the sputtering and the electron beam (EB) evaporation technique on the top and bottom surfaces of the GaAs AFM probe with Au or Al film. The open structure of the waveguide at the tip of the probe was introduced by using focused ion beam (FIB) fabrication. AFM topography of a grating sample was measured by using each fabricated probe. It was found that the fabricated probes coated with the Au or Al film have nanometer order resolution. Moreover, using the Au-coating probe formed by the EB evaporation technique, microwave emission was detected successfully at the tip of the probe by approaching an Au film sample.
言語 en
出版者
出版者 IEEE
言語 en
言語
言語 eng
資源タイプ
資源タイプresource http://purl.org/coar/resource_type/c_6501
タイプ journal article
出版タイプ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
ISBN
関連タイプ isPartOf
識別子タイプ ISBN
関連識別子 978-1-4244-3874-7
書誌情報 en : Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (MEMS/MOEMS '09)

p. 197-201, 発行日 2009-04-01
フォーマット
値 application/pdf
著者版フラグ
値 publisher
URI
識別子 http://hdl.handle.net/2237/13920
識別子タイプ HDL
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