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Properties of M-AFM probe affected by nanostructural metal coatings
http://hdl.handle.net/2237/13920
http://hdl.handle.net/2237/13920b50e15aa-a7ff-4a72-963a-02b08adec939
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
hosoi.pdf (481.8 kB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
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| 公開日 | 2010-08-03 | |||||
| タイトル | ||||||
| タイトル | Properties of M-AFM probe affected by nanostructural metal coatings | |||||
| 言語 | en | |||||
| 著者 |
Hosoi, A.
× Hosoi, A.× Hamada, M.× Fujimoto, A.× Ju, Y. |
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| アクセス権 | ||||||
| アクセス権 | open access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
| 権利 | ||||||
| 言語 | en | |||||
| 権利情報 | ©2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. | |||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | In order to develop a new structure microwave probe, the fabrication of the atomic force microscope (AFM) probe on a GaAs wafer was studied and characteristics of the AFM probe with different nanostructural metal coating were evaluated in order to understand the performance of the probe for the topography of materials and the propagation of microwave signals. The fabricated probe had a tip of 8 mum high and curvature radius approximately 30 nm. The dimensions of the cantilever are 250 times 30 times 15 mum. A waveguide was introduced by the sputtering and the electron beam (EB) evaporation technique on the top and bottom surfaces of the GaAs AFM probe with Au or Al film. The open structure of the waveguide at the tip of the probe was introduced by using focused ion beam (FIB) fabrication. AFM topography of a grating sample was measured by using each fabricated probe. It was found that the fabricated probes coated with the Au or Al film have nanometer order resolution. Moreover, using the Au-coating probe formed by the EB evaporation technique, microwave emission was detected successfully at the tip of the probe by approaching an Au film sample. | |||||
| 言語 | en | |||||
| 出版者 | ||||||
| 出版者 | IEEE | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプresource | http://purl.org/coar/resource_type/c_6501 | |||||
| タイプ | journal article | |||||
| 出版タイプ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
| ISBN | ||||||
| 関連タイプ | isPartOf | |||||
| 識別子タイプ | ISBN | |||||
| 関連識別子 | 978-1-4244-3874-7 | |||||
| 書誌情報 |
en : Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (MEMS/MOEMS '09) p. 197-201, 発行日 2009-04-01 |
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| フォーマット | ||||||
| 値 | application/pdf | |||||
| 著者版フラグ | ||||||
| 値 | publisher | |||||
| URI | ||||||
| 識別子 | http://hdl.handle.net/2237/13920 | |||||
| 識別子タイプ | HDL | |||||
