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Auger electron emission from a Si(111) surface during 11-keV Ar+ ion sputtering
http://hdl.handle.net/2237/20778
http://hdl.handle.net/2237/20778d9184950-f92b-4f95-bedb-d0d1d3132828
名前 / ファイル | ライセンス | アクション |
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ICACS25_paper_Kawai.pdf (535.0 kB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2014-11-14 | |||||
タイトル | ||||||
タイトル | Auger electron emission from a Si(111) surface during 11-keV Ar+ ion sputtering | |||||
言語 | en | |||||
著者 |
Kawai, K.
× Kawai, K.× Sakuma, Y.× Kato, M.× Soda, K. |
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アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
権利 | ||||||
言語 | en | |||||
権利情報 | This is the author's version of a work that was accepted for publication in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms, may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published in Journal of Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. v.315, 2013, p.283–286, DOI:10.1016/j.nimb.2013.05.077. | |||||
抄録 | ||||||
内容記述 | Ion sputtering experiments were carried out for a Si(1 1 1)-7 × 7 surface, irradiated with an 11-keV Ar+ beam. The energy spectra of secondary electrons were measured with a cylindrical mirror analyzer (CMA). The dependence of the Auger electron yield on the ion incidence angle, θ, measured from the surface normal, was studied by varying θ from 0° to 80°. The Auger electron yield increases with increasing incidence angle. This angular dependence is similar to that of the Si sputtering yield. Both angular dependences could be reasonably understood in terms of ion range, escape depths of the sputtered ion and the electron mean free path. | |||||
言語 | en | |||||
内容記述タイプ | Abstract | |||||
出版者 | ||||||
言語 | en | |||||
出版者 | Elsevier | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプresource | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
出版タイプ | ||||||
出版タイプ | AM | |||||
出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||
DOI | ||||||
関連タイプ | isVersionOf | |||||
識別子タイプ | DOI | |||||
関連識別子 | https://doi.org/10.1016/j.nimb.2013.05.077 | |||||
ISSN | ||||||
収録物識別子タイプ | PISSN | |||||
収録物識別子 | 0168-583X | |||||
書誌情報 |
en : Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 巻 315, p. 283-286, 発行日 2013-11 |
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著者版フラグ | ||||||
値 | author | |||||
URI | ||||||
識別子 | http://dx.doi.org/10.1016/j.nimb.2013.05.077 | |||||
識別子タイプ | DOI | |||||
URI | ||||||
識別子 | http://hdl.handle.net/2237/20778 | |||||
識別子タイプ | HDL |