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  1. F200 未来材料・システム研究所
  2. F200a 雑誌掲載論文
  3. 学術雑誌

Design of automatic detection algorithm for dislocation contrasts in birefringence images of SiC wafers

http://hdl.handle.net/2237/0002001187
http://hdl.handle.net/2237/0002001187
9cb5d998-25af-475c-a811-e461677b5817
名前 / ファイル ライセンス アクション
Kawata_et_al_JJAP_60_2021_SBBD06.pdf Kawata_et_al_JJAP_60_2021_SBBD06.pdf (1.2 MB)
Item type itemtype_ver1(1)
公開日 2021-07-05
タイトル
タイトル Design of automatic detection algorithm for dislocation contrasts in birefringence images of SiC wafers
言語 en
著者 Kawata, Akira

× Kawata, Akira

en Kawata, Akira

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Murayama, Kenta

× Murayama, Kenta

en Murayama, Kenta

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Sumitani, Shogo

× Sumitani, Shogo

en Sumitani, Shogo

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Harada, Shunta

× Harada, Shunta

en Harada, Shunta

Search repository
アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
権利
言語 en
権利情報 This is the Accepted Manuscript version of an article accepted for publication in [Japanese Journal of Applied Physics].IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at [10.35848/1347-4065/abde29]
内容記述
内容記述 Birefringence imaging is one of the powerful methods for non-destructive characterization of defects in the semiconductor crystals. However, due to the complicated and unclear contrasts of dislocations in the birefringence image, it was considered to be difficult to automatically detect the position of the dislocation contrasts by the conventional image processing. In the present study, we designed the automatic detection algorithm for the dislocation contrasts taking into account the characteristic feature of the dislocation contrasts, which were always pair of black and white contrasts. To detect the large change in the contrast level near the dislocation contrast, the automatic detection algorithm was constructed by using a variance filter. Finally, we succeeded in detecting the position of the dislocation contrasts with relatively high precision and sensitivity.
言語 en
内容記述タイプ Abstract
出版者
言語 en
出版者 IOP publishing
言語
言語 eng
資源タイプ
資源タイプresource http://purl.org/coar/resource_type/c_6501
タイプ journal article
出版タイプ
出版タイプ AM
出版タイプResource http://purl.org/coar/version/c_ab4af688f83e57aa
関連情報
関連タイプ isVersionOf
識別子タイプ DOI
関連識別子 https://doi.org/10.35848/1347-4065/abde29
収録物識別子
収録物識別子タイプ PISSN
収録物識別子 0021-4922
書誌情報 en : Japanese Journal of Applied Physics

巻 60, 号 SB, p. SBBD06, 発行日 2021-05
ファイル公開日
日付 2022-05-01
日付タイプ Available
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