| Item type |
itemtype_ver1(1) |
| 公開日 |
2021-07-05 |
| タイトル |
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|
タイトル |
Design of automatic detection algorithm for dislocation contrasts in birefringence images of SiC wafers |
|
言語 |
en |
| 著者 |
Kawata, Akira
Murayama, Kenta
Sumitani, Shogo
Harada, Shunta
|
| アクセス権 |
|
|
アクセス権 |
open access |
|
アクセス権URI |
http://purl.org/coar/access_right/c_abf2 |
| 権利 |
|
|
言語 |
en |
|
権利情報 |
This is the Accepted Manuscript version of an article accepted for publication in [Japanese Journal of Applied Physics].IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at [10.35848/1347-4065/abde29] |
| 内容記述 |
|
|
内容記述タイプ |
Abstract |
|
内容記述 |
Birefringence imaging is one of the powerful methods for non-destructive characterization of defects in the semiconductor crystals. However, due to the complicated and unclear contrasts of dislocations in the birefringence image, it was considered to be difficult to automatically detect the position of the dislocation contrasts by the conventional image processing. In the present study, we designed the automatic detection algorithm for the dislocation contrasts taking into account the characteristic feature of the dislocation contrasts, which were always pair of black and white contrasts. To detect the large change in the contrast level near the dislocation contrast, the automatic detection algorithm was constructed by using a variance filter. Finally, we succeeded in detecting the position of the dislocation contrasts with relatively high precision and sensitivity. |
|
言語 |
en |
| 出版者 |
|
|
出版者 |
IOP publishing |
|
言語 |
en |
| 言語 |
|
|
言語 |
eng |
| 資源タイプ |
|
|
資源タイプ識別子 |
http://purl.org/coar/resource_type/c_6501 |
|
資源タイプ |
journal article |
| 出版タイプ |
|
|
出版タイプ |
AM |
|
出版タイプResource |
http://purl.org/coar/version/c_ab4af688f83e57aa |
| 関連情報 |
|
|
関連タイプ |
isVersionOf |
|
|
識別子タイプ |
DOI |
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|
関連識別子 |
https://doi.org/10.35848/1347-4065/abde29 |
| 収録物識別子 |
|
|
収録物識別子タイプ |
PISSN |
|
収録物識別子 |
0021-4922 |
| 書誌情報 |
en : Japanese Journal of Applied Physics
巻 60,
号 SB,
p. SBBD06,
発行日 2021-05
|
| ファイル公開日 |
|
|
日付 |
2022-05-01 |
|
日付タイプ |
Available |
Kawata_et_al_JJAP_60_2021_SBBD06.pdf (1.2 MB)
