{"_buckets": {"deposit": "a0a65e26-3b11-4695-b0de-4bb42254af00"}, "_deposit": {"id": "21649", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "21649"}, "status": "published"}, "_oai": {"id": "oai:nagoya.repo.nii.ac.jp:00021649"}, "item_10_alternative_title_19": {"attribute_name": "\u305d\u306e\u4ed6\u306e\u8a00\u8a9e\u306e\u30bf\u30a4\u30c8\u30eb", "attribute_value_mlt": [{"subitem_alternative_title": "Improvement in Electrical Characteristics of NbN tunnel Junctions With Plasma-Nitrided AlNx Barriers"}]}, "item_10_biblio_info_6": {"attribute_name": "\u66f8\u8a8c\u60c5\u5831", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2011-10", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "230", "bibliographicPageEnd": "24", "bibliographicPageStart": "19", "bibliographicVolumeNumber": "111", "bibliographic_titles": [{"bibliographic_title": "\u96fb\u5b50\u60c5\u5831\u901a\u4fe1\u5b66\u4f1a\u6280\u8853\u7814\u7a76\u5831\u544a. SCE, \u8d85\u4f1d\u5c0e\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9"}]}]}, "item_10_description_4": {"attribute_name": "\u6284\u9332", "attribute_value_mlt": [{"subitem_description": "\u672c\u8a8c\u3067\u306f\u3001\u30d7\u30e9\u30ba\u30de\u7a92\u5316AlNx\u969c\u58c1\u5c64\u3092\u7279\u3064NbN\u30c8\u30f3\u30cd\u30eb\u63a5\u5408\u306b\u304a\u3051\u308b\u63a5\u5408\u4f5c\u88fd\u30d7\u30ed\u30bb\u30b9\u53ca\u3073\u96fb\u6c17\u7684\u7279\u6027\u6539\u5584\u306b\u3064\u3044\u3066\u8ff0\u3079\u308b\u3002\u3053\u306eNbN\u30c8\u30f3\u30cd\u30eb\u63a5\u5408\u3092\u9ad8\u5468\u6ce2\u96fb\u78c1\u6ce2\u691c\u51fa\u5668\u306b\u5fdc\u7528\u3059\u308b\u305f\u3081\u306b\u306f\u3001\u81e8\u754c\u96fb\u6d41\u5bc6\u5ea6J_c\u53ca\u3073\u30ae\u30e3\u30c3\u30d7\u96fb\u5727V_g\u306e\u5411\u4e0a\u304c\u5fc5\u8981\u3067\u3042\u308b\u3002\u305d\u3053\u3067\u672c\u7814\u7a76\u3067\u306f\u3001\u63a5\u5408\u7279\u6027\u6539\u5584\u306e\u305f\u3081\u3001NbN\u30c8\u30f3\u30cd\u30eb\u63a5\u5408\u306e\u4e0a\u90e8\u96fb\u6975\u5806\u7a4d\u6761\u4ef6\u53ca\u3073\u969c\u58c1\u5c64\u5f62\u6210\u6761\u4ef6\u306e\u691c\u8a0e\u3092\u884c\u3063\u305f\u3002\u305d\u306e\u7d50\u679c\u3001\u63a5\u5408\u4e0a\u90e8NbN\u5c64\u306e\u5806\u7a4d\u6761\u4ef6\u306e\u8abf\u6574\u53ca\u3073\u57fa\u677f\u6e29\u5ea6\u3092\u4e0a\u6607\u3055\u305b\u308b\u3053\u3068\u306b\u3088\u308a\u3001V_g\u304c0.6mV\u5411\u4e0a\u30575.0mV\u306e\u63a5\u5408\u304c\u5f97\u3089\u308c\u305f\u3002\u307e\u305f\u3001Al\u306e\u30d7\u30e9\u30ba\u30de\u7a92\u5316\u6642\u306eRF\u96fb\u529b\u5bc6\u5ea6\u3092\u5909\u5316\u3055\u305b\u308b\u3053\u3068\u3088\u308a\u3001J_c\u304c\u6700\u5927\u306710.2kA/cm^2\u306e\u63a5\u5408\u304c\u5f97\u3089\u308c\u305f\u3002 We present the fabrication process of NbN tunnel junctions with plasma-nitrided AlNx barriers and the electrical characteristics of the junctions. The application of the junctions to high frequency electromagnetic wave detectors requires increase in the critical current density J_c and the gap voltage V_g of the junctions. In this work, we examined the conditions of depositing a counter NbN layer and forming an AlNx barrier for the purpose of improving the characteristics of the junctions. As a result, the V_g was increased by 0.4 mV to 5.0 mV by adjusting the deposition conditions and by raising the substrate temperature during deposition of the counter NbN layer. On the other hand, the J_c up to 10.2 kA/cm^2 was obtained by changing the RF power density for nitriding an Al layer.", "subitem_description_type": "Abstract"}]}, "item_10_description_5": {"attribute_name": "\u5185\u5bb9\u8a18\u8ff0", "attribute_value_mlt": [{"subitem_description": "(\u8d85\u4f1d\u5c0e\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u57fa\u76e4\u6280\u8853\u53ca\u3073\u4e00\u822c)", "subitem_description_type": "Other"}]}, "item_10_identifier_60": {"attribute_name": "URI", "attribute_value_mlt": [{"subitem_identifier_type": "URI", "subitem_identifier_uri": "http://ci.nii.ac.jp/naid/110008899831/"}, {"subitem_identifier_type": "HDL", "subitem_identifier_uri": "http://hdl.handle.net/2237/23797"}]}, "item_10_publisher_32": {"attribute_name": "\u51fa\u7248\u8005", "attribute_value_mlt": [{"subitem_publisher": "\u4e00\u822c\u793e\u56e3\u6cd5\u4eba\u96fb\u5b50\u60c5\u5831\u901a\u4fe1\u5b66\u4f1a"}]}, "item_10_relation_40": {"attribute_name": "\u30b7\u30ea\u30fc\u30ba", "attribute_value_mlt": [{"subitem_relation_name": [{"subitem_relation_name_text": "IEICE Technical Report;SCE2011-15"}]}]}, "item_10_rights_12": {"attribute_name": "\u6a29\u5229", "attribute_value_mlt": [{"subitem_rights": "(c)\u4e00\u822c\u793e\u56e3\u6cd5\u4eba\u96fb\u5b50\u60c5\u5831\u901a\u4fe1\u5b66\u4f1a \u672c\u6587\u30c7\u30fc\u30bf\u306f\u5b66\u5354\u4f1a\u306e\u8a31\u8afe\u306b\u57fa\u3065\u304dCiNii\u304b\u3089\u8907\u88fd\u3057\u305f\u3082\u306e\u3067\u3042\u308b"}]}, "item_10_select_15": {"attribute_name": "\u8457\u8005\u7248\u30d5\u30e9\u30b0", "attribute_value_mlt": [{"subitem_select_item": "publisher"}]}, "item_10_source_id_7": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "0913-5685", "subitem_source_identifier_type": "ISSN"}]}, "item_creator": {"attribute_name": "\u8457\u8005", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "\u8229\u4e95, \u8fb0\u5247"}], "nameIdentifiers": [{"nameIdentifier": "63817", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "\u5185\u85e4, \u76f4\u751f\u4eba"}], "nameIdentifiers": [{"nameIdentifier": "63818", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "\u8d64\u6c60, \u5b8f\u4e4b"}], "nameIdentifiers": [{"nameIdentifier": "63819", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "\u85e4\u5dfb, \u6717"}], "nameIdentifiers": [{"nameIdentifier": "63820", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "FUNAI, Tatsunori"}], "nameIdentifiers": [{"nameIdentifier": "63821", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "NAITO, Naoto"}], "nameIdentifiers": [{"nameIdentifier": "63822", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "AKAIKE, Hiroyuki"}], "nameIdentifiers": [{"nameIdentifier": "63823", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "FUJIMAKI, Akira"}], "nameIdentifiers": [{"nameIdentifier": "63824", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "\u30d5\u30a1\u30a4\u30eb\u60c5\u5831", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2018-02-21"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "110008899831.pdf", "filesize": [{"value": "1.4 MB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 1400000.0, "url": {"label": "110008899831.pdf", "url": "https://nagoya.repo.nii.ac.jp/record/21649/files/110008899831.pdf"}, "version_id": "afdf0bcf-d29e-459c-9b0a-87fc3da74fc3"}]}, "item_keyword": {"attribute_name": "\u30ad\u30fc\u30ef\u30fc\u30c9", "attribute_value_mlt": [{"subitem_subject": "\u30d7\u30e9\u30ba\u30de\u7a92\u5316", "subitem_subject_scheme": "Other"}, {"subitem_subject": "AlNx", "subitem_subject_scheme": "Other"}, {"subitem_subject": "NbN", "subitem_subject_scheme": "Other"}, {"subitem_subject": "Plasma\u2212Nitridation", "subitem_subject_scheme": "Other"}]}, "item_language": {"attribute_name": "\u8a00\u8a9e", "attribute_value_mlt": [{"subitem_language": "jpn"}]}, "item_resource_type": {"attribute_name": "\u8cc7\u6e90\u30bf\u30a4\u30d7", "attribute_value_mlt": [{"resourcetype": "journal article", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "\u30d7\u30e9\u30ba\u30de\u7a92\u5316AlNx\u969c\u58c1\u5c64\u3092\u7279\u3064NbN\u30c8\u30f3\u30cd\u30eb\u63a5\u5408\u306e\u96fb\u6c17\u7684\u7279\u6027\u6539\u5584", "item_titles": {"attribute_name": "\u30bf\u30a4\u30c8\u30eb", "attribute_value_mlt": [{"subitem_title": "\u30d7\u30e9\u30ba\u30de\u7a92\u5316AlNx\u969c\u58c1\u5c64\u3092\u7279\u3064NbN\u30c8\u30f3\u30cd\u30eb\u63a5\u5408\u306e\u96fb\u6c17\u7684\u7279\u6027\u6539\u5584"}]}, "item_type_id": "10", "owner": "1", "path": ["320/321/322"], "permalink_uri": "http://hdl.handle.net/2237/23797", "pubdate": {"attribute_name": "\u516c\u958b\u65e5", "attribute_name_i18n": "\u516c\u958b\u65e5", "attribute_value": "2016-03-09"}, "publish_date": "2016-03-09", "publish_status": "0", "recid": "21649", "relation": {}, "relation_version_is_last": true, "title": ["\u30d7\u30e9\u30ba\u30de\u7a92\u5316AlNx\u969c\u58c1\u5c64\u3092\u7279\u3064NbN\u30c8\u30f3\u30cd\u30eb\u63a5\u5408\u306e\u96fb\u6c17\u7684\u7279\u6027\u6539\u5584"], "weko_shared_id": null}