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アモルファス合金厚膜構造体の製作方法とMEMSへの応用
http://hdl.handle.net/2237/24338
http://hdl.handle.net/2237/24338a34059b0-24cd-46fe-abec-64327cf7cea1
名前 / ファイル | ライセンス | アクション |
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k11477_summary.pdf (311.2 kB)
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k11477_abstract.pdf (823.3 kB)
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k11477_review.pdf (464.3 kB)
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Item type | 学位論文 / Thesis or Dissertation(1) | |||||
---|---|---|---|---|---|---|
公開日 | 2016-06-08 | |||||
タイトル | ||||||
タイトル | アモルファス合金厚膜構造体の製作方法とMEMSへの応用 | |||||
言語 | ja | |||||
その他のタイトル | ||||||
その他のタイトル | Fabrication method of amorphous alloy thick film structure and its application to MEMS | |||||
言語 | en | |||||
著者 |
渡辺, 茂高
× 渡辺, 茂高 |
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アクセス権 | ||||||
アクセス権 | metadata only access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_db06 | |||||
タイプ | doctoral thesis | |||||
書誌情報 |
発行日 2016-03-25 |
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学位名 | ||||||
言語 | ja | |||||
学位名 | 博士(工学) | |||||
学位授与機関 | ||||||
学位授与機関識別子Scheme | kakenhi | |||||
学位授与機関識別子 | 13901 | |||||
言語 | ja | |||||
学位授与機関名 | 名古屋大学 | |||||
言語 | en | |||||
学位授与機関名 | Nagoya University | |||||
学位授与年度 | ||||||
学位授与年度 | 2015 | |||||
学位授与年月日 | ||||||
学位授与年月日 | 2016-03-25 | |||||
学位授与番号 | ||||||
学位授与番号 | 甲第11477号 | |||||
著者版フラグ | ||||||
値 | none | |||||
URI | ||||||
識別子 | http://hdl.handle.net/2237/24338 | |||||
識別子タイプ | HDL |