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Direct fabrication of Cu/Cu2O composite micro-temperature sensor using femtosecond laser reduction patterning
http://hdl.handle.net/2237/25275
http://hdl.handle.net/2237/25275f96a11f7-c23d-4342-b5be-d750603633e4
名前 / ファイル | ライセンス | アクション |
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MN15054.pdf ファイル公開:2017/06/01 (564.6 kB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2016-12-20 | |||||
タイトル | ||||||
タイトル | Direct fabrication of Cu/Cu2O composite micro-temperature sensor using femtosecond laser reduction patterning | |||||
言語 | en | |||||
著者 |
Mizoshiri, Mizue
× Mizoshiri, Mizue× Ito, Yasuaki× Arakane, Shun× Sakurai, Junpei× Hata, Seiichi |
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アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
権利 | ||||||
言語 | en | |||||
権利情報 | © 2016 The Japan Society of Applied Physics | |||||
抄録 | ||||||
内容記述 | Micro-temperature sensors, which composed of a Cu2O-rich sensing part and two Cu-rich electrodes, were directly fabricated by femtosecond laser reduction patterning of CuO nanoparticles. Patterning of the microstructures was performed by laser scanning with pitches of 5, 10, and 15 µm. Cu2O-rich micropatterns were formed at the laser scan speed of 1 mm/s, the pitch of 5 µm, and the pulse energy of 0.54 nJ. Cu-rich micropatterns that had high generation selectivity of Cu against Cu2O were fabricated at the laser scan speed of 15 mm/s, the pitch of 5 µm, and the pulse energy of 0.45 nJ. Electrical resistivities of the Cu2O- and Cu-rich micropatterns were approximately 10 Ω m and 9 µΩ m, respectively. The temperature coefficient of the resistance of the micro-temperature sensor fabricated under these laser irradiation conditions was −5.5 × 10−3/°C. This resistance property with a negative value was consistent with that of semiconductor Cu2O. | |||||
言語 | en | |||||
内容記述タイプ | Abstract | |||||
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言語 | en | |||||
出版者 | IOP publishing | |||||
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言語 | eng | |||||
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資源タイプresource | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
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出版タイプ | AM | |||||
出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||
DOI | ||||||
関連タイプ | isVersionOf | |||||
識別子タイプ | DOI | |||||
関連識別子 | https://doi.org/10.7567/JJAP.55.06GP05 | |||||
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収録物識別子タイプ | PISSN | |||||
収録物識別子 | 0021-4922 | |||||
書誌情報 |
en : Japanese Journal of Applied Physics 巻 55, 号 6S1, p. 06GP05-06GP05, 発行日 2016-06 |
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値 | author | |||||
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識別子 | http://dx.doi.org/10.7567/JJAP.55.06GP05 | |||||
識別子タイプ | DOI | |||||
URI | ||||||
識別子 | http://hdl.handle.net/2237/25275 | |||||
識別子タイプ | HDL |