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  1. B200 工学部/工学研究科
  2. B200a 雑誌掲載論文
  3. 学術雑誌

Direct writing of three-dimensional Cu-based thermal flow sensors using femtosecond laser-induced reduction of CuO nanoparticles

http://hdl.handle.net/2237/26760
c4aaae6c-fdc0-4330-8609-783fe20a6f0b
名前 / ファイル ライセンス アクション
FinalFile_JMM_Shun_Arakane_revise_forSubmission_NUOA.pdf FinalFile_JMM_Shun_Arakane_revise_forSubmission_NUOA.pdf ファイル公開:2018/04/05 (1.4 MB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2017-07-04
タイトル
タイトル Direct writing of three-dimensional Cu-based thermal flow sensors using femtosecond laser-induced reduction of CuO nanoparticles
著者 Arakane, S

× Arakane, S

WEKO 72638

Arakane, S

Search repository
Mizoshiri, M

× Mizoshiri, M

WEKO 72639

Mizoshiri, M

Search repository
Sakurai, J

× Sakurai, J

WEKO 72640

Sakurai, J

Search repository
Hata, S

× Hata, S

WEKO 72641

Hata, S

Search repository
権利
権利情報 “This is an author-created, un-copyedited version of an article accepted for publication/published in [Journal of Micromechanics and Microengineering]. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at [http://doi.org/10.1088/1361-6439/aa6820]”
抄録
内容記述 We have demonstrated the fabrication of two types of thermal flow sensors with Cu-rich and Cu2O-rich microheaters using femtosecond laser-induced reduction of CuO nanoparticles. The microheaters in the shape of microbridge structures were formed to thermally isolate from the substrates by four layer-by-layer laminations of two-dimensional micropatterns. First, we evaluated the patterning properties such as dispensing coating conditions and degree of reduction for the selective fabrication of three-dimensional Cu-rich and Cu2O-rich microstructures. Then, a hot-film flow sensor with a Cu-rich microheater and a calorimetric flow sensor with a Cu2O-rich microheater were fabricated using their respective appropriate laser irradiation conditions. The hot-film sensor with the Cu-rich microbridge single heater enabled us to measure the flow rate in a wide range of 0–450 cc min−1. Although a large temperature dependence of the Cu2O-rich microbridge heaters caused a large error for the hot-film flow sensors with single heaters, they showed higher heat-resistance and generated heat with a lower drive power. The temperature coefficient of resistance of the Cu2O-rich microstructures had a semiconductor-like large absolute value and was less than  −4.6  ×  10−8 °C−1. The higher temperature sensitivity of the Cu2O-rich microstructures was useful for thermal detection. Based on these advantages, a calorimetric flow sensor composed of the Cu2O-rich microbridge single heater and two Cu2O-rich thermal detectors was proposed and fabricated. The calorimetric flow sensor was driven by a circuit for measuring the temperature difference. The Cu2O-rich flow sensor could detect bi-directional flow with a small output error.
内容記述タイプ Abstract
出版者
出版者 IOP publishing
言語
言語 eng
資源タイプ
資源タイプresource http://purl.org/coar/resource_type/c_6501
タイプ journal article
ISSN
収録物識別子タイプ ISSN
収録物識別子 0960-1317
書誌情報 Journal of Micromechanics and Microengineering

巻 27, 号 5, p. 055013-055013, 発行日 2017-04-05
著者版フラグ
値 author
URI
識別子 https://doi.org/10.1088/1361-6439/aa6820
識別子タイプ DOI
URI
識別子 http://hdl.handle.net/2237/26760
識別子タイプ HDL
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