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  1. B200 工学部/工学研究科
  2. B200a 雑誌掲載論文
  3. 学術雑誌

Electrical contact properties between carbon nanotube ends and a conductive atomic force microscope tip

http://hdl.handle.net/2237/00028625
http://hdl.handle.net/2237/00028625
b4722454-b710-4eed-8cd2-30e1c4d11291
名前 / ファイル ライセンス アクション
1_5027849.pdf 1_5027849 (2.0 MB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2018-10-16
タイトル
タイトル Electrical contact properties between carbon nanotube ends and a conductive atomic force microscope tip
言語 en
著者 Inaba, Masafumi

× Inaba, Masafumi

WEKO 87049

en Inaba, Masafumi

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Ohara, Kazuyoshi

× Ohara, Kazuyoshi

WEKO 87050

en Ohara, Kazuyoshi

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Shibuya, Megumi

× Shibuya, Megumi

WEKO 87051

en Shibuya, Megumi

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Ochiai, Takumi

× Ochiai, Takumi

WEKO 87052

en Ochiai, Takumi

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Yokoyama, Daisuke

× Yokoyama, Daisuke

WEKO 87053

en Yokoyama, Daisuke

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Norimatsu, Wataru

× Norimatsu, Wataru

WEKO 87054

en Norimatsu, Wataru

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Kusunoki, Michiko

× Kusunoki, Michiko

WEKO 87055

en Kusunoki, Michiko

Search repository
Kawarada, Hiroshi

× Kawarada, Hiroshi

WEKO 87056

en Kawarada, Hiroshi

Search repository
アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
権利
言語 en
権利情報 Copyright 2018 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing.The following article appeared in (Journal of Applied Physics. v.123, 2018, p.244502) and may be found at (http://dx.doi.org/10.1063/1.5027849).
抄録
内容記述 Understanding the electrical contact properties of carbon nanotube (CNT) ends is important to use the high conductance of CNTs in the CNT on-axis direction in applications such as through-silicon via structures. In this study, we experimentally evaluated the contact resistivity between single-/multi-walled CNT ends and a metal nanoprobe using conductive atomic force microscopy (C-AFM). To validate the measured end contact resistivity, we compared our experimentally determined value with that obtained from numerical calculations and reported values for side contact resistivity. The contact resistivity normalized by the length of the CNT ends was 0.6–2.4 × 10^6 Ω nm for single-walled CNTs. This range is 1–2 orders of magnitude higher than that determined theoretically. The contact resistivity of a single-walled CNT end with metal normalized by the contact area was 2–3 orders of magnitude lower than that reported for the resistivity of a CNT sidewall/metal contact. For multi-walled CNTs, the measured contact resistivity was one order of magnitude higher than that of a CNT forest grown by remote plasma-enhanced chemical vapor deposition, whereas the contact resistivity of a top metal electrode was similar to that obtained for a single-walled CNT forest.
言語 en
内容記述タイプ Abstract
内容記述
内容記述 ファイル公開:2019/06/28
言語 ja
内容記述タイプ Other
出版者
言語 en
出版者 AIP Publishing
言語
言語 eng
資源タイプ
資源タイプresource http://purl.org/coar/resource_type/c_6501
タイプ journal article
出版タイプ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
DOI
関連タイプ isVersionOf
識別子タイプ DOI
関連識別子 https://doi.org/10.1063/1.5027849
ISSN(print)
収録物識別子タイプ PISSN
収録物識別子 0021-8979
ISSN(Online)
収録物識別子タイプ EISSN
収録物識別子 1089-7550
書誌情報 en : Journal of Applied Physics

巻 123, 号 24, p. 244502, 発行日 2018-06-28
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