WEKO3
アイテム
Electrical contact properties between carbon nanotube ends and a conductive atomic force microscope tip
http://hdl.handle.net/2237/00028625
http://hdl.handle.net/2237/00028625b4722454-b710-4eed-8cd2-30e1c4d11291
名前 / ファイル | ライセンス | アクション |
---|---|---|
1_5027849 (2.0 MB)
|
|
Item type | 学術雑誌論文 / Journal Article(1) | |||||
---|---|---|---|---|---|---|
公開日 | 2018-10-16 | |||||
タイトル | ||||||
タイトル | Electrical contact properties between carbon nanotube ends and a conductive atomic force microscope tip | |||||
言語 | en | |||||
著者 |
Inaba, Masafumi
× Inaba, Masafumi× Ohara, Kazuyoshi× Shibuya, Megumi× Ochiai, Takumi× Yokoyama, Daisuke× Norimatsu, Wataru× Kusunoki, Michiko× Kawarada, Hiroshi |
|||||
アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
権利 | ||||||
言語 | en | |||||
権利情報 | Copyright 2018 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing.The following article appeared in (Journal of Applied Physics. v.123, 2018, p.244502) and may be found at (http://dx.doi.org/10.1063/1.5027849). | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Understanding the electrical contact properties of carbon nanotube (CNT) ends is important to use the high conductance of CNTs in the CNT on-axis direction in applications such as through-silicon via structures. In this study, we experimentally evaluated the contact resistivity between single-/multi-walled CNT ends and a metal nanoprobe using conductive atomic force microscopy (C-AFM). To validate the measured end contact resistivity, we compared our experimentally determined value with that obtained from numerical calculations and reported values for side contact resistivity. The contact resistivity normalized by the length of the CNT ends was 0.6–2.4 × 10^6 Ω nm for single-walled CNTs. This range is 1–2 orders of magnitude higher than that determined theoretically. The contact resistivity of a single-walled CNT end with metal normalized by the contact area was 2–3 orders of magnitude lower than that reported for the resistivity of a CNT sidewall/metal contact. For multi-walled CNTs, the measured contact resistivity was one order of magnitude higher than that of a CNT forest grown by remote plasma-enhanced chemical vapor deposition, whereas the contact resistivity of a top metal electrode was similar to that obtained for a single-walled CNT forest. | |||||
言語 | en | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | ファイル公開:2019/06/28 | |||||
言語 | ja | |||||
出版者 | ||||||
出版者 | AIP Publishing | |||||
言語 | en | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
出版タイプ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
DOI | ||||||
関連タイプ | isVersionOf | |||||
識別子タイプ | DOI | |||||
関連識別子 | https://doi.org/10.1063/1.5027849 | |||||
ISSN(print) | ||||||
収録物識別子タイプ | PISSN | |||||
収録物識別子 | 0021-8979 | |||||
ISSN(Online) | ||||||
収録物識別子タイプ | EISSN | |||||
収録物識別子 | 1089-7550 | |||||
書誌情報 |
en : Journal of Applied Physics 巻 123, 号 24, p. 244502, 発行日 2018-06-28 |
|||||
著者版フラグ | ||||||
値 | publisher |