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Effect of oxygen on degradation of defects on ta-C coatings deposited by filtered arc deposition
http://hdl.handle.net/2237/00032393
http://hdl.handle.net/2237/00032393ddb4c72a-ff7b-4847-b988-281976748ca3
名前 / ファイル | ライセンス | アクション |
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2020-06-17 | |||||
タイトル | ||||||
タイトル | Effect of oxygen on degradation of defects on ta-C coatings deposited by filtered arc deposition | |||||
言語 | en | |||||
著者 |
Murashima, Motoyuki
× Murashima, Motoyuki× Deng, Xingrui× Izuoka, Hiroto× Umehara, Noritsugu× Kousaka, Hiroyuki |
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アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
権利 | ||||||
言語 | en | |||||
権利情報 | © 2019. This manuscript version is made available under the CC-BY-NC-ND 4.0 license http://creativecommons.org/licenses/by-nc-nd/4.0/ | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | ta-C coating | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Oxidation mechanism | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Surface defect | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Droplet | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | High temperature | |||||
抄録 | ||||||
内容記述 | Among diamond-like carbon (DLC) coatings, tetrahedral amorphous carbon (ta-C) coatings show particularly high thermal stability and oxidation resistance due to their high sp3 content and hydrogen-free structure. On the other hand, it is well known that high-temperature annealing leads to degradation of the ta-C structure, resulting in a release of stress, decrease of hardness, increase in surface roughness, and transformation of the coating nature. Although optical observation is a powerful candidate for imaging the surface conditions of ta-C coatings, strong light emission due to high temperature prevents the acquisition of clear images. In this paper, we establish a novel in situ observation method using environment scanning electron microscopy (ESEM), which allows us to view ta-C surface defects and droplets at 650 °C. A heater embedded in the ESEM increased the temperature on ta-C coatings to 650 °C at gas pressure of 120 Pa. Using a variety of gas conditions including ambient air, dry nitrogen, or dry oxygen, we clarified the effect of the gases on the degradation of the defects. In a dry oxygen atmosphere, defects grew dramatically with annealing time, whereas nitrogen caused no significant transformation to ta-C surfaces. Raman spectroscopy analysis revealed significant structural change in one type of defect, while no noticeable Raman shift was detected in the other type. A focused ion beam created a cross-section of an annealed defect on the ta-C coating. Subsequently, energy dispersive X-ray spectroscopy (EDS) revealed the characteristics of defect growth; one type of defect was associated with a droplet on the interlayer, and the other with graphitization due to oxidization of ta-C on the droplets. | |||||
言語 | en | |||||
内容記述タイプ | Abstract | |||||
内容記述 | ||||||
内容記述 | ファイル公開:2021-03-25 | |||||
言語 | ja | |||||
内容記述タイプ | Other | |||||
出版者 | ||||||
言語 | en | |||||
出版者 | Elsevier | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプresource | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
出版タイプ | ||||||
出版タイプ | AM | |||||
出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||
DOI | ||||||
関連タイプ | isVersionOf | |||||
識別子タイプ | DOI | |||||
関連識別子 | https://doi.org/10.1016/j.surfcoat.2019.01.115 | |||||
ISSN(print) | ||||||
収録物識別子タイプ | PISSN | |||||
収録物識別子 | 0257-8972 | |||||
書誌情報 |
en : Surface and Coatings Technology 巻 362, p. 200-207, 発行日 2019-03-25 |
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著者版フラグ | ||||||
値 | author |