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  1. B200 工学部/工学研究科
  2. B200b 紀要
  3. Memoirs of the School of Engineering, Nagoya University
  4. 50

MICRO FABRICATION BY UV LASER PHOTOPOLYMERIZATION

https://doi.org/10.18999/memsenu.50.33
https://doi.org/10.18999/memsenu.50.33
e5d630d6-2754-4415-bcb3-8259e47b8209
名前 / ファイル ライセンス アクション
50_2.pdf 50_2.pdf (7.0 MB)
Item type 紀要論文 / Departmental Bulletin Paper(1)
公開日 2020-10-05
タイトル
タイトル MICRO FABRICATION BY UV LASER PHOTOPOLYMERIZATION
言語 en
著者 YAMAGUCHI, Katsumi

× YAMAGUCHI, Katsumi

WEKO 101576

en YAMAGUCHI, Katsumi

Search repository
NAKAMOTO, Takeshi

× NAKAMOTO, Takeshi

WEKO 101577

en NAKAMOTO, Takeshi

Search repository
アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
キーワード
主題Scheme Other
主題 Micro fabrication
キーワード
主題Scheme Other
主題 Photopolymer
キーワード
主題Scheme Other
主題 UV laser
キーワード
主題Scheme Other
主題 High aspect ratio micro part
キーワード
主題Scheme Other
主題 Three-dimensional micro part
キーワード
主題Scheme Other
主題 Accuracy
キーワード
主題Scheme Other
主題 Mask-based method
キーワード
主題Scheme Other
主題 Beam writing method
キーワード
主題Scheme Other
主題 Diffraction of light
キーワード
主題Scheme Other
主題 Absorption of light
キーワード
主題Scheme Other
主題 Solidification
抄録
内容記述 This research deals with the development of simple and practical methods for manufacturing high aspect ratio (height/width) micro parts and three-dimensional micro parts. The first method is mask-based method in which an image is transferred to a liquid photopolymer by irradiating a UV laser through a patterned mask. The irradiated portion of the photopolymer is then solidified and it becomes a high aspect ratio polymer structure or mold. In the second and third methods, high aspect ratio polymer structures are produced using a shaped UV laser beam writing and a focused UV laser beam writing, respectively. The desired product shape is obtained by writing along the contour of the product on the surface of a liquid photopolymer. The written pattern then becomes solid so as to produce a solidified polymer structure or mold. The fourth, three-dimensional micro part is produced by a focused UV laser beam writing method. The accuracy of the solidified polymer when using these methods is examined. The examination is done theoretically and experimentally. The optimum conditions to produce high aspect ratio micro parts and three-dimensional micro parts are also verified. Various shapes of micro polymer structures are produced using these methods.
言語 en
内容記述タイプ Abstract
内容記述
内容記述 The present work was supported by a Grant-in-Aid for Scientific Research (B) No. 10555038from the Ministry of Education, Science, Sports and Culture, Japan.
言語 en
内容記述タイプ Other
出版者
言語 en
出版者 School of Engineering, Nagoya University
言語
言語 eng
資源タイプ
資源 http://purl.org/coar/resource_type/c_6501
タイプ departmental bulletin paper
出版タイプ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
ID登録
ID登録 10.18999/memsenu.50.33
ID登録タイプ JaLC
ISSN(print)
収録物識別子タイプ PISSN
収録物識別子 0919-0805
書誌情報 en : Memoirs of the School of Engineering, Nagoya University

巻 50, p. 33-82, 発行日 1999-03-27
著者版フラグ
値 publisher
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