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  1. B200 工学部/工学研究科
  2. B200a 雑誌掲載論文
  3. 学術雑誌

Sub-5 nm gold dot formation using retarding-field single ion deposition

http://hdl.handle.net/2237/6992
http://hdl.handle.net/2237/6992
3bcea8df-f792-4657-ba06-e59563e59d75
名前 / ファイル ライセンス アクション
ApplPhysLett_73_3223.pdf ApplPhysLett_73_3223.pdf (181.5 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2006-10-20
タイトル
タイトル Sub-5 nm gold dot formation using retarding-field single ion deposition
言語 en
著者 Hori, M.

× Hori, M.

WEKO 13742

en Hori, M.

Search repository
Woodham, RG.

× Woodham, RG.

WEKO 13743

en Woodham, RG.

Search repository
Ahmed, H.

× Ahmed, H.

WEKO 13744

en Ahmed, H.

Search repository
アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
権利
言語 en
権利情報 Copyright (1998) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.
抄録
内容記述 Gold dots of 2.5 nm mean diameter and 0.8 nm standard deviation have been fabricated successfully on chromium oxide (CrO_x) thin films. The CrO_x thin films were deposited on Si substrates by sputtering and gold dots were subsequently deposited by a retarding-field single ion deposition (RSID) technique. The formation of gold dots has been investigated systematically with landing energies from 100 to 900 eV and doses from 10 to 40 C/m^2. The dot diameter and density could be controlled by varying the landing energy and dose of gold ions arriving on the surface. The formation of single electron devices, quantum dots, nanopillars, and other nanoscale device structures is proposed using the RSID technique.
言語 en
内容記述タイプ Abstract
出版者
言語 en
出版者 American Institute of Physics
言語
言語 eng
資源タイプ
資源タイプresource http://purl.org/coar/resource_type/c_6501
タイプ journal article
出版タイプ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
DOI
関連タイプ isVersionOf
識別子タイプ DOI
関連識別子 https://doi.org/10.1063/1.122725
ISSN
収録物識別子タイプ PISSN
収録物識別子 0003-6951
書誌情報 en : Applied Physics Letters

巻 73, 号 22, p. 3223-3225, 発行日 1998-11-30
フォーマット
application/pdf
著者版フラグ
値 publisher
URI
識別子 http://hdl.handle.net/2237/6992
識別子タイプ HDL
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