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Kinetics of hydrogen atoms in high-density CF_4 /H_2 plasmas studied by (2+1)-photon laser-induced fluorescence spectroscopy
http://hdl.handle.net/2237/6999
http://hdl.handle.net/2237/699935e27906-b115-4231-b4e1-4431ee0f44a5
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
ApplPhysLett_83_1935.pdf (99.5 kB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
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| 公開日 | 2006-10-20 | |||||
| タイトル | ||||||
| タイトル | Kinetics of hydrogen atoms in high-density CF_4 /H_2 plasmas studied by (2+1)-photon laser-induced fluorescence spectroscopy | |||||
| 言語 | en | |||||
| 著者 |
Sasaki, K.
× Sasaki, K.× Okamoto, M. |
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| アクセス権 | ||||||
| アクセス権 | open access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
| 権利 | ||||||
| 言語 | en | |||||
| 権利情報 | Copyright (2003) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. | |||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | We measured the distribution of absolute H atom density in high-density, low-pressure CF_4 plasmas with the addition of H2 by (2+1)-photon laser-induced fluorescence spectroscopy. The H atom density had hollow-shaped distributions, i.e., the H atom density adjacent to the chamber wall was higher than that in the plasma column. In addition, when the chamber wall was covered with hydrogenated fluorocarbon film, we detected H atoms without the addition of feedstock H_2 . These experimental results indicate surface production of H atoms from hydrogenated fluorocarbon film. The surface production rate was sensitive to the property of fluorocarbon film. When the property of fluorocarbon film was unified, the surface production rate increased linearly with the pressure of feedstock H_2 , suggesting a recycling process of H atoms between gas phase and fluorocarbon film as a mechanism of plasma–surface interaction in CF_4 /H_2 plasmas. | |||||
| 言語 | en | |||||
| 出版者 | ||||||
| 出版者 | American Institute of Physics | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプresource | http://purl.org/coar/resource_type/c_6501 | |||||
| タイプ | journal article | |||||
| 出版タイプ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
| DOI | ||||||
| 関連タイプ | isVersionOf | |||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | https://doi.org/10.1063/1.1609244 | |||||
| ISSN | ||||||
| 収録物識別子タイプ | PISSN | |||||
| 収録物識別子 | 0003-6951 | |||||
| 書誌情報 |
en : Applied Physics Letters 巻 83, 号 10, p. 1935-1937, 発行日 2003-09-08 |
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| フォーマット | ||||||
| 値 | application/pdf | |||||
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| 値 | publisher | |||||
| URI | ||||||
| 識別子 | http://hdl.handle.net/2237/6999 | |||||
| 識別子タイプ | HDL | |||||
