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  1. B200 工学部/工学研究科
  2. B200a 雑誌掲載論文
  3. 学術雑誌

Growth of GaN free from cracks on a (111)Si substrate by selective metalorganic vapor-phase epitaxy

http://hdl.handle.net/2237/7003
http://hdl.handle.net/2237/7003
b177835b-6978-4287-a33d-51e6d347f710
名前 / ファイル ライセンス アクション
ApplPhysLett_80_222.pdf ApplPhysLett_80_222.pdf (93.0 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2006-10-23
タイトル
タイトル Growth of GaN free from cracks on a (111)Si substrate by selective metalorganic vapor-phase epitaxy
言語 en
著者 Honda, Y.

× Honda, Y.

WEKO 13795

en Honda, Y.

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Kuroiwa, Y.

× Kuroiwa, Y.

WEKO 13796

en Kuroiwa, Y.

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Yamaguchi, M.

× Yamaguchi, M.

WEKO 13797

en Yamaguchi, M.

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Sawaki, N.

× Sawaki, N.

WEKO 13798

en Sawaki, N.

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アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
権利
言語 en
権利情報 Copyright (2002) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.
抄録
内容記述 The selective metalorganic vapor-phase epitaxy of wurtzite GaN was performed on a (111) silicon substrate using SiO_2 grid mask pattern. Within window regions of (0.2–0.5) mm*(0.2–0.5) mm, GaN films free from cracks were achieved. The full width at half maximum of the (0004) X-ray rocking curve was as narrow as 388 arcs and that of the band edge emission was 18.6 meV at 77 K. The band edge emission peak energy was redshifted. The redshift is reduced slightly in a sample grown on small windows. This suggests that the biaxial strain due to the thermal expansion coefficient mismatch is partly relaxed on small windows.
言語 en
内容記述タイプ Abstract
出版者
言語 en
出版者 American Institute of Physics
言語
言語 eng
資源タイプ
資源タイプresource http://purl.org/coar/resource_type/c_6501
タイプ journal article
出版タイプ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
DOI
関連タイプ isVersionOf
識別子タイプ DOI
関連識別子 https://doi.org/10.1063/1.1432764
ISSN
収録物識別子タイプ PISSN
収録物識別子 0003-6951
書誌情報 en : Applied Physics Letters

巻 80, 号 2, p. 222-224, 発行日 2002-01-14
フォーマット
application/pdf
著者版フラグ
値 publisher
URI
識別子 http://hdl.handle.net/2237/7003
識別子タイプ HDL
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