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{"_buckets": {"deposit": "7ac268e6-3b68-410b-8b26-f81844106f78"}, "_deposit": {"id": "5449", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "5449"}, "status": "published"}, "_oai": {"id": "oai:nagoya.repo.nii.ac.jp:00005449", "sets": ["322"]}, "author_link": ["14031", "14032", "14033"], "item_10_biblio_info_6": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2005-07-15", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "12", "bibliographicPageEnd": "123304", "bibliographicPageStart": "123304", "bibliographicVolumeNumber": "97", "bibliographic_titles": [{"bibliographic_title": "Journal of Applied Physics", "bibliographic_titleLang": "en"}]}]}, "item_10_description_4": {"attribute_name": "抄録", "attribute_value_mlt": [{"subitem_description": "Decompositions and polymerizations of perfluorinated compounds gases were demonstrated employing atmospheric pressure plasmas with continuous-wave microwave excitations. The atmospheric pressure plasma was generated at a low gas temperature of 520 K. Spherical-shaped particles of approximately 50–120 nm in diameter were synthesized in CF_4 /He and C_4F_8/He plasma on Si substrate with dc voltage biasing, which was set in the plasma downstream region. The gas temperature in plasma was important to generate particles because particles were not generated at a high gas temperature of 850 K. The particles were determined to consist of carbon and fluorine atom composition from an energy dispersive x-ray spectroscopy. Furthermore, the effect of H_2 addition on the CF_4 /He plasma was investigated. The decomposition efficiency of CF_4 was increased with H_2 addition and obtained over 80% without emissions of carbon dioxide.", "subitem_description_language": "en", "subitem_description_type": "Abstract"}]}, "item_10_identifier_60": {"attribute_name": "URI", "attribute_value_mlt": [{"subitem_identifier_type": "HDL", "subitem_identifier_uri": "http://hdl.handle.net/2237/7053"}]}, "item_10_publisher_32": {"attribute_name": "出版者", "attribute_value_mlt": [{"subitem_publisher": "American Institute of Physics", "subitem_publisher_language": "en"}]}, "item_10_relation_11": {"attribute_name": "DOI", "attribute_value_mlt": [{"subitem_relation_type": "isVersionOf", "subitem_relation_type_id": {"subitem_relation_type_id_text": "https://doi.org/10.1063/1.1931034", "subitem_relation_type_select": "DOI"}}]}, "item_10_rights_12": {"attribute_name": "権利", "attribute_value_mlt": [{"subitem_rights": "Copyright (2005) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.", "subitem_rights_language": "en"}]}, "item_10_select_15": {"attribute_name": "著者版フラグ", "attribute_value_mlt": [{"subitem_select_item": "publisher"}]}, "item_10_source_id_7": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "0021-8979", "subitem_source_identifier_type": "PISSN"}]}, "item_10_text_14": {"attribute_name": "フォーマット", "attribute_value_mlt": [{"subitem_text_value": "application/pdf"}]}, "item_1615787544753": {"attribute_name": "出版タイプ", "attribute_value_mlt": [{"subitem_version_resource": "http://purl.org/coar/version/c_970fb48d4fbd8a85", "subitem_version_type": "VoR"}]}, "item_access_right": {"attribute_name": "アクセス権", "attribute_value_mlt": [{"subitem_access_right": "open access", "subitem_access_right_uri": "http://purl.org/coar/access_right/c_abf2"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "Nagai, M.", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "14031", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Hori, M.", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "14032", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Goto, T.", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "14033", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2018-02-19"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "JApplPhys_97_123304.pdf", "filesize": [{"value": "449.4 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_note", "mimetype": "application/pdf", "size": 449400.0, "url": {"label": "JApplPhys_97_123304.pdf", "objectType": "fulltext", "url": "https://nagoya.repo.nii.ac.jp/record/5449/files/JApplPhys_97_123304.pdf"}, "version_id": "ddb41174-70b1-434a-8266-d3414830d587"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "journal article", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "Decomposition and polymerization of perfluorinated compounds in microwave-excited atmospheric pressure plasma", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "Decomposition and polymerization of perfluorinated compounds in microwave-excited atmospheric pressure plasma", "subitem_title_language": "en"}]}, "item_type_id": "10", "owner": "1", "path": ["322"], "permalink_uri": "http://hdl.handle.net/2237/7053", "pubdate": {"attribute_name": "PubDate", "attribute_value": "2006-10-24"}, "publish_date": "2006-10-24", "publish_status": "0", "recid": "5449", "relation": {}, "relation_version_is_last": true, "title": ["Decomposition and polymerization of perfluorinated compounds in microwave-excited atmospheric pressure plasma"], "weko_shared_id": -1}
  1. B200 工学部/工学研究科
  2. B200a 雑誌掲載論文
  3. 学術雑誌

Decomposition and polymerization of perfluorinated compounds in microwave-excited atmospheric pressure plasma

http://hdl.handle.net/2237/7053
http://hdl.handle.net/2237/7053
b7e17d12-cc08-4bbf-a146-31e7f350372c
名前 / ファイル ライセンス アクション
JApplPhys_97_123304.pdf JApplPhys_97_123304.pdf (449.4 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2006-10-24
タイトル
タイトル Decomposition and polymerization of perfluorinated compounds in microwave-excited atmospheric pressure plasma
言語 en
著者 Nagai, M.

× Nagai, M.

WEKO 14031

en Nagai, M.

Search repository
Hori, M.

× Hori, M.

WEKO 14032

en Hori, M.

Search repository
Goto, T.

× Goto, T.

WEKO 14033

en Goto, T.

Search repository
アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
権利
言語 en
権利情報 Copyright (2005) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.
抄録
内容記述 Decompositions and polymerizations of perfluorinated compounds gases were demonstrated employing atmospheric pressure plasmas with continuous-wave microwave excitations. The atmospheric pressure plasma was generated at a low gas temperature of 520 K. Spherical-shaped particles of approximately 50–120 nm in diameter were synthesized in CF_4 /He and C_4F_8/He plasma on Si substrate with dc voltage biasing, which was set in the plasma downstream region. The gas temperature in plasma was important to generate particles because particles were not generated at a high gas temperature of 850 K. The particles were determined to consist of carbon and fluorine atom composition from an energy dispersive x-ray spectroscopy. Furthermore, the effect of H_2 addition on the CF_4 /He plasma was investigated. The decomposition efficiency of CF_4 was increased with H_2 addition and obtained over 80% without emissions of carbon dioxide.
言語 en
内容記述タイプ Abstract
出版者
言語 en
出版者 American Institute of Physics
言語
言語 eng
資源タイプ
資源タイプresource http://purl.org/coar/resource_type/c_6501
タイプ journal article
出版タイプ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
DOI
関連タイプ isVersionOf
識別子タイプ DOI
関連識別子 https://doi.org/10.1063/1.1931034
ISSN
収録物識別子タイプ PISSN
収録物識別子 0021-8979
書誌情報 en : Journal of Applied Physics

巻 97, 号 12, p. 123304-123304, 発行日 2005-07-15
フォーマット
application/pdf
著者版フラグ
値 publisher
URI
識別子 http://hdl.handle.net/2237/7053
識別子タイプ HDL
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