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Decomposition and polymerization of perfluorinated compounds in microwave-excited atmospheric pressure plasma
http://hdl.handle.net/2237/7053
http://hdl.handle.net/2237/7053b7e17d12-cc08-4bbf-a146-31e7f350372c
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
JApplPhys_97_123304.pdf (449.4 kB)
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| アイテムタイプ | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2006-10-24 | |||||
| タイトル | ||||||
| タイトル | Decomposition and polymerization of perfluorinated compounds in microwave-excited atmospheric pressure plasma | |||||
| 言語 | en | |||||
| 著者 |
Nagai, M.
× Nagai, M.× Hori, M.× Goto, T. |
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| アクセス権 | ||||||
| アクセス権 | open access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
| 権利 | ||||||
| 権利情報 | Copyright (2005) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. | |||||
| 言語 | en | |||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Decompositions and polymerizations of perfluorinated compounds gases were demonstrated employing atmospheric pressure plasmas with continuous-wave microwave excitations. The atmospheric pressure plasma was generated at a low gas temperature of 520 K. Spherical-shaped particles of approximately 50–120 nm in diameter were synthesized in CF_4 /He and C_4F_8/He plasma on Si substrate with dc voltage biasing, which was set in the plasma downstream region. The gas temperature in plasma was important to generate particles because particles were not generated at a high gas temperature of 850 K. The particles were determined to consist of carbon and fluorine atom composition from an energy dispersive x-ray spectroscopy. Furthermore, the effect of H_2 addition on the CF_4 /He plasma was investigated. The decomposition efficiency of CF_4 was increased with H_2 addition and obtained over 80% without emissions of carbon dioxide. | |||||
| 言語 | en | |||||
| 出版者 | ||||||
| 出版者 | American Institute of Physics | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプresource | http://purl.org/coar/resource_type/c_6501 | |||||
| タイプ | journal article | |||||
| 出版タイプ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
| DOI | ||||||
| 関連タイプ | isVersionOf | |||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | https://doi.org/10.1063/1.1931034 | |||||
| ISSN | ||||||
| 収録物識別子タイプ | PISSN | |||||
| 収録物識別子 | 0021-8979 | |||||
| 書誌情報 |
en : Journal of Applied Physics 巻 97, 号 12, p. 123304-123304, 発行日 2005-07-15 |
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| フォーマット | ||||||
| 値 | application/pdf | |||||
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| 値 | publisher | |||||
| URI | ||||||
| 識別子 | http://hdl.handle.net/2237/7053 | |||||
| 識別子タイプ | HDL | |||||
