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  1. B200 工学部/工学研究科
  2. B200a 雑誌掲載論文
  3. 学術雑誌

Properties of atmospheric pressure plasmas with microwave excitations for plasma processing

http://hdl.handle.net/2237/7072
3c838731-632a-433b-a7f5-646d4d75df77
名前 / ファイル ライセンス アクション
JVA000221.pdf JVA000221.pdf (176.8 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2006-10-26
タイトル
タイトル Properties of atmospheric pressure plasmas with microwave excitations for plasma processing
著者 Nagai, Mikio

× Nagai, Mikio

WEKO 14089

Nagai, Mikio

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Hori, Masaru

× Hori, Masaru

WEKO 14090

Hori, Masaru

Search repository
Goto, Toshio

× Goto, Toshio

WEKO 14091

Goto, Toshio

Search repository
権利
権利情報 Copyright (2005) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.
抄録
内容記述 Atmospheric pressure plasmas with microwave excitations were successfully produced in dielectric barrier micro plasmas employing N_2, Ar, or He gas. N_2 optical emissions of the second positive system were measured for evaluating the gas temperature. The gas temperatures of the plasmas could be much less than 1000 K. Blackbody emissions were measured by Fourier transform infrared spectrometer for evaluating the electrode temperature. Temperatures of both the gas and electrode were evaluated by fitting the experimental results with calculations. The gas temperature in the N_2 plasma was notably increased with the discharge time as compared with those in Ar and He plasmas. It was found that the pulsed discharge and the water-cooled electrode were effective for reducing the gas temperature. The pulsed discharge decreased the gas temperature from 900 to 600 K, and the water-cooled electrode decreased the gas temperature by more than 200 K. Controlling the temperature of the electrodes was the most effective technique to reduce the gas temperature, because the gas temperature was in equilibrium with the electrode temperature.
内容記述タイプ Abstract
出版者
出版者 American Institute of Physics
言語
言語 eng
資源タイプ
資源タイプresource http://purl.org/coar/resource_type/c_6501
タイプ journal article
DOI
関連識別子
識別子タイプ DOI
関連識別子 http://dx.doi.org/10.1116/1.1851539
ISSN
収録物識別子タイプ ISSN
収録物識別子 0734-2101
書誌情報 Journal of Vacuum Science & Technology A

巻 23, 号 2, p. 221-225, 発行日 2005-03
フォーマット
application/pdf
著者版フラグ
値 publisher
URI
識別子 http://hdl.handle.net/2237/7072
識別子タイプ HDL
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