{"_buckets": {"deposit": "71a2998e-048d-4341-92ab-6de5047d44e0"}, "_deposit": {"id": "5468", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "5468"}, "status": "published"}, "_oai": {"id": "oai:nagoya.repo.nii.ac.jp:00005468", "sets": ["322"]}, "author_link": ["14089", "14090", "14091"], "item_10_biblio_info_6": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2005-03", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "2", "bibliographicPageEnd": "225", "bibliographicPageStart": "221", "bibliographicVolumeNumber": "23", "bibliographic_titles": [{"bibliographic_title": "Journal of Vacuum Science \u0026 Technology A", "bibliographic_titleLang": "en"}]}]}, "item_10_description_4": {"attribute_name": "抄録", "attribute_value_mlt": [{"subitem_description": "Atmospheric pressure plasmas with microwave excitations were successfully produced in dielectric barrier micro plasmas employing N_2, Ar, or He gas. N_2 optical emissions of the second positive system were measured for evaluating the gas temperature. The gas temperatures of the plasmas could be much less than 1000 K. Blackbody emissions were measured by Fourier transform infrared spectrometer for evaluating the electrode temperature. Temperatures of both the gas and electrode were evaluated by fitting the experimental results with calculations. The gas temperature in the N_2 plasma was notably increased with the discharge time as compared with those in Ar and He plasmas. It was found that the pulsed discharge and the water-cooled electrode were effective for reducing the gas temperature. The pulsed discharge decreased the gas temperature from 900 to 600 K, and the water-cooled electrode decreased the gas temperature by more than 200 K. Controlling the temperature of the electrodes was the most effective technique to reduce the gas temperature, because the gas temperature was in equilibrium with the electrode temperature.", "subitem_description_language": "en", "subitem_description_type": "Abstract"}]}, "item_10_identifier_60": {"attribute_name": "URI", "attribute_value_mlt": [{"subitem_identifier_type": "HDL", "subitem_identifier_uri": "http://hdl.handle.net/2237/7072"}]}, "item_10_publisher_32": {"attribute_name": "出版者", "attribute_value_mlt": [{"subitem_publisher": "American Institute of Physics", "subitem_publisher_language": "en"}]}, "item_10_relation_11": {"attribute_name": "DOI", "attribute_value_mlt": [{"subitem_relation_type": "isVersionOf", "subitem_relation_type_id": {"subitem_relation_type_id_text": "https://doi.org/10.1116/1.1851539", "subitem_relation_type_select": "DOI"}}]}, "item_10_rights_12": {"attribute_name": "権利", "attribute_value_mlt": [{"subitem_rights": "Copyright (2005) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.", "subitem_rights_language": "en"}]}, "item_10_select_15": {"attribute_name": "著者版フラグ", "attribute_value_mlt": [{"subitem_select_item": "publisher"}]}, "item_10_source_id_7": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "0734-2101", "subitem_source_identifier_type": "PISSN"}]}, "item_10_text_14": {"attribute_name": "フォーマット", "attribute_value_mlt": [{"subitem_text_value": "application/pdf"}]}, "item_1615787544753": {"attribute_name": "出版タイプ", "attribute_value_mlt": [{"subitem_version_resource": "http://purl.org/coar/version/c_970fb48d4fbd8a85", "subitem_version_type": "VoR"}]}, "item_access_right": {"attribute_name": "アクセス権", "attribute_value_mlt": [{"subitem_access_right": "open access", "subitem_access_right_uri": "http://purl.org/coar/access_right/c_abf2"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "Nagai, Mikio", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "14089", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Hori, Masaru", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "14090", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Goto, Toshio", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "14091", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2018-02-19"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "JVA000221.pdf", "filesize": [{"value": "176.8 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_note", "mimetype": "application/pdf", "size": 176800.0, "url": {"label": "JVA000221.pdf", "objectType": "fulltext", "url": "https://nagoya.repo.nii.ac.jp/record/5468/files/JVA000221.pdf"}, "version_id": "d0539116-ce23-4e5e-947c-837f20c2ade4"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "journal article", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "Properties of atmospheric pressure plasmas with microwave excitations for plasma processing", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "Properties of atmospheric pressure plasmas with microwave excitations for plasma processing", "subitem_title_language": "en"}]}, "item_type_id": "10", "owner": "1", "path": ["322"], "permalink_uri": "http://hdl.handle.net/2237/7072", "pubdate": {"attribute_name": "PubDate", "attribute_value": "2006-10-26"}, "publish_date": "2006-10-26", "publish_status": "0", "recid": "5468", "relation": {}, "relation_version_is_last": true, "title": ["Properties of atmospheric pressure plasmas with microwave excitations for plasma processing"], "weko_shared_id": -1}