{"_buckets": {"deposit": "b2b504ff-0a3a-43bb-89c8-f31bf7e1e6ea"}, "_deposit": {"id": "5641", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "5641"}, "status": "published"}, "_oai": {"id": "oai:nagoya.repo.nii.ac.jp:00005641", "sets": ["322"]}, "author_link": ["14910", "14911"], "item_10_biblio_info_6": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2003-08-25", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "8", "bibliographicPageEnd": "1535", "bibliographicPageStart": "1533", "bibliographicVolumeNumber": "83", "bibliographic_titles": [{"bibliographic_title": "Applied Physics Letters", "bibliographic_titleLang": "en"}]}]}, "item_10_description_4": {"attribute_name": "抄録", "attribute_value_mlt": [{"subitem_description": "The effect of excitation frequency in the 13.56–60 MHz range on the electron energy distribution function (EDF) of capacitively coupled plasma is investigated. Under a fixed rf voltage (50–130 V peak-to-peak) and argon pressure (100 mTorr), a remarkable change in the EDF is observed: a Druyvesteyn type at low frequencies (≃13.56 MHz) evolves into a bi-Maxwellian type in a very high frequency (VHF) above 30 MHz. The transition frequency decreases with increasing the rf voltage. The observed frequency effect on the EDF is tentatively explained in terms of the transition of electron heating mode from the collisional ohmic heating at low frequencies into the plasma surface heating in the VHF range.", "subitem_description_language": "en", "subitem_description_type": "Abstract"}]}, "item_10_identifier_60": {"attribute_name": "URI", "attribute_value_mlt": [{"subitem_identifier_type": "HDL", "subitem_identifier_uri": "http://hdl.handle.net/2237/7247"}]}, "item_10_publisher_32": {"attribute_name": "出版者", "attribute_value_mlt": [{"subitem_publisher": "American Institute of Physics", "subitem_publisher_language": "en"}]}, "item_10_relation_11": {"attribute_name": "DOI", "attribute_value_mlt": [{"subitem_relation_type": "isVersionOf", "subitem_relation_type_id": {"subitem_relation_type_id_text": "https://doi.org/10.1063/1.1604941", "subitem_relation_type_select": "DOI"}}]}, "item_10_rights_12": {"attribute_name": "権利", "attribute_value_mlt": [{"subitem_rights": "Copyright (2003) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.", "subitem_rights_language": "en"}]}, "item_10_select_15": {"attribute_name": "著者版フラグ", "attribute_value_mlt": [{"subitem_select_item": "publisher"}]}, "item_10_source_id_7": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "0003-6951", "subitem_source_identifier_type": "PISSN"}]}, "item_10_text_14": {"attribute_name": "フォーマット", "attribute_value_mlt": [{"subitem_text_value": "application/pdf"}]}, "item_1615787544753": {"attribute_name": "出版タイプ", "attribute_value_mlt": [{"subitem_version_resource": "http://purl.org/coar/version/c_970fb48d4fbd8a85", "subitem_version_type": "VoR"}]}, "item_access_right": {"attribute_name": "アクセス権", "attribute_value_mlt": [{"subitem_access_right": "open access", "subitem_access_right_uri": "http://purl.org/coar/access_right/c_abf2"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "Abdel-Fattah, E.", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "14910", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Sugai, H.", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "14911", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2018-02-19"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "ApplPhysLett_83_1533.pdf", "filesize": [{"value": "317.1 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_note", "mimetype": "application/pdf", "size": 317100.0, "url": {"label": "ApplPhysLett_83_1533.pdf", "objectType": "fulltext", "url": "https://nagoya.repo.nii.ac.jp/record/5641/files/ApplPhysLett_83_1533.pdf"}, "version_id": "35974aaa-c2ef-4591-a05f-0657bdbbe795"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "journal article", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "Electron heating mode transition observed in a very high frequency capacitive discharge", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "Electron heating mode transition observed in a very high frequency capacitive discharge", "subitem_title_language": "en"}]}, "item_type_id": "10", "owner": "1", "path": ["322"], "permalink_uri": "http://hdl.handle.net/2237/7247", "pubdate": {"attribute_name": "PubDate", "attribute_value": "2007-01-15"}, "publish_date": "2007-01-15", "publish_status": "0", "recid": "5641", "relation": {}, "relation_version_is_last": true, "title": ["Electron heating mode transition observed in a very high frequency capacitive discharge"], "weko_shared_id": -1}