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Observation of surface dissociation of low-energy polyatomic ions relevant to plasma processing
http://hdl.handle.net/2237/7251
http://hdl.handle.net/2237/72512457b902-4fa2-4546-96ae-a1b7666f9c23
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
JVA000290.pdf (111.5 kB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
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| 公開日 | 2007-01-15 | |||||
| タイトル | ||||||
| タイトル | Observation of surface dissociation of low-energy polyatomic ions relevant to plasma processing | |||||
| 言語 | en | |||||
| 著者 |
Sugai, H.
× Sugai, H.× Mitsuoka, Y.× Toyoda, H. |
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| アクセス権 | ||||||
| アクセス権 | open access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
| 権利 | ||||||
| 言語 | en | |||||
| 権利情報 | Copyright (1998) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. | |||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | To gain insight into surface processes in plasma processing, basic ion beam experiments are performed on two representative polyatomic-ion species: hydrocarbon ions CH_x^+ for deposition processes and fluorocarbon ions CF_x^+ for etching processes (x=1,2, . . . ). A single ion species is extracted from an inductive plasma via a mass filter and directed onto aluminum surfaces at energies <150 eV. Significant charge neutralization is observed which leads to backscattering of ～0.3% CH_x^+ ions and ～1% CF_x^+ ions from the surface bombarded at 100 eV. Most of the ions scattered from the surface have kinetic energies lower than 10 eV. A polyatomic ion impinging on the surface breaks up into smaller ionic fragments. Such surface dissociation is found even at very low incident energies (10–50 eV) in the case of hydrocarbon ions, which is attributed to vibrational excitation of the incident parent ions. In contrast to this, fluorocarbon ions hardly dissociate at such low energies. On the other hand, at high energy (> 100 eV) incidence of both CH_x^+ and CF_x^+ species gives rise to dissociation into smaller fragment ions, probably via electronic excitation. | |||||
| 言語 | en | |||||
| 出版者 | ||||||
| 出版者 | American Institute of Physics | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| 出版タイプ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
| DOI | ||||||
| 関連タイプ | isVersionOf | |||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | https://doi.org/10.1116/1.580984 | |||||
| ISSN | ||||||
| 収録物識別子タイプ | PISSN | |||||
| 収録物識別子 | 0734-2101 | |||||
| 書誌情報 |
en : Journal of Vacuum Science & Technology A 巻 16, 号 1, p. 290-293, 発行日 1998-01 |
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| フォーマット | ||||||
| 値 | application/pdf | |||||
| 著者版フラグ | ||||||
| 値 | publisher | |||||
| URI | ||||||
| 識別子 | http://hdl.handle.net/2237/7251 | |||||
| 識別子タイプ | HDL | |||||
