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Ti/TiN スパッタリング薄膜の多層化につれての機械的特性の向上
http://hdl.handle.net/2237/9035
http://hdl.handle.net/2237/903547e8acda-dfc9-4c32-a18d-84626176da2e
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
JsMecEngC_66-647-2409.pdf (826.8 kB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2007-11-26 | |||||
| タイトル | ||||||
| タイトル | Ti/TiN スパッタリング薄膜の多層化につれての機械的特性の向上 | |||||
| 言語 | ja | |||||
| その他のタイトル | ||||||
| その他のタイトル | Improvement of Mechanical Properties of Ti/TiN Multilayer Film Deposited by Sputtering | |||||
| 言語 | en | |||||
| 著者 |
森, 敏彦
× 森, 敏彦× MORI, Toshihiko× 福田, 俊一× FUKUDA, Syun'ichi× 竹村, 嘉彦× TAKEMURA, Yoshihiko |
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| アクセス権 | ||||||
| アクセス権 | open access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
| 権利 | ||||||
| 言語 | ja | |||||
| 権利情報 | 日本機械学会 | |||||
| 権利 | ||||||
| 言語 | ja | |||||
| 権利情報 | 本文データは学協会の許諾に基づきCiNiiから複製したものである。 | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Coating | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Laminated Construction | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Composite Material | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Hardness | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Crystal Plasticity | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Multilayer Film | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Ti/TiN | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Magnetron Sputtering | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Silicone Substrate | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Energy Method | |||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Increasing requirements on coating properties results in trends to develop new systems, the most important of which is a multilayer coating. Multilayer coating can solve simultaneously very different requirements that the coating can meet at both the substrate /coating interface and the upper functional layer of the coating. Ti/TiN multilayer coatings were deposited on a silicon (100) by rf magnetron sputtering, using multi S-guns. Under the condition in which the total thickness kept 150 nm, the numbers of layers were changed from 4 to 40. Mechanical properties of a film were improved by straining and preferable crystalline orientation. Energy evolved in the coating during its growth can dissipate, and this may decrease internal stresses in the coating, improve its resistance to mechanical loadings, and prevent breaking of the coating. A mechanism of improving mechanical properties with increase of a layer number was discussed based on various analyses and measurements-that is, auger electron spectroscopy, x ray diffraction, nano-indenting test, scratch test and atomic force microscopy. Suppose that the overall energy W_hkl of multilayer film with constant overall thickness is the sum of the surface or interface energy S_hkl and strain energy U_hkl, (W_hkl=S_hkl＋nU_hkl,where n is layer number), the preferred orientation of the film grown by physical vapor deposition is decided by the lowest conditions W_hkl resulting from a critical competition between S_hkl and U_hkl. Therefore a film should exhibit preferred orientation of the lowest U_hkl at small n but exhibit that of the lowest S_hkl at large n. The preferred orientation of the lowest U_hkl at small n but exhibit that of the lowest S_hkl at large n. The preferred orientation is predicted to change from (111) to (100) with increase of layer number because S(100)<S(111) and U(100)>U(111). XRD gives expected result. Relative strenghts δ/τ along [100] and [111] can be estimated for the slip system of TiN, {100}<110>, by using Schmid's law. | |||||
| 言語 | en | |||||
| 出版者 | ||||||
| 出版者 | 日本機械学会 | |||||
| 言語 | ja | |||||
| 言語 | ||||||
| 言語 | jpn | |||||
| 資源タイプ | ||||||
| 資源タイプresource | http://purl.org/coar/resource_type/c_6501 | |||||
| タイプ | journal article | |||||
| 出版タイプ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
| 関連情報 | ||||||
| 関連タイプ | isVersionOf | |||||
| 識別子タイプ | URI | |||||
| 関連識別子 | http://ci.nii.ac.jp/naid/110002383215/ | |||||
| ISSN | ||||||
| 収録物識別子タイプ | PISSN | |||||
| 収録物識別子 | 0387-5024 | |||||
| 書誌情報 |
ja : 日本機械学會論文集 C編 巻 66, 号 647, p. 2409-2416, 発行日 2000-07 |
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| フォーマット | ||||||
| 値 | application/pdf | |||||
| 著者版フラグ | ||||||
| 値 | publisher | |||||
| URI | ||||||
| 識別子 | http://hdl.handle.net/2237/9035 | |||||
| 識別子タイプ | HDL | |||||
