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  1. B200 工学部/工学研究科
  2. B200a 雑誌掲載論文
  3. 学術雑誌

Ti/TiN スパッタリング薄膜の多層化につれての機械的特性の向上

http://hdl.handle.net/2237/9035
http://hdl.handle.net/2237/9035
47e8acda-dfc9-4c32-a18d-84626176da2e
名前 / ファイル ライセンス アクション
JsMecEngC_66-647-2409.pdf JsMecEngC_66-647-2409.pdf (826.8 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2007-11-26
タイトル
タイトル Ti/TiN スパッタリング薄膜の多層化につれての機械的特性の向上
言語 ja
その他のタイトル
その他のタイトル Improvement of Mechanical Properties of Ti/TiN Multilayer Film Deposited by Sputtering
言語 en
著者 森, 敏彦

× 森, 敏彦

WEKO 20390

ja 森, 敏彦

Search repository
MORI, Toshihiko

× MORI, Toshihiko

WEKO 20391

en MORI, Toshihiko

Search repository
福田, 俊一

× 福田, 俊一

WEKO 20392

ja 福田, 俊一

Search repository
FUKUDA, Syun'ichi

× FUKUDA, Syun'ichi

WEKO 20393

en FUKUDA, Syun'ichi

Search repository
竹村, 嘉彦

× 竹村, 嘉彦

WEKO 20394

ja 竹村, 嘉彦

Search repository
TAKEMURA, Yoshihiko

× TAKEMURA, Yoshihiko

WEKO 20395

en TAKEMURA, Yoshihiko

Search repository
アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
権利
言語 ja
権利情報 日本機械学会
権利
言語 ja
権利情報 本文データは学協会の許諾に基づきCiNiiから複製したものである。
キーワード
主題Scheme Other
主題 Coating
キーワード
主題Scheme Other
主題 Laminated Construction
キーワード
主題Scheme Other
主題 Composite Material
キーワード
主題Scheme Other
主題 Hardness
キーワード
主題Scheme Other
主題 Crystal Plasticity
キーワード
主題Scheme Other
主題 Multilayer Film
キーワード
主題Scheme Other
主題 Ti/TiN
キーワード
主題Scheme Other
主題 Magnetron Sputtering
キーワード
主題Scheme Other
主題 Silicone Substrate
キーワード
主題Scheme Other
主題 Energy Method
抄録
内容記述 Increasing requirements on coating properties results in trends to develop new systems, the most important of which is a multilayer coating. Multilayer coating can solve simultaneously very different requirements that the coating can meet at both the substrate /coating interface and the upper functional layer of the coating. Ti/TiN multilayer coatings were deposited on a silicon (100) by rf magnetron sputtering, using multi S-guns. Under the condition in which the total thickness kept 150 nm, the numbers of layers were changed from 4 to 40. Mechanical properties of a film were improved by straining and preferable crystalline orientation. Energy evolved in the coating during its growth can dissipate, and this may decrease internal stresses in the coating, improve its resistance to mechanical loadings, and prevent breaking of the coating. A mechanism of improving mechanical properties with increase of a layer number was discussed based on various analyses and measurements-that is, auger electron spectroscopy, x ray diffraction, nano-indenting test, scratch test and atomic force microscopy. Suppose that the overall energy W_hkl of multilayer film with constant overall thickness is the sum of the surface or interface energy S_hkl and strain energy U_hkl, (W_hkl=S_hkl+nU_hkl,where n is layer number), the preferred orientation of the film grown by physical vapor deposition is decided by the lowest conditions W_hkl resulting from a critical competition between S_hkl and U_hkl. Therefore a film should exhibit preferred orientation of the lowest U_hkl at small n but exhibit that of the lowest S_hkl at large n. The preferred orientation of the lowest U_hkl at small n but exhibit that of the lowest S_hkl at large n. The preferred orientation is predicted to change from (111) to (100) with increase of layer number because S(100)<S(111) and U(100)>U(111). XRD gives expected result. Relative strenghts δ/τ along [100] and [111] can be estimated for the slip system of TiN, {100}<110>, by using Schmid's law.
言語 en
内容記述タイプ Abstract
出版者
言語 ja
出版者 日本機械学会
言語
言語 jpn
資源タイプ
資源タイプresource http://purl.org/coar/resource_type/c_6501
タイプ journal article
出版タイプ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
関連情報
関連タイプ isVersionOf
識別子タイプ URI
関連識別子 http://ci.nii.ac.jp/naid/110002383215/
ISSN
収録物識別子タイプ PISSN
収録物識別子 0387-5024
書誌情報 ja : 日本機械学會論文集 C編

巻 66, 号 647, p. 2409-2416, 発行日 2000-07
フォーマット
application/pdf
著者版フラグ
値 publisher
URI
識別子 http://hdl.handle.net/2237/9035
識別子タイプ HDL
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