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Consideration of Deformation of TiN Thin Films with Preferred Orientation Prepared by Ion-Beam-Assisted Deposition
http://hdl.handle.net/2237/9037
http://hdl.handle.net/2237/90370622d0d4-8055-484a-a50f-f9fdc1d03e30
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
JSME_A_44-1-94.pdf (701.8 kB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2007-11-26 | |||||
| タイトル | ||||||
| タイトル | Consideration of Deformation of TiN Thin Films with Preferred Orientation Prepared by Ion-Beam-Assisted Deposition | |||||
| 言語 | en | |||||
| 著者 |
HAYASHI, Toshiyuki
× HAYASHI, Toshiyuki× MATSUMURO, Akihito× WATANABE, Tomohiko× MORI, Toshihiko× TAKAHASHI, Yutaka× YAMAGUCHI, Katsumi |
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| アクセス権 | ||||||
| アクセス権 | open access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
| 権利 | ||||||
| 言語 | ja | |||||
| 権利情報 | 日本機械学会 | |||||
| 権利 | ||||||
| 言語 | ja | |||||
| 権利情報 | 本文データは学協会の許諾に基づきCiNiiから複製したものである。 | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Plasticity | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Anisotropy | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Hardness | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Titanium Nitride | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Slip System | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Preferred Orientation | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Ion-Beam-Assisted Deposition | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Thin Film | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Coating | |||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Plastic deformation of TiN thin films with (111) and (200) preferred orientation was determined based on their hardness anisotropy. Hardness was measured by means of the nano-indentation technique. Plastic deformation of TiN films was caused by the indentation of the trigonal diamond tip, and evidence of this phenomenon was promvided by cross-sectional scanning electron microscopy (SEM) observation and transmission electron diffraction (TED) analysis. The influence of the differences in residual stress and grain size on hardness anisotropy was restrictive, and hardness anisotropy can be explained by the anisotropy of yield stress as calculated using Schmid's law. This relationship suggests the existence of a {100} <110> slip system in the TiN crystal. Transmission electron microscopy (TEM) observation of brittle cracks in TiN films confirmed that these cracks are caused not by cleavage fractures but by intergranular fractures. | |||||
| 言語 | en | |||||
| 出版者 | ||||||
| 出版者 | The Japan Society of Mechanical Engineers | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプresource | http://purl.org/coar/resource_type/c_6501 | |||||
| タイプ | journal article | |||||
| 出版タイプ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
| 関連情報 | ||||||
| 関連タイプ | isVersionOf | |||||
| 識別子タイプ | URI | |||||
| 関連識別子 | http://ci.nii.ac.jp/naid/110002974684/ | |||||
| ISSN | ||||||
| 収録物識別子タイプ | PISSN | |||||
| 収録物識別子 | 1344-7912 | |||||
| 書誌情報 |
en : JSME International Journal Series A 巻 44, 号 1, p. 94-99, 発行日 2001-01 |
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| フォーマット | ||||||
| 値 | application/pdf | |||||
| 著者版フラグ | ||||||
| 値 | publisher | |||||
| URI | ||||||
| 識別子 | http://hdl.handle.net/2237/9037 | |||||
| 識別子タイプ | HDL | |||||
