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X-Ray Study of Mechanical Properties of TiN Thin Films Coated on Steel by Ion Beam Mixing Method
http://hdl.handle.net/2237/9182
http://hdl.handle.net/2237/9182a08a4aef-57d1-4840-895e-423876bd6640
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
JSME_A_46-1-86.pdf (1.3 MB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2007-12-19 | |||||
| タイトル | ||||||
| タイトル | X-Ray Study of Mechanical Properties of TiN Thin Films Coated on Steel by Ion Beam Mixing Method | |||||
| 言語 | en | |||||
| 著者 |
ITO, Toshimasa
× ITO, Toshimasa× TANAKA, Keisuke× AKINIWA, Yoshiaki× ISHII, Takahiro× MIKI, Yasuhiro |
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| アクセス権 | ||||||
| アクセス権 | open access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
| 権利 | ||||||
| 言語 | ja | |||||
| 権利情報 | 日本機械学会 | |||||
| 権利 | ||||||
| 言語 | ja | |||||
| 権利情報 | 本文データは学協会の許諾に基づきCiNiiから複製したものである。 | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | X-ray Stress Analysis | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | TiN Film | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Reuss Model | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Residual Stress | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Loading Stress | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Four-point Bending | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Stress-strain Curve | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Fracture Strength | |||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | The thin films of titanium nitride (TiN) with the thickness of 0.5, 1.0, 2.0, 4.0 μm were coated on a steel substrate by the ion beam mixing method. The film had a strong fiber texture with <110> axis perpendicular to the film surface. The initial residual stress was equi-biaxial compression between -4.4 to -5.6GPa. For all thickness cases, the initial part of the changes of the in-plane stresses in the film due to external tensile loading agreed well with the prediction based on elasticity. While the substrate was under an uniaxial stress, the film was in the biaxial state of stress because of the mismatch of Poisson's ratio. When the measured stress in the film exceeded a certain value, the stress departed from the linear relation and leveled off. The onset of nonlinearity was nearly coincident with the first appearance of cracks. The stresses at the onset of nonlinearity and leveling-off decreased with increasing film thickness. The ratio of Young's modulus between loading and unloading decreased as the film thickness increased. | |||||
| 言語 | en | |||||
| 出版者 | ||||||
| 出版者 | The Japan Society of Mechanical Engineers | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| 出版タイプ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
| 関連情報 | ||||||
| 関連タイプ | isVersionOf | |||||
| 識別子タイプ | URI | |||||
| 関連識別子 | http://ci.nii.ac.jp/naid/10016191084/ | |||||
| ISSN | ||||||
| 収録物識別子タイプ | PISSN | |||||
| 収録物識別子 | 1344-7912 | |||||
| 書誌情報 |
en : JSME International Journal Series A 巻 46, 号 1, p. 86-92, 発行日 2003-01 |
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| フォーマット | ||||||
| 値 | application/pdf | |||||
| 著者版フラグ | ||||||
| 値 | publisher | |||||
| URI | ||||||
| 識別子 | http://hdl.handle.net/2237/9182 | |||||
| 識別子タイプ | HDL | |||||
