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  1. B200 工学部/工学研究科
  2. B200a 雑誌掲載論文
  3. 学術雑誌

X-Ray Study of Mechanical Properties of TiN Thin Films Coated on Steel by Ion Beam Mixing Method

http://hdl.handle.net/2237/9182
http://hdl.handle.net/2237/9182
a08a4aef-57d1-4840-895e-423876bd6640
名前 / ファイル ライセンス アクション
JSME_A_46-1-86.pdf JSME_A_46-1-86.pdf (1.3 MB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2007-12-19
タイトル
タイトル X-Ray Study of Mechanical Properties of TiN Thin Films Coated on Steel by Ion Beam Mixing Method
言語 en
著者 ITO, Toshimasa

× ITO, Toshimasa

WEKO 21063

en ITO, Toshimasa

Search repository
TANAKA, Keisuke

× TANAKA, Keisuke

WEKO 21064

en TANAKA, Keisuke

Search repository
AKINIWA, Yoshiaki

× AKINIWA, Yoshiaki

WEKO 21065

en AKINIWA, Yoshiaki

Search repository
ISHII, Takahiro

× ISHII, Takahiro

WEKO 21066

en ISHII, Takahiro

Search repository
MIKI, Yasuhiro

× MIKI, Yasuhiro

WEKO 21067

en MIKI, Yasuhiro

Search repository
アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
権利
言語 ja
権利情報 日本機械学会
権利
言語 ja
権利情報 本文データは学協会の許諾に基づきCiNiiから複製したものである。
キーワード
主題Scheme Other
主題 X-ray Stress Analysis
キーワード
主題Scheme Other
主題 TiN Film
キーワード
主題Scheme Other
主題 Reuss Model
キーワード
主題Scheme Other
主題 Residual Stress
キーワード
主題Scheme Other
主題 Loading Stress
キーワード
主題Scheme Other
主題 Four-point Bending
キーワード
主題Scheme Other
主題 Stress-strain Curve
キーワード
主題Scheme Other
主題 Fracture Strength
抄録
内容記述 The thin films of titanium nitride (TiN) with the thickness of 0.5, 1.0, 2.0, 4.0 μm were coated on a steel substrate by the ion beam mixing method. The film had a strong fiber texture with <110> axis perpendicular to the film surface. The initial residual stress was equi-biaxial compression between -4.4 to -5.6GPa. For all thickness cases, the initial part of the changes of the in-plane stresses in the film due to external tensile loading agreed well with the prediction based on elasticity. While the substrate was under an uniaxial stress, the film was in the biaxial state of stress because of the mismatch of Poisson's ratio. When the measured stress in the film exceeded a certain value, the stress departed from the linear relation and leveled off. The onset of nonlinearity was nearly coincident with the first appearance of cracks. The stresses at the onset of nonlinearity and leveling-off decreased with increasing film thickness. The ratio of Young's modulus between loading and unloading decreased as the film thickness increased.
言語 en
内容記述タイプ Abstract
出版者
言語 en
出版者 The Japan Society of Mechanical Engineers
言語
言語 eng
資源タイプ
資源タイプresource http://purl.org/coar/resource_type/c_6501
タイプ journal article
出版タイプ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
関連情報
関連タイプ isVersionOf
識別子タイプ URI
関連識別子 http://ci.nii.ac.jp/naid/10016191084/
ISSN
収録物識別子タイプ PISSN
収録物識別子 1344-7912
書誌情報 en : JSME International Journal Series A

巻 46, 号 1, p. 86-92, 発行日 2003-01
フォーマット
application/pdf
著者版フラグ
値 publisher
URI
識別子 http://hdl.handle.net/2237/9182
識別子タイプ HDL
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