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  1. B200 工学部/工学研究科
  2. B200a 雑誌掲載論文
  3. 学術雑誌

Quartz tuning-fork type AFM probe operated in Anti-phase Vibration Mode

http://hdl.handle.net/2237/9554
http://hdl.handle.net/2237/9554
a80ef6e6-2f31-4388-8871-915f150d1c9b
名前 / ファイル ライセンス アクション
shik_06.pdf shik_06.pdf (2.0 MB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2008-03-03
タイトル
タイトル Quartz tuning-fork type AFM probe operated in Anti-phase Vibration Mode
言語 en
著者 Hida, H.

× Hida, H.

WEKO 22354

en Hida, H.

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Shikida, M.

× Shikida, M.

WEKO 22355

en Shikida, M.

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Fukuzawa, K.

× Fukuzawa, K.

WEKO 22356

en Fukuzawa, K.

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Ono, A.

× Ono, A.

WEKO 22357

en Ono, A.

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Sato, K.

× Sato, K.

WEKO 22358

en Sato, K.

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Asaumi, K.

× Asaumi, K.

WEKO 22359

en Asaumi, K.

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Iriye, Y.

× Iriye, Y.

WEKO 22360

en Iriye, Y.

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Sato, K.

× Sato, K.

WEKO 22361

en Sato, K.

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アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
権利
言語 en
権利情報 Copyright © 2006 IEEE. Reprinted from (relevant publication info). This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of Nagoya University’s products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org.
抄録
内容記述 This paper presents that quartz tuning fork shows excellent properties as Atomic Force Microscopy (AFM) probe. We used Focused Ion Beam (FIB) system to monolithically form a sharp tip at the side end of one beam. The fabricated probe can vibrate and detect the deformation itself because of piezoelectric property of crystal quartz. We evaluated the vibration characteristic and the self-detection ability of tuning fork. The tuning fork probe is actuated in two different vibration mode; in-phase and anti-phase mode, and clarified that high Q-factor of 5247 was obtained in anti-phase mode. We further applied this mode for AFM observation and images were successfully with dynamic AFM system.
言語 en
内容記述タイプ Abstract
出版者
言語 en
出版者 IEEE
言語
言語 eng
資源タイプ
資源タイプresource http://purl.org/coar/resource_type/c_6501
タイプ journal article
出版タイプ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
DOI
関連タイプ isVersionOf
識別子タイプ DOI
関連識別子 https://doi.org/10.1109/MHS.2006.320245
ISBN
関連タイプ isPartOf
識別子タイプ ISBN
関連識別子 1-4244-0717-6
書誌情報 en : International Symposium on Micro-NanoMechatronics and Human Science

p. 1-5, 発行日 2006
フォーマット
application/pdf
著者版フラグ
値 publisher
URI
識別子 http://hdl.handle.net/2237/9554
識別子タイプ HDL
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