{"_buckets": {"deposit": "b2f45194-fc98-4cf4-8fbf-c8a3ad3ca398"}, "_deposit": {"id": "7834", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "7834"}, "status": "published"}, "_oai": {"id": "oai:nagoya.repo.nii.ac.jp:00007834"}, "item_10_biblio_info_6": {"attribute_name": "\u66f8\u8a8c\u60c5\u5831", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2006", "bibliographicIssueDateType": "Issued"}, "bibliographicPageEnd": "5", "bibliographicPageStart": "1", "bibliographic_titles": [{"bibliographic_title": "International Symposium on Micro-NanoMechatronics and Human Science"}]}]}, "item_10_description_4": {"attribute_name": "\u6284\u9332", "attribute_value_mlt": [{"subitem_description": "This paper presents that quartz tuning fork shows excellent properties as Atomic Force Microscopy (AFM) probe. We used Focused Ion Beam (FIB) system to monolithically form a sharp tip at the side end of one beam. The fabricated probe can vibrate and detect the deformation itself because of piezoelectric property of crystal quartz. We evaluated the vibration characteristic and the self-detection ability of tuning fork. The tuning fork probe is actuated in two different vibration mode; in-phase and anti-phase mode, and clarified that high Q-factor of 5247 was obtained in anti-phase mode. We further applied this mode for AFM observation and images were successfully with dynamic AFM system.", "subitem_description_type": "Abstract"}]}, "item_10_identifier_60": {"attribute_name": "URI", "attribute_value_mlt": [{"subitem_identifier_type": "HDL", "subitem_identifier_uri": "http://hdl.handle.net/2237/9554"}]}, "item_10_publisher_32": {"attribute_name": "\u51fa\u7248\u8005", "attribute_value_mlt": [{"subitem_publisher": "IEEE"}]}, "item_10_relation_11": {"attribute_name": "DOI", "attribute_value_mlt": [{"subitem_relation_type_id": {"subitem_relation_type_id_text": "http://dx.doi.org/10.1109/MHS.2006.320245", "subitem_relation_type_select": "DOI"}}]}, "item_10_relation_8": {"attribute_name": "ISBN", "attribute_value_mlt": [{"subitem_relation_type_id": {"subitem_relation_type_id_text": "1-4244-0717-6", "subitem_relation_type_select": "ISBN"}}]}, "item_10_rights_12": {"attribute_name": "\u6a29\u5229", "attribute_value_mlt": [{"subitem_rights": "Copyright \u00a9 2006 IEEE. Reprinted from (relevant publication info). This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of Nagoya University\u2019s products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org."}]}, "item_10_select_15": {"attribute_name": "\u8457\u8005\u7248\u30d5\u30e9\u30b0", "attribute_value_mlt": [{"subitem_select_item": "publisher"}]}, "item_10_text_14": {"attribute_name": "\u30d5\u30a9\u30fc\u30de\u30c3\u30c8", "attribute_value_mlt": [{"subitem_text_value": "application/pdf"}]}, "item_creator": {"attribute_name": "\u8457\u8005", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "Hida, H."}], "nameIdentifiers": [{"nameIdentifier": "22354", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Shikida, M."}], "nameIdentifiers": [{"nameIdentifier": "22355", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Fukuzawa, K."}], "nameIdentifiers": [{"nameIdentifier": "22356", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Ono, A."}], "nameIdentifiers": [{"nameIdentifier": "22357", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Sato, K."}], "nameIdentifiers": [{"nameIdentifier": "22358", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Asaumi, K."}], "nameIdentifiers": [{"nameIdentifier": "22359", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Iriye, Y."}], "nameIdentifiers": [{"nameIdentifier": "22360", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Sato, K."}], "nameIdentifiers": [{"nameIdentifier": "22361", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "\u30d5\u30a1\u30a4\u30eb\u60c5\u5831", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2018-02-19"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "shik_06.pdf", "filesize": [{"value": "2.0 MB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 2000000.0, "url": {"label": "shik_06.pdf", "url": "https://nagoya.repo.nii.ac.jp/record/7834/files/shik_06.pdf"}, "version_id": "fe01d8a2-bcae-4d9c-8cc6-273b43225ff2"}]}, "item_language": {"attribute_name": "\u8a00\u8a9e", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "\u8cc7\u6e90\u30bf\u30a4\u30d7", "attribute_value_mlt": [{"resourcetype": "journal article", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "Quartz tuning-fork type AFM probe operated in Anti-phase Vibration Mode", "item_titles": {"attribute_name": "\u30bf\u30a4\u30c8\u30eb", "attribute_value_mlt": [{"subitem_title": "Quartz tuning-fork type AFM probe operated in Anti-phase Vibration Mode"}]}, "item_type_id": "10", "owner": "1", "path": ["320/321/322"], "permalink_uri": "http://hdl.handle.net/2237/9554", "pubdate": {"attribute_name": "\u516c\u958b\u65e5", "attribute_value": "2008-03-03"}, "publish_date": "2008-03-03", "publish_status": "0", "recid": "7834", "relation": {}, "relation_version_is_last": true, "title": ["Quartz tuning-fork type AFM probe operated in Anti-phase Vibration Mode"], "weko_shared_id": 3}