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Quartz tuning-fork type AFM probe operated in Anti-phase Vibration Mode
http://hdl.handle.net/2237/9554
http://hdl.handle.net/2237/9554a80ef6e6-2f31-4388-8871-915f150d1c9b
名前 / ファイル | ライセンス | アクション |
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shik_06.pdf (2.0 MB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2008-03-03 | |||||
タイトル | ||||||
タイトル | Quartz tuning-fork type AFM probe operated in Anti-phase Vibration Mode | |||||
言語 | en | |||||
著者 |
Hida, H.
× Hida, H.× Shikida, M.× Fukuzawa, K.× Ono, A.× Sato, K.× Asaumi, K.× Iriye, Y.× Sato, K. |
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アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
権利 | ||||||
言語 | en | |||||
権利情報 | Copyright © 2006 IEEE. Reprinted from (relevant publication info). This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of Nagoya University’s products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org. | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | This paper presents that quartz tuning fork shows excellent properties as Atomic Force Microscopy (AFM) probe. We used Focused Ion Beam (FIB) system to monolithically form a sharp tip at the side end of one beam. The fabricated probe can vibrate and detect the deformation itself because of piezoelectric property of crystal quartz. We evaluated the vibration characteristic and the self-detection ability of tuning fork. The tuning fork probe is actuated in two different vibration mode; in-phase and anti-phase mode, and clarified that high Q-factor of 5247 was obtained in anti-phase mode. We further applied this mode for AFM observation and images were successfully with dynamic AFM system. | |||||
言語 | en | |||||
出版者 | ||||||
出版者 | IEEE | |||||
言語 | en | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
出版タイプ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
DOI | ||||||
関連タイプ | isVersionOf | |||||
識別子タイプ | DOI | |||||
関連識別子 | https://doi.org/10.1109/MHS.2006.320245 | |||||
ISBN | ||||||
関連タイプ | isPartOf | |||||
識別子タイプ | ISBN | |||||
関連識別子 | 1-4244-0717-6 | |||||
書誌情報 |
en : International Symposium on Micro-NanoMechatronics and Human Science p. 1-5, 発行日 2006 |
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値 | application/pdf | |||||
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値 | publisher | |||||
URI | ||||||
識別子 | http://hdl.handle.net/2237/9554 | |||||
識別子タイプ | HDL |