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  1. B200 工学部/工学研究科
  2. B200a 雑誌掲載論文
  3. 学術雑誌

Development of Self-Vibration and -Detection AFM Probe by using Quartz Tuning Fork

http://hdl.handle.net/2237/9564
1cc44085-92ab-4f36-8a3d-86778ba7e310
名前 / ファイル ライセンス アクション
shik_10.pdf shik_10.pdf (388.8 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2008-03-04
タイトル
タイトル Development of Self-Vibration and -Detection AFM Probe by using Quartz Tuning Fork
著者 Hida, H.

× Hida, H.

WEKO 22391

Hida, H.

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Shikida, M.

× Shikida, M.

WEKO 22392

Shikida, M.

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Fukuzawa, K.

× Fukuzawa, K.

WEKO 22393

Fukuzawa, K.

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Ono, A.

× Ono, A.

WEKO 22394

Ono, A.

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Sato, K.

× Sato, K.

WEKO 22395

Sato, K.

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Asaumi, K.

× Asaumi, K.

WEKO 22396

Asaumi, K.

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Iriye, Y.

× Iriye, Y.

WEKO 22397

Iriye, Y.

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Muramatsu, T.

× Muramatsu, T.

WEKO 22398

Muramatsu, T.

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Horikawa, Y.

× Horikawa, Y.

WEKO 22399

Horikawa, Y.

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Sato, K.

× Sato, K.

WEKO 22400

Sato, K.

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権利
権利情報 Copyright © 2007 IEEE. Reprinted from (relevant publication info). This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of Nagoya University’s products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org.
キーワード
主題Scheme Other
主題 Atomic Force Microscopy (AFM)
キーワード
主題Scheme Other
主題 Quartz tuning-fork
キーワード
主題Scheme Other
主題 Piezoelectric
抄録
内容記述 We developed a novel type of quartz tuning-fork probe that vibrates and detects its own probe deformation, for application to atomic force microscopy (AFM). This tuning-fork probe improves the AFM image resolution because of its high Q (quality) factor value. The tuning-fork probe has a sharp tip that was fabricated using anisotropic wet etching and a focused ion beam system. We evaluated the vibration properties of the tuning-fork in both the in-phase and anti-phase driving mode, and measured a Q factor value of 2808 in the anti-phase mode. We also confirmed that the tuning-fork probe is able to measure a 100 nm-step on a silicon surface by self-vibration and self-detection, without using external vibration and optical-detection mechanisms.
内容記述タイプ Abstract
出版者
出版者 IEEE
言語
言語 eng
資源タイプ
資源タイプresource http://purl.org/coar/resource_type/c_6501
タイプ journal article
DOI
関連識別子
識別子タイプ DOI
関連識別子 http://dx.doi.org/10.1109/SENSOR.2007.4300437
ISBN
関連識別子
識別子タイプ ISBN
関連識別子 1-4244-0842-3
書誌情報 Solid-State Sensors, Actuators and Microsystems Conference

p. 1533-1536, 発行日 2007
フォーマット
application/pdf
著者版フラグ
値 publisher
URI
識別子 http://hdl.handle.net/2237/9564
識別子タイプ HDL
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