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Development of Self-Vibration and -Detection AFM Probe by using Quartz Tuning Fork
http://hdl.handle.net/2237/9564
http://hdl.handle.net/2237/95641cc44085-92ab-4f36-8a3d-86778ba7e310
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
shik_10.pdf (388.8 kB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2008-03-04 | |||||
| タイトル | ||||||
| タイトル | Development of Self-Vibration and -Detection AFM Probe by using Quartz Tuning Fork | |||||
| 言語 | en | |||||
| 著者 |
Hida, H.
× Hida, H.× Shikida, M.× Fukuzawa, K.× Ono, A.× Sato, K.× Asaumi, K.× Iriye, Y.× Muramatsu, T.× Horikawa, Y.× Sato, K. |
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| アクセス権 | ||||||
| アクセス権 | open access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
| 権利 | ||||||
| 言語 | en | |||||
| 権利情報 | Copyright © 2007 IEEE. Reprinted from (relevant publication info). This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of Nagoya University’s products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org. | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Atomic Force Microscopy (AFM) | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Quartz tuning-fork | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Piezoelectric | |||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | We developed a novel type of quartz tuning-fork probe that vibrates and detects its own probe deformation, for application to atomic force microscopy (AFM). This tuning-fork probe improves the AFM image resolution because of its high Q (quality) factor value. The tuning-fork probe has a sharp tip that was fabricated using anisotropic wet etching and a focused ion beam system. We evaluated the vibration properties of the tuning-fork in both the in-phase and anti-phase driving mode, and measured a Q factor value of 2808 in the anti-phase mode. We also confirmed that the tuning-fork probe is able to measure a 100 nm-step on a silicon surface by self-vibration and self-detection, without using external vibration and optical-detection mechanisms. | |||||
| 言語 | en | |||||
| 出版者 | ||||||
| 出版者 | IEEE | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| 出版タイプ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
| DOI | ||||||
| 関連タイプ | isVersionOf | |||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | https://doi.org/10.1109/SENSOR.2007.4300437 | |||||
| ISBN | ||||||
| 関連タイプ | isPartOf | |||||
| 識別子タイプ | ISBN | |||||
| 関連識別子 | 1-4244-0842-3 | |||||
| 書誌情報 |
en : Solid-State Sensors, Actuators and Microsystems Conference p. 1533-1536, 発行日 2007 |
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| フォーマット | ||||||
| 値 | application/pdf | |||||
| 著者版フラグ | ||||||
| 値 | publisher | |||||
| URI | ||||||
| 識別子 | http://hdl.handle.net/2237/9564 | |||||
| 識別子タイプ | HDL | |||||
