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  1. F200 未来材料・システム研究所
  2. F200a 雑誌掲載論文
  3. 学術雑誌

Diffractive imaging of the dumbbell structure in silicon by spherical-aberration-corrected electron diffraction

http://hdl.handle.net/2237/11975
e3fd707d-d9ba-4489-b576-565c250f365b
名前 / ファイル ライセンス アクション
ApplPhysLett_93_183103.pdf ApplPhysLett_93_183103.pdf (281.4 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2009-07-28
タイトル
タイトル Diffractive imaging of the dumbbell structure in silicon by spherical-aberration-corrected electron diffraction
著者 Morishita, Shigeyuki

× Morishita, Shigeyuki

WEKO 30615

Morishita, Shigeyuki

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Yamasaki, Jun

× Yamasaki, Jun

WEKO 30616

Yamasaki, Jun

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Nakamura, Keisuke

× Nakamura, Keisuke

WEKO 30617

Nakamura, Keisuke

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Kato, Takeharu

× Kato, Takeharu

WEKO 30618

Kato, Takeharu

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Tanaka, Nobuo

× Tanaka, Nobuo

WEKO 30619

Tanaka, Nobuo

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権利
権利情報 Copyright (2008) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.
抄録
内容記述 The dumbbell structure in crystalline silicon as known with the separation of 0.136 nm has been
reconstructed clearly by diffractive imaging using an electron beam. The spatial resolution in the result is estimated at about 0.1 nm. By utilizing the selected area diffraction technique in a spherical-aberration-corrected transmission electron microscope, one can reconstruct nanostructures with atomic resolution, even if they are not surrounded by empty space such as localized structures embedded in thin film samples. This means that the present method has a unique potential to expand the versatility of diffractive imaging by electron beams drastically.
内容記述タイプ Abstract
出版者
出版者 American Institite of Physics
言語
言語 eng
資源タイプ
資源タイプresource http://purl.org/coar/resource_type/c_6501
タイプ journal article
ISSN
収録物識別子タイプ ISSN
収録物識別子 0003-6951
書誌情報 APPLIED PHYSICS LETTERS

巻 93, p. 183103-183103, 発行日 2008-11-03
フォーマット
application/pdf
著者版フラグ
値 publisher
URI
識別子 http://dx.doi.org/10.1063/1.3003582
識別子タイプ DOI
URI
識別子 http://hdl.handle.net/2237/11975
識別子タイプ HDL
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