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Diffractive imaging of the dumbbell structure in silicon by spherical-aberration-corrected electron diffraction
http://hdl.handle.net/2237/11975
http://hdl.handle.net/2237/11975e3fd707d-d9ba-4489-b576-565c250f365b
名前 / ファイル | ライセンス | アクション |
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ApplPhysLett_93_183103.pdf (281.4 kB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2009-07-28 | |||||
タイトル | ||||||
タイトル | Diffractive imaging of the dumbbell structure in silicon by spherical-aberration-corrected electron diffraction | |||||
言語 | en | |||||
著者 |
Morishita, Shigeyuki
× Morishita, Shigeyuki× Yamasaki, Jun× Nakamura, Keisuke× Kato, Takeharu× Tanaka, Nobuo |
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アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
権利 | ||||||
言語 | en | |||||
権利情報 | Copyright (2008) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | The dumbbell structure in crystalline silicon as known with the separation of 0.136 nm has been reconstructed clearly by diffractive imaging using an electron beam. The spatial resolution in the result is estimated at about 0.1 nm. By utilizing the selected area diffraction technique in a spherical-aberration-corrected transmission electron microscope, one can reconstruct nanostructures with atomic resolution, even if they are not surrounded by empty space such as localized structures embedded in thin film samples. This means that the present method has a unique potential to expand the versatility of diffractive imaging by electron beams drastically. | |||||
言語 | en | |||||
出版者 | ||||||
出版者 | American Institite of Physics | |||||
言語 | en | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
出版タイプ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
DOI | ||||||
関連タイプ | isVersionOf | |||||
識別子タイプ | DOI | |||||
関連識別子 | https://doi.org/10.1063/1.3003582 | |||||
ISSN | ||||||
収録物識別子タイプ | PISSN | |||||
収録物識別子 | 0003-6951 | |||||
書誌情報 |
en : APPLIED PHYSICS LETTERS 巻 93, p. 183103-183103, 発行日 2008-11-03 |
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値 | application/pdf | |||||
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値 | publisher | |||||
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識別子 | http://dx.doi.org/10.1063/1.3003582 | |||||
識別子タイプ | DOI | |||||
URI | ||||||
識別子 | http://hdl.handle.net/2237/11975 | |||||
識別子タイプ | HDL |