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  1. F200 未来材料・システム研究所
  2. F200a 雑誌掲載論文
  3. 学術雑誌

Noncontact inspection technique for electrical failures in semiconductor devices using a laser terahertz emission microscope

http://hdl.handle.net/2237/11979
http://hdl.handle.net/2237/11979
4bcc6808-d909-4c2a-baf1-2b8102c20318
名前 / ファイル ライセンス アクション
ApplPhysLett_93_041117.pdf ApplPhysLett_93_041117.pdf (401.9 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2009-07-28
タイトル
タイトル Noncontact inspection technique for electrical failures in semiconductor devices using a laser terahertz emission microscope
言語 en
著者 Yamashita, Masatsugu

× Yamashita, Masatsugu

WEKO 30640

en Yamashita, Masatsugu

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Otani, Chiko

× Otani, Chiko

WEKO 30641

en Otani, Chiko

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Kawase, Kodo

× Kawase, Kodo

WEKO 30642

en Kawase, Kodo

Search repository
Nikawa, Kiyoshi

× Nikawa, Kiyoshi

WEKO 30643

en Nikawa, Kiyoshi

Search repository
Tonouchi, Masayoshi

× Tonouchi, Masayoshi

WEKO 30644

en Tonouchi, Masayoshi

Search repository
アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
権利
言語 en
権利情報 Copyright (2008) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.
抄録
内容記述 We have proposed and demonstrated a novel technique for the noncontact inspection of electrical failures in semiconductor devices using a laser terahertz emission microscope. It was found that the waveforms of the terahertz pulses, emitted by exciting p-n junctions in semiconductor circuits with focused ultrafast laser pulses, depend on the interconnection structures of the circuits. We successfully distinguished damaged silicon metal-oxide-semiconductor field effect transistor circuits with disconnected wires from normal ones by comparing the images of terahertz emission amplitudes between a normal chip and a defective one.
言語 en
内容記述タイプ Abstract
出版者
言語 en
出版者 American Institite of Physics
言語
言語 eng
資源タイプ
資源タイプresource http://purl.org/coar/resource_type/c_6501
タイプ journal article
出版タイプ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
DOI
関連タイプ isVersionOf
識別子タイプ DOI
関連識別子 https://doi.org/10.1063/1.2965810
ISSN
収録物識別子タイプ PISSN
収録物識別子 0003-6951
書誌情報 en : APPLIED PHYSICS LETTERS

巻 93, p. 041117-041117, 発行日 2008-07-31
フォーマット
application/pdf
著者版フラグ
値 publisher
URI
識別子 http://dx.doi.org/10.1063/1.2965810
識別子タイプ DOI
URI
識別子 http://hdl.handle.net/2237/11979
識別子タイプ HDL
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