{"_buckets": {"deposit": "ec85d6e3-9ba2-4193-9b52-4b3aa69abf62"}, "_deposit": {"id": "10161", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "10161"}, "status": "published"}, "_oai": {"id": "oai:nagoya.repo.nii.ac.jp:00010161", "sets": ["675"]}, "author_link": ["30640", "30641", "30642", "30643", "30644"], "item_10_biblio_info_6": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2008-07-31", "bibliographicIssueDateType": "Issued"}, "bibliographicPageEnd": "041117", "bibliographicPageStart": "041117", "bibliographicVolumeNumber": "93", "bibliographic_titles": [{"bibliographic_title": "APPLIED PHYSICS LETTERS", "bibliographic_titleLang": "en"}]}]}, "item_10_description_4": {"attribute_name": "抄録", "attribute_value_mlt": [{"subitem_description": "We have proposed and demonstrated a novel technique for the noncontact inspection of electrical failures in semiconductor devices using a laser terahertz emission microscope. It was found that the waveforms of the terahertz pulses, emitted by exciting p-n junctions in semiconductor circuits with focused ultrafast laser pulses, depend on the interconnection structures of the circuits. We successfully distinguished damaged silicon metal-oxide-semiconductor field effect transistor circuits with disconnected wires from normal ones by comparing the images of terahertz emission amplitudes between a normal chip and a defective one.", "subitem_description_language": "en", "subitem_description_type": "Abstract"}]}, "item_10_identifier_60": {"attribute_name": "URI", "attribute_value_mlt": [{"subitem_identifier_type": "DOI", "subitem_identifier_uri": "http://dx.doi.org/10.1063/1.2965810"}, {"subitem_identifier_type": "HDL", "subitem_identifier_uri": "http://hdl.handle.net/2237/11979"}]}, "item_10_publisher_32": {"attribute_name": "出版者", "attribute_value_mlt": [{"subitem_publisher": "American Institite of Physics", "subitem_publisher_language": "en"}]}, "item_10_relation_11": {"attribute_name": "DOI", "attribute_value_mlt": [{"subitem_relation_type": "isVersionOf", "subitem_relation_type_id": {"subitem_relation_type_id_text": "https://doi.org/10.1063/1.2965810", "subitem_relation_type_select": "DOI"}}]}, "item_10_rights_12": {"attribute_name": "権利", "attribute_value_mlt": [{"subitem_rights": "Copyright (2008) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.", "subitem_rights_language": "en"}]}, "item_10_select_15": {"attribute_name": "著者版フラグ", "attribute_value_mlt": [{"subitem_select_item": "publisher"}]}, "item_10_source_id_7": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "0003-6951", "subitem_source_identifier_type": "PISSN"}]}, "item_10_text_14": {"attribute_name": "フォーマット", "attribute_value_mlt": [{"subitem_text_value": "application/pdf"}]}, "item_1615787544753": {"attribute_name": "出版タイプ", "attribute_value_mlt": [{"subitem_version_resource": "http://purl.org/coar/version/c_970fb48d4fbd8a85", "subitem_version_type": "VoR"}]}, "item_access_right": {"attribute_name": "アクセス権", "attribute_value_mlt": [{"subitem_access_right": "open access", "subitem_access_right_uri": "http://purl.org/coar/access_right/c_abf2"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "Yamashita, Masatsugu", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "30640", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Otani, Chiko", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "30641", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Kawase, Kodo", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "30642", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Nikawa, Kiyoshi", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "30643", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Tonouchi, Masayoshi", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "30644", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2018-02-20"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "ApplPhysLett_93_041117.pdf", "filesize": [{"value": "401.9 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_note", "mimetype": "application/pdf", "size": 401900.0, "url": {"label": "ApplPhysLett_93_041117.pdf", "objectType": "fulltext", "url": "https://nagoya.repo.nii.ac.jp/record/10161/files/ApplPhysLett_93_041117.pdf"}, "version_id": "2fa4cd33-f926-4488-811a-e5d66b95a058"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "journal article", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "Noncontact inspection technique for electrical failures in semiconductor devices using a laser terahertz emission microscope", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "Noncontact inspection technique for electrical failures in semiconductor devices using a laser terahertz emission microscope", "subitem_title_language": "en"}]}, "item_type_id": "10", "owner": "1", "path": ["675"], "permalink_uri": "http://hdl.handle.net/2237/11979", "pubdate": {"attribute_name": "PubDate", "attribute_value": "2009-07-28"}, "publish_date": "2009-07-28", "publish_status": "0", "recid": "10161", "relation": {}, "relation_version_is_last": true, "title": ["Noncontact inspection technique for electrical failures in semiconductor devices using a laser terahertz emission microscope"], "weko_shared_id": -1}