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  1. B200 工学部/工学研究科
  2. B200a 雑誌掲載論文
  3. 学術雑誌

Wet etched complex three dimensional MEMS structures

http://hdl.handle.net/2237/13914
http://hdl.handle.net/2237/13914
138471ee-0570-47b3-8ab9-9d4a09edcc22
名前 / ファイル ライセンス アクション
09_MHS_Prem.pdf 09_MHS_Prem.pdf (793.1 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2010-08-02
タイトル
タイトル Wet etched complex three dimensional MEMS structures
言語 en
著者 Pal, Prem

× Pal, Prem

WEKO 38175

en Pal, Prem

Search repository
Sato, Kazuo

× Sato, Kazuo

WEKO 38176

en Sato, Kazuo

Search repository
アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
権利
言語 en
権利情報 ©2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
抄録
内容記述 The present research reports the fabrication techniques for the formation of complex three dimensional structures. The process is developed using very economic wet anisotropic etching in pure and surfactant Triton X-100 [C14H22O(C2H4O)n, n= 9-10] added 25 wt% tetramethyl ammonium hydroxide (TMAH) solutions. The structures are fabricated in single and nitride-based silicon on insulator (SOI) Si{100} wafers. In single wafer, both fixed and suspended structures are manufactured, while in SOI wafers only freestanding structures are realized. The present research is aimed to enhance the range of 3D structures fabricated using wet etching.
言語 en
内容記述タイプ Abstract
出版者
言語 en
出版者 IEEE
言語
言語 eng
資源タイプ
資源タイプresource http://purl.org/coar/resource_type/c_6501
タイプ journal article
出版タイプ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
DOI
関連タイプ isVersionOf
識別子タイプ DOI
関連識別子 https://doi.org/10.1109/MHS.2009.5351788
ISBN
関連タイプ isPartOf
識別子タイプ ISBN
関連識別子 978-1-4244-5094-7
書誌情報 en : International Symposium on Micro-NanoMechatronics and Human Science (MHS 2009)

p. 553-558, 発行日 2009-11-09
フォーマット
application/pdf
著者版フラグ
値 publisher
URI
識別子 http://hdl.handle.net/2237/13914
識別子タイプ HDL
URI
識別子 http://dx.doi.org/10.1109/MHS.2009.5351788
識別子タイプ DOI
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