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Wet etched complex three dimensional MEMS structures
http://hdl.handle.net/2237/13914
http://hdl.handle.net/2237/13914138471ee-0570-47b3-8ab9-9d4a09edcc22
名前 / ファイル | ライセンス | アクション |
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09_MHS_Prem.pdf (793.1 kB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2010-08-02 | |||||
タイトル | ||||||
タイトル | Wet etched complex three dimensional MEMS structures | |||||
言語 | en | |||||
著者 |
Pal, Prem
× Pal, Prem× Sato, Kazuo |
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アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
権利 | ||||||
言語 | en | |||||
権利情報 | ©2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. | |||||
抄録 | ||||||
内容記述 | The present research reports the fabrication techniques for the formation of complex three dimensional structures. The process is developed using very economic wet anisotropic etching in pure and surfactant Triton X-100 [C14H22O(C2H4O)n, n= 9-10] added 25 wt% tetramethyl ammonium hydroxide (TMAH) solutions. The structures are fabricated in single and nitride-based silicon on insulator (SOI) Si{100} wafers. In single wafer, both fixed and suspended structures are manufactured, while in SOI wafers only freestanding structures are realized. The present research is aimed to enhance the range of 3D structures fabricated using wet etching. | |||||
言語 | en | |||||
内容記述タイプ | Abstract | |||||
出版者 | ||||||
言語 | en | |||||
出版者 | IEEE | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプresource | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
出版タイプ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
DOI | ||||||
関連タイプ | isVersionOf | |||||
識別子タイプ | DOI | |||||
関連識別子 | https://doi.org/10.1109/MHS.2009.5351788 | |||||
ISBN | ||||||
関連タイプ | isPartOf | |||||
識別子タイプ | ISBN | |||||
関連識別子 | 978-1-4244-5094-7 | |||||
書誌情報 |
en : International Symposium on Micro-NanoMechatronics and Human Science (MHS 2009) p. 553-558, 発行日 2009-11-09 |
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フォーマット | ||||||
application/pdf | ||||||
著者版フラグ | ||||||
値 | publisher | |||||
URI | ||||||
識別子 | http://hdl.handle.net/2237/13914 | |||||
識別子タイプ | HDL | |||||
URI | ||||||
識別子 | http://dx.doi.org/10.1109/MHS.2009.5351788 | |||||
識別子タイプ | DOI |