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Micromachined tube-type of Si droplet generator
http://hdl.handle.net/2237/13968
http://hdl.handle.net/2237/1396830ddc7d5-a6a9-477b-87bc-4e6acef946f5
名前 / ファイル | ライセンス | アクション |
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2010-08-04 | |||||
タイトル | ||||||
タイトル | Micromachined tube-type of Si droplet generator | |||||
言語 | en | |||||
著者 |
Hida, H.
× Hida, H.× Inagaki, N.× Koyama, M.× Shikida, M.× Sato, K. |
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アクセス権 | ||||||
アクセス権 | open access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
権利 | ||||||
言語 | en | |||||
権利情報 | ©2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | D-RIE process | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Droplet | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Reynolds number | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | SOI | |||||
抄録 | ||||||
内容記述 | We developed the novel type of droplet generator for the bio-chemical reactions, and designed it by considering Reynolds and Weber numbers. The Si droplet generator was fabricated on a silicon-on-insulator wafer by using deep-reactive ion etching and was fixed in a piece of heat-shrinkable tubing by heating the tubing. We experimentally confirmed that the fabricated droplet generator formed droplets in 1 mm diameter with jetting. | |||||
言語 | en | |||||
内容記述タイプ | Abstract | |||||
出版者 | ||||||
言語 | en | |||||
出版者 | IEEE | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプresource | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | journal article | |||||
出版タイプ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
DOI | ||||||
関連タイプ | isVersionOf | |||||
識別子タイプ | DOI | |||||
関連識別子 | https://doi.org/10.1109/SENSOR.2009.5285483 | |||||
ISBN | ||||||
関連タイプ | isPartOf | |||||
識別子タイプ | ISBN | |||||
関連識別子 | 978-1-4244-4193-8 | |||||
書誌情報 |
en : International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2009) p. 386-389, 発行日 2009-06-21 |
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フォーマット | ||||||
application/pdf | ||||||
著者版フラグ | ||||||
値 | publisher | |||||
URI | ||||||
識別子 | http://hdl.handle.net/2237/13968 | |||||
識別子タイプ | HDL | |||||
URI | ||||||
識別子 | http://dx.doi.org/10.1109/SENSOR.2009.5285483 | |||||
識別子タイプ | DOI |