{"_buckets": {"deposit": "68e5311c-618d-4c11-a779-98c428ae9c3d"}, "_deposit": {"id": "18018", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "18018"}, "status": "published"}, "_oai": {"id": "oai:nagoya.repo.nii.ac.jp:00018018"}, "item_12_alternative_title_19": {"attribute_name": "\u305d\u306e\u4ed6\u306e\u8a00\u8a9e\u306e\u30bf\u30a4\u30c8\u30eb", "attribute_value_mlt": [{"subitem_alternative_title": "\u30ca\u30ce\u30e1\u30fc\u30bf\u7cbe\u5ea6\u52a0\u5de5\u306b\u5411\u3051\u305f\u81ea\u5f8b\u5236\u5fa1\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u30d7\u30ed\u30bb\u30b9\u306b\u95a2\u3059\u308b\u7814\u7a76"}]}, "item_12_biblio_info_6": {"attribute_name": "\u66f8\u8a8c\u60c5\u5831", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2014-02-25", "bibliographicIssueDateType": "Issued"}, "bibliographic_titles": [{}]}]}, "item_12_date_granted_64": {"attribute_name": "\u5b66\u4f4d\u6388\u4e0e\u5e74\u6708\u65e5", "attribute_value_mlt": [{"subitem_dategranted": "2014-02-25"}]}, "item_12_degree_grantor_62": {"attribute_name": "\u5b66\u4f4d\u6388\u4e0e\u6a5f\u95a2", "attribute_value_mlt": [{"subitem_degreegrantor": [{"subitem_degreegrantor_name": "\u540d\u53e4\u5c4b\u5927\u5b66"}]}]}, "item_12_degree_name_61": {"attribute_name": "\u5b66\u4f4d\u540d", "attribute_value_mlt": [{"subitem_degreename": "\u535a\u58eb(\u5de5\u5b66)"}]}, "item_12_dissertation_number_65": {"attribute_name": "\u5b66\u4f4d\u6388\u4e0e\u756a\u53f7", "attribute_value_mlt": [{"subitem_dissertationnumber": "13901\u7532\u7b2c10598\u53f7"}]}, "item_12_identifier_60": {"attribute_name": "URI", "attribute_value_mlt": [{"subitem_identifier_type": "HDL", "subitem_identifier_uri": "http://hdl.handle.net/2237/20278"}]}, "item_12_select_15": {"attribute_name": "\u8457\u8005\u7248\u30d5\u30e9\u30b0", "attribute_value_mlt": [{"subitem_select_item": "ETD"}]}, "item_12_text_63": {"attribute_name": "\u5b66\u4f4d\u6388\u4e0e\u5e74\u5ea6", "attribute_value_mlt": [{"subitem_text_value": "2013"}]}, "item_creator": {"attribute_name": "\u8457\u8005", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "SUZUKI, Toshiya"}], "nameIdentifiers": [{"nameIdentifier": "52511", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "\u9234\u6728, \u4fca\u54c9"}], "nameIdentifiers": [{"nameIdentifier": "52512", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "\u30d5\u30a1\u30a4\u30eb\u60c5\u5831", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2018-02-21"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "k10598_abstract.pdf", "filesize": [{"value": "306.6 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 306600.0, "url": {"label": "k10598_abstract.pdf ", "url": "https://nagoya.repo.nii.ac.jp/record/18018/files/k10598_abstract.pdf"}, "version_id": "60850cbf-9862-446d-8276-79344f18e691"}, {"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2018-02-21"}], "displaytype": "detail", "download_preview_message": "", "file_order": 1, "filename": "k10598_thesis.pdf", "filesize": [{"value": "14.9 MB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 14900000.0, "url": {"label": "k10598_thesis.pdf ", "url": "https://nagoya.repo.nii.ac.jp/record/18018/files/k10598_thesis.pdf"}, "version_id": "9188e57a-2fbd-4907-b40a-347324ae2239"}, {"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2018-02-21"}], "displaytype": "detail", "download_preview_message": "", "file_order": 2, "filename": "k10598_review.pdf", "filesize": [{"value": "120.3 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 120300.0, "url": {"label": "k10598_review.pdf ", "url": "https://nagoya.repo.nii.ac.jp/record/18018/files/k10598_review.pdf"}, "version_id": "2c12a0c9-c09b-4476-8ecb-550d79d0e724"}]}, "item_language": {"attribute_name": "\u8a00\u8a9e", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "\u8cc7\u6e90\u30bf\u30a4\u30d7", "attribute_value_mlt": [{"resourcetype": "thesis", "resourceuri": "http://purl.org/coar/resource_type/c_46ec"}]}, "item_title": "Studies on Plasma Etching Process Based on Autonomous Control for Nano-meter Fabrication", "item_titles": {"attribute_name": "\u30bf\u30a4\u30c8\u30eb", "attribute_value_mlt": [{"subitem_title": "Studies on Plasma Etching Process Based on Autonomous Control for Nano-meter Fabrication"}]}, "item_type_id": "12", "owner": "1", "path": ["320/606/607"], "permalink_uri": "http://hdl.handle.net/2237/20278", "pubdate": {"attribute_name": "\u516c\u958b\u65e5", "attribute_name_i18n": "\u516c\u958b\u65e5", "attribute_value": "2014-06-13"}, "publish_date": "2014-06-13", "publish_status": "0", "recid": "18018", "relation": {}, "relation_version_is_last": true, "title": ["Studies on Plasma Etching Process Based on Autonomous Control for Nano-meter Fabrication"], "weko_shared_id": null}