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  1. B200 工学部/工学研究科
  2. B200d 学位論文
  3. 博士論文(工博・論工博)

Studies on Plasma Etching Process Based on Autonomous Control for Nano-meter Fabrication

http://hdl.handle.net/2237/20278
5af48a71-becf-40e5-8a0a-b9ba57776e53
名前 / ファイル ライセンス アクション
k10598_abstract.pdf k10598_abstract.pdf (306.6 kB)
k10598_thesis.pdf k10598_thesis.pdf (14.9 MB)
k10598_review.pdf k10598_review.pdf (120.3 kB)
Item type 学位論文 / Thesis or Dissertation(1)
公開日 2014-06-13
タイトル
タイトル Studies on Plasma Etching Process Based on Autonomous Control for Nano-meter Fabrication
その他のタイトル
その他のタイトル ナノメータ精度加工に向けた自律制御プラズマエッチングプロセスに関する研究
著者 SUZUKI, Toshiya

× SUZUKI, Toshiya

WEKO 52511

SUZUKI, Toshiya

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鈴木, 俊哉

× 鈴木, 俊哉

WEKO 52512

鈴木, 俊哉

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言語
言語 eng
資源タイプ
資源 http://purl.org/coar/resource_type/c_46ec
タイプ thesis
書誌情報 発行日 2014-02-25
学位名
学位名 博士(工学)
学位授与機関
学位授与機関名
学位授与機関名 名古屋大学
学位授与年度
学位授与年度 2013
学位授与年月日
学位授与年月日 2014-02-25
学位授与番号
学位授与番号 13901甲第10598号
著者版フラグ
値 ETD
URI
識別子 http://hdl.handle.net/2237/20278
識別子タイプ HDL
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