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  1. B200 工学部/工学研究科
  2. B200a 雑誌掲載論文
  3. 学術雑誌

Application of Bayesian optimization for high-performance TiOx /SiOy /c-Si passivating contact

http://hdl.handle.net/2237/0002002180
http://hdl.handle.net/2237/0002002180
849ede83-bd5c-4aa0-a72f-d002cfed3480
名前 / ファイル ライセンス アクション
Clean_version_of_revisedMS.pdf Clean_version_of_revisedMS.pdf (1.2 MB)
 Download is available from 2023/9/14.
Item type itemtype_ver1(1)
公開日 2022-03-09
タイトル
タイトル Application of Bayesian optimization for high-performance TiOx /SiOy /c-Si passivating contact
言語 en
著者 Miyagawa, Shinsuke

× Miyagawa, Shinsuke

en Miyagawa, Shinsuke

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Gotoh, Kazuhiro

× Gotoh, Kazuhiro

en Gotoh, Kazuhiro

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Kutsukake, Kentaro

× Kutsukake, Kentaro

en Kutsukake, Kentaro

Search repository
Kurokawa, Yasuyoshi

× Kurokawa, Yasuyoshi

en Kurokawa, Yasuyoshi

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Usami, Noritaka

× Usami, Noritaka

en Usami, Noritaka

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アクセス権
アクセス権 embargoed access
アクセス権URI http://purl.org/coar/access_right/c_f1cf
権利
言語 en
権利情報 © 2021. This manuscript version is made available under the CC-BY-NC-ND 4.0 license http://creativecommons.org/licenses/by-nc-nd/4.0/
内容記述
内容記述 We report on the application of Bayesian optimization (BO), which could accelerate the time-intensive process optimization of many parameters, to fabrication of the high-performance titanium oxide/silicon oxide/crystalline silicon passivating contact. The process contains pre-deposition treatment to form SiOy interlayer, atomic layer deposition (ALD) of TiOx, and hydrogen plasma treatment (HPT) as post-process. We attempted to optimize seven parameters for ALD and HPT by dealing with samples treated by three kinds of chemical solutions in the same batch. This permits to perform BO for each structure at the same time and determine the superior pre-deposition treatment. Consequently, carrier selectivity S10 estimated by independent measurements of the saturation current density and contact resistance was significantly improved by BO of only 12 cycles and 10 initial random experiments. These results certify that BO could efficiently provide experimental conditions in multidimensional parameter space although we need to consider the impact of the metallization process on the passivation performance.
言語 en
内容記述タイプ Abstract
出版者
言語 en
出版者 Elsevier
言語
言語 eng
資源タイプ
資源タイプresource http://purl.org/coar/resource_type/c_6501
タイプ journal article
出版タイプ
出版タイプ AM
出版タイプResource http://purl.org/coar/version/c_ab4af688f83e57aa
関連情報
関連タイプ isVersionOf
識別子タイプ DOI
関連識別子 https://doi.org/10.1016/j.solmat.2021.111251
収録物識別子
収録物識別子タイプ PISSN
収録物識別子 0927-0248
書誌情報 en : Solar Energy Materials and Solar Cells

巻 230, p. 111251, 発行日 2021-09-15
ファイル公開日
日付 2023-09-15
日付タイプ Available
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