Item type |
itemtype_ver1(1) |
公開日 |
2022-03-09 |
タイトル |
|
|
タイトル |
Application of Bayesian optimization for high-performance TiOx /SiOy /c-Si passivating contact |
|
言語 |
en |
著者 |
Miyagawa, Shinsuke
Gotoh, Kazuhiro
Kutsukake, Kentaro
Kurokawa, Yasuyoshi
Usami, Noritaka
|
アクセス権 |
|
|
アクセス権 |
open access |
|
アクセス権URI |
http://purl.org/coar/access_right/c_abf2 |
権利 |
|
|
言語 |
en |
|
権利情報 |
© 2021. This manuscript version is made available under the CC-BY-NC-ND 4.0 license http://creativecommons.org/licenses/by-nc-nd/4.0/ |
内容記述 |
|
|
内容記述 |
We report on the application of Bayesian optimization (BO), which could accelerate the time-intensive process optimization of many parameters, to fabrication of the high-performance titanium oxide/silicon oxide/crystalline silicon passivating contact. The process contains pre-deposition treatment to form SiOy interlayer, atomic layer deposition (ALD) of TiOx, and hydrogen plasma treatment (HPT) as post-process. We attempted to optimize seven parameters for ALD and HPT by dealing with samples treated by three kinds of chemical solutions in the same batch. This permits to perform BO for each structure at the same time and determine the superior pre-deposition treatment. Consequently, carrier selectivity S10 estimated by independent measurements of the saturation current density and contact resistance was significantly improved by BO of only 12 cycles and 10 initial random experiments. These results certify that BO could efficiently provide experimental conditions in multidimensional parameter space although we need to consider the impact of the metallization process on the passivation performance. |
|
言語 |
en |
|
内容記述タイプ |
Abstract |
出版者 |
|
|
言語 |
en |
|
出版者 |
Elsevier |
言語 |
|
|
言語 |
eng |
資源タイプ |
|
|
資源タイプresource |
http://purl.org/coar/resource_type/c_6501 |
|
タイプ |
journal article |
出版タイプ |
|
|
出版タイプ |
AM |
|
出版タイプResource |
http://purl.org/coar/version/c_ab4af688f83e57aa |
関連情報 |
|
|
関連タイプ |
isVersionOf |
|
|
識別子タイプ |
DOI |
|
|
関連識別子 |
https://doi.org/10.1016/j.solmat.2021.111251 |
収録物識別子 |
|
|
収録物識別子タイプ |
PISSN |
|
収録物識別子 |
0927-0248 |
書誌情報 |
en : Solar Energy Materials and Solar Cells
巻 230,
p. 111251,
発行日 2021-09-15
|
ファイル公開日 |
|
|
日付 |
2023-09-15 |
|
日付タイプ |
Available |