ログイン
言語:

WEKO3

  • トップ
  • コミュニティ
  • ランキング
AND
To
lat lon distance
To

Field does not validate



インデックスリンク

インデックスツリー

メールアドレスを入力してください。

WEKO

One fine body…

WEKO

One fine body…

アイテム

{"_buckets": {"deposit": "fa281c25-75e8-4d89-b58f-d7f4f917c838"}, "_deposit": {"id": "21467", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "21467"}, "status": "published"}, "_oai": {"id": "oai:nagoya.repo.nii.ac.jp:00021467"}, "item_10_alternative_title_19": {"attribute_name": "\u305d\u306e\u4ed6\u306e\u8a00\u8a9e\u306e\u30bf\u30a4\u30c8\u30eb", "attribute_value_mlt": [{"subitem_alternative_title": "High Density Formation of CoPt Alloy Nanodots Induced by Remote Hydrogen Plasma and Charging and Magnetizing Characteristics"}]}, "item_10_biblio_info_6": {"attribute_name": "\u66f8\u8a8c\u60c5\u5831", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2013-06-11", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "87", "bibliographicPageEnd": "50", "bibliographicPageStart": "47", "bibliographicVolumeNumber": "113", "bibliographic_titles": [{"bibliographic_title": "\u96fb\u5b50\u60c5\u5831\u901a\u4fe1\u5b66\u4f1a\u6280\u8853\u7814\u7a76\u5831\u544a. SDM, \u30b7\u30ea\u30b3\u30f3\u6750\u6599\u30fb\u30c7\u30d0\u30a4\u30b9"}]}]}, "item_10_description_4": {"attribute_name": "\u6284\u9332", "attribute_value_mlt": [{"subitem_description": "Co\u3068Pt\u306e\u5408\u91d1\u5316\u306b\u3088\u308a\u9ad8\u3044\u4e00\u8ef8\u78c1\u6c17\u7570\u65b9\u6027\u3092\u793a\u3059CoPt\u5408\u91d1\u306b\u7740\u76ee\u3057\u3001Co\u6975\u8584\u819c\u4e0a\u306b\u5f62\u6210\u3057\u305f\u6975\u8584Pt\u819c\u306b\u30ea\u30e2\u30fc\u30c8\u6c34\u7d20\u30d7\u30e9\u30ba\u30de\u51e6\u7406\u3092\u65bd\u3059\u3053\u3068\u3067\u3001\u5408\u91d1\u30c9\u30c3\u30c8\u306e\u5f62\u6210\u3092\u8a66\u307f\u305f\u3002\u3055\u3089\u306b\u306f\u3001\u5f62\u6210\u3057\u305f\u30ca\u30ce\u30c9\u30c3\u30c8\u306e\u5e2f\u96fb\u304a\u3088\u3073\u5e2f\u78c1\u7279\u6027\u3092\u8d70\u67fb\u30d7\u30ed\u30fc\u30d6\u9855\u5fae\u93e1\u306b\u3088\u308a\u8a55\u4fa1\u3057\u305f\u3002\u30d7\u30e9\u30ba\u30de\u51e6\u7406\u524d\u5f8c\u306e\u8868\u9762\u5f62\u72b6\u5909\u5316\u304b\u3089\u3001\u6975\u8584Pt/Co\u7a4d\u5c64\u819c\u3078\u306e\u30ea\u30e2\u30fc\u30c8\u6c34\u7d20\u30d7\u30e9\u30ba\u30de\u7167\u5c04\u306b\u3088\u3063\u3066\u3001\u9ad8\u5bc6\u5ea6\u30ca\u30ce\u30c9\u30c3\u30c8\u306e\u9ad8\u5bc6\u5ea6\u4e00\u62ec\u5f62\u6210\u304c\u8a8d\u3081\u3089\u308c\u3001\u5f62\u6210\u3057\u305f\u30ca\u30ce\u30c9\u30c3\u30c8\u306e\u5149\u96fb\u5b50\u30b9\u30da\u30af\u30c8\u30eb\u306b\u304a\u3051\u308b\u4f4e\u904b\u52d5\u30a8\u30cd\u30eb\u30ae\u4fe1\u53f7\u306e\u3057\u304d\u3044\u5024\u30a8\u30cd\u30eb\u30ae\u304b\u3089\u4ed5\u4e8b\u95a2\u6570\u3092\u8a55\u4fa1\u3057\u305f\u7d50\u679c\u3001CoPt\u5408\u91d1\u30ca\u30ce\u30c9\u30c3\u30c8\u306e\u5f62\u6210\u304c\u8a8d\u3081\u3089\u308c\u305f\u3002\u3055\u3089\u306b\u306f\u3001\u5c0e\u96fb\u6027AFM\u63a2\u91dd\u3092\u7528\u3044\u305f\u5e2f\u96fb\u7279\u6027\u8a55\u4fa1\u306b\u304a\u3044\u3066\u3001\u63a2\u91dd\u96fb\u5727-2.0V\u5370\u52a0\u3057\u305f\u5f8c\u3001\u96fb\u5b50\u6ce8\u5165\u30fb\u4fdd\u6301\u306b\u8d77\u56e0\u3057\u305f\u8868\u9762\u96fb\u4f4d\u5909\u5316-30mV\u306e\u8ca0\u5e2f\u96fb\u304c\u8a8d\u3081\u3089\u308c\u308b\u3053\u3068\u304b\u3089\u3001\u5f62\u6210\u3057\u305f\u5408\u91d1\u30ca\u30ce\u30c9\u30c3\u30c8\u306f\u7d76\u7e01\u5206\u96e2\u3057\u3066\u304a\u308a\u96fb\u8377\u4fdd\u6301\u30ce\u30fc\u30c9\u3068\u3057\u3066\u6a5f\u80fd\u3059\u308b\u3068\u3068\u3082\u306b\u3001CoPtCr\u30b3\u30fc\u30c8Si\u63a2\u91dd\u3092\u7528\u3044\u3066\u975e\u63a5\u89e6\u6e2c\u5b9a\u3057\u305fMFM\u50cf\u306b\u304a\u3044\u3066\u3001\u63a2\u91dd-\u30ca\u30ce\u30c9\u30c3\u30c8\u306e\u78c1\u6c17\u7684\u4f5c\u7528\u3092\u53cd\u6620\u3057\u305f\u660e\u77ad\u306a\u30b3\u30f3\u30c8\u30e9\u30b9\u30c8\u304c\u8a8d\u3081\u3089\u308c\u308b\u3053\u3068\u304b\u3089\u30b9\u30d4\u30f3\u4fdd\u6301\u30ce\u30fc\u30c9\u3068\u3057\u3066\u3082\u6a5f\u80fd\u3059\u308b\u3053\u3068\u3092\u660e\u3089\u304b\u306b\u3057\u305f\u3002CoPt-alloy NDs with an areal density as high as \u301c10^\u003c12\u003e cm^\u003c-2\u003e and over on thermally-grown SiO_2 were successfully fabricated by remote H_2 plasma exposure to ultrathin Pt/Co bi-layer stack, which was confirmed after examining the surface morphology by AFM and measuring photoemission spectra. After scanning the CoPt-alloy NDs with a AFM tip biased at -2.0 V with respect to the substrate, a distinct decrease in the surface potential (-30 mV) in the corresponding area owing to electron charging to the dots was detected, which indicates that NDs were electrically isolated from each other. In the MFM image taken in the noncontact tapping mode with a distance of \u301c10 nm between the tip and the sample surface, a clear contrast was obtained with a good correlation to the NDs indicating the presence of perpendicular magnetic anisotropy of the CoPt-alloy NDs. These results imply that CoPt-alloy NDs can be active elements for both spin and charge storage.", "subitem_description_type": "Abstract"}]}, "item_10_identifier_60": {"attribute_name": "URI", "attribute_value_mlt": [{"subitem_identifier_type": "URI", "subitem_identifier_uri": "http://ci.nii.ac.jp/naid/110009779101/"}, {"subitem_identifier_type": "HDL", "subitem_identifier_uri": "http://hdl.handle.net/2237/23596"}]}, "item_10_publisher_32": {"attribute_name": "\u51fa\u7248\u8005", "attribute_value_mlt": [{"subitem_publisher": "\u4e00\u822c\u793e\u56e3\u6cd5\u4eba\u96fb\u5b50\u60c5\u5831\u901a\u4fe1\u5b66\u4f1a"}]}, "item_10_rights_12": {"attribute_name": "\u6a29\u5229", "attribute_value_mlt": [{"subitem_rights": "(c)\u4e00\u822c\u793e\u56e3\u6cd5\u4eba\u96fb\u5b50\u60c5\u5831\u901a\u4fe1\u5b66\u4f1a \u672c\u6587\u30c7\u30fc\u30bf\u306f\u5b66\u5354\u4f1a\u306e\u8a31\u8afe\u306b\u57fa\u3065\u304dCiNii\u304b\u3089\u8907\u88fd\u3057\u305f\u3082\u306e\u3067\u3042\u308b"}]}, "item_10_select_15": {"attribute_name": "\u8457\u8005\u7248\u30d5\u30e9\u30b0", "attribute_value_mlt": [{"subitem_select_item": "publisher"}]}, "item_10_source_id_7": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "0913-5685", "subitem_source_identifier_type": "ISSN"}]}, "item_creator": {"attribute_name": "\u8457\u8005", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "\u7267\u539f, \u514b\u5178"}], "nameIdentifiers": [{"nameIdentifier": "62424", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "\u798f\u5ca1, \u8ad2"}], "nameIdentifiers": [{"nameIdentifier": "62425", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "\u5f35, \u6d77"}], "nameIdentifiers": [{"nameIdentifier": "62426", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "\u58c1\u8c37, \u60a0\u5e0c"}], "nameIdentifiers": [{"nameIdentifier": "62427", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "\u5927\u7530, \u6643\u751f"}], "nameIdentifiers": [{"nameIdentifier": "62428", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "\u5bae\u5d0e, \u8aa0\u4e00"}], "nameIdentifiers": [{"nameIdentifier": "62429", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Makihara, Katsunori"}], "nameIdentifiers": [{"nameIdentifier": "62430", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Fukuoka, Ryo"}], "nameIdentifiers": [{"nameIdentifier": "62431", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Zhang, Hai"}], "nameIdentifiers": [{"nameIdentifier": "62432", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Kabeya, Yuuki"}], "nameIdentifiers": [{"nameIdentifier": "62433", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Ohta, Akio"}], "nameIdentifiers": [{"nameIdentifier": "62434", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Miyazaki, Seiichi"}], "nameIdentifiers": [{"nameIdentifier": "62435", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "\u30d5\u30a1\u30a4\u30eb\u60c5\u5831", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2018-02-21"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "110009779101.pdf", "filesize": [{"value": "653.5 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 653500.0, "url": {"label": "110009779101.pdf", "url": "https://nagoya.repo.nii.ac.jp/record/21467/files/110009779101.pdf"}, "version_id": "d3fb0926-16fd-40b7-88da-c7ddad08ebe2"}]}, "item_keyword": {"attribute_name": "\u30ad\u30fc\u30ef\u30fc\u30c9", "attribute_value_mlt": [{"subitem_subject": "CoPt\u5408\u91d1", "subitem_subject_scheme": "Other"}, {"subitem_subject": "\u30ca\u30ce\u30c9\u30c3\u30c8", "subitem_subject_scheme": "Other"}, {"subitem_subject": "\u30ea\u30e2\u30fc\u30c8\u6c34\u7d20\u30d7\u30e9\u30ba\u30de", "subitem_subject_scheme": "Other"}, {"subitem_subject": "KFM", "subitem_subject_scheme": "Other"}, {"subitem_subject": "MFM", "subitem_subject_scheme": "Other"}, {"subitem_subject": "PtCo Alloy", "subitem_subject_scheme": "Other"}, {"subitem_subject": "Nanodots", "subitem_subject_scheme": "Other"}, {"subitem_subject": "Remote H2 Plasma", "subitem_subject_scheme": "Other"}]}, "item_language": {"attribute_name": "\u8a00\u8a9e", "attribute_value_mlt": [{"subitem_language": "jpn"}]}, "item_resource_type": {"attribute_name": "\u8cc7\u6e90\u30bf\u30a4\u30d7", "attribute_value_mlt": [{"resourcetype": "journal article", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "\u30ea\u30e2\u30fc\u30c8H_2\u30d7\u30e9\u30ba\u30de\u652f\u63f4\u306b\u3088\u308bCoPt\u30ca\u30ce\u30c9\u30c3\u30c8\u306e\u9ad8\u5bc6\u5ea6\u5f62\u6210\u3068\u5e2f\u96fb\u30fb\u5e2f\u78c1\u7279\u6027\u8a55\u4fa1(\u9ad8\u8a98\u96fb\u7387\u819c,\u754c\u9762\u5236\u5fa1,\u30e1\u30e2\u30ea\u6280\u8853,\u30b2\u30fc\u30c8\u7d76\u7e01\u8584\u819c,\u5bb9\u91cf\u819c,\u6a5f\u80fd\u819c\u53ca\u3073\u30e1\u30e2\u30ea\u6280\u8853)", "item_titles": {"attribute_name": "\u30bf\u30a4\u30c8\u30eb", "attribute_value_mlt": [{"subitem_title": "\u30ea\u30e2\u30fc\u30c8H_2\u30d7\u30e9\u30ba\u30de\u652f\u63f4\u306b\u3088\u308bCoPt\u30ca\u30ce\u30c9\u30c3\u30c8\u306e\u9ad8\u5bc6\u5ea6\u5f62\u6210\u3068\u5e2f\u96fb\u30fb\u5e2f\u78c1\u7279\u6027\u8a55\u4fa1(\u9ad8\u8a98\u96fb\u7387\u819c,\u754c\u9762\u5236\u5fa1,\u30e1\u30e2\u30ea\u6280\u8853,\u30b2\u30fc\u30c8\u7d76\u7e01\u8584\u819c,\u5bb9\u91cf\u819c,\u6a5f\u80fd\u819c\u53ca\u3073\u30e1\u30e2\u30ea\u6280\u8853)"}]}, "item_type_id": "10", "owner": "1", "path": ["320/321/322"], "permalink_uri": "http://hdl.handle.net/2237/23596", "pubdate": {"attribute_name": "\u516c\u958b\u65e5", "attribute_value": "2016-02-24"}, "publish_date": "2016-02-24", "publish_status": "0", "recid": "21467", "relation": {}, "relation_version_is_last": true, "title": ["\u30ea\u30e2\u30fc\u30c8H_2\u30d7\u30e9\u30ba\u30de\u652f\u63f4\u306b\u3088\u308bCoPt\u30ca\u30ce\u30c9\u30c3\u30c8\u306e\u9ad8\u5bc6\u5ea6\u5f62\u6210\u3068\u5e2f\u96fb\u30fb\u5e2f\u78c1\u7279\u6027\u8a55\u4fa1(\u9ad8\u8a98\u96fb\u7387\u819c,\u754c\u9762\u5236\u5fa1,\u30e1\u30e2\u30ea\u6280\u8853,\u30b2\u30fc\u30c8\u7d76\u7e01\u8584\u819c,\u5bb9\u91cf\u819c,\u6a5f\u80fd\u819c\u53ca\u3073\u30e1\u30e2\u30ea\u6280\u8853)"], "weko_shared_id": null}
  1. B200 工学部/工学研究科
  2. B200a 雑誌掲載論文
  3. 学術雑誌

リモートH_2プラズマ支援によるCoPtナノドットの高密度形成と帯電・帯磁特性評価(高誘電率膜,界面制御,メモリ技術,ゲート絶縁薄膜,容量膜,機能膜及びメモリ技術)

http://hdl.handle.net/2237/23596
4d1a0635-2897-4a9e-a3da-ddd6695a9a64
名前 / ファイル ライセンス アクション
110009779101.pdf 110009779101.pdf (653.5 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2016-02-24
タイトル
タイトル リモートH_2プラズマ支援によるCoPtナノドットの高密度形成と帯電・帯磁特性評価(高誘電率膜,界面制御,メモリ技術,ゲート絶縁薄膜,容量膜,機能膜及びメモリ技術)
その他のタイトル
その他のタイトル High Density Formation of CoPt Alloy Nanodots Induced by Remote Hydrogen Plasma and Charging and Magnetizing Characteristics
著者 牧原, 克典

× 牧原, 克典

WEKO 62424

牧原, 克典

Search repository
福岡, 諒

× 福岡, 諒

WEKO 62425

福岡, 諒

Search repository
張, 海

× 張, 海

WEKO 62426

張, 海

Search repository
壁谷, 悠希

× 壁谷, 悠希

WEKO 62427

壁谷, 悠希

Search repository
大田, 晃生

× 大田, 晃生

WEKO 62428

大田, 晃生

Search repository
宮崎, 誠一

× 宮崎, 誠一

WEKO 62429

宮崎, 誠一

Search repository
Makihara, Katsunori

× Makihara, Katsunori

WEKO 62430

Makihara, Katsunori

Search repository
Fukuoka, Ryo

× Fukuoka, Ryo

WEKO 62431

Fukuoka, Ryo

Search repository
Zhang, Hai

× Zhang, Hai

WEKO 62432

Zhang, Hai

Search repository
Kabeya, Yuuki

× Kabeya, Yuuki

WEKO 62433

Kabeya, Yuuki

Search repository
Ohta, Akio

× Ohta, Akio

WEKO 62434

Ohta, Akio

Search repository
Miyazaki, Seiichi

× Miyazaki, Seiichi

WEKO 62435

Miyazaki, Seiichi

Search repository
権利
権利情報 (c)一般社団法人電子情報通信学会 本文データは学協会の許諾に基づきCiNiiから複製したものである
キーワード
主題Scheme Other
主題 CoPt合金
キーワード
主題Scheme Other
主題 ナノドット
キーワード
主題Scheme Other
主題 リモート水素プラズマ
キーワード
主題Scheme Other
主題 KFM
キーワード
主題Scheme Other
主題 MFM
キーワード
主題Scheme Other
主題 PtCo Alloy
キーワード
主題Scheme Other
主題 Nanodots
キーワード
主題Scheme Other
主題 Remote H2 Plasma
抄録
内容記述 CoとPtの合金化により高い一軸磁気異方性を示すCoPt合金に着目し、Co極薄膜上に形成した極薄Pt膜にリモート水素プラズマ処理を施すことで、合金ドットの形成を試みた。さらには、形成したナノドットの帯電および帯磁特性を走査プローブ顕微鏡により評価した。プラズマ処理前後の表面形状変化から、極薄Pt/Co積層膜へのリモート水素プラズマ照射によって、高密度ナノドットの高密度一括形成が認められ、形成したナノドットの光電子スペクトルにおける低運動エネルギ信号のしきい値エネルギから仕事関数を評価した結果、CoPt合金ナノドットの形成が認められた。さらには、導電性AFM探針を用いた帯電特性評価において、探針電圧-2.0V印加した後、電子注入・保持に起因した表面電位変化-30mVの負帯電が認められることから、形成した合金ナノドットは絶縁分離しており電荷保持ノードとして機能するとともに、CoPtCrコートSi探針を用いて非接触測定したMFM像において、探針-ナノドットの磁気的作用を反映した明瞭なコントラストが認められることからスピン保持ノードとしても機能することを明らかにした。CoPt-alloy NDs with an areal density as high as 〜10^<12> cm^<-2> and over on thermally-grown SiO_2 were successfully fabricated by remote H_2 plasma exposure to ultrathin Pt/Co bi-layer stack, which was confirmed after examining the surface morphology by AFM and measuring photoemission spectra. After scanning the CoPt-alloy NDs with a AFM tip biased at -2.0 V with respect to the substrate, a distinct decrease in the surface potential (-30 mV) in the corresponding area owing to electron charging to the dots was detected, which indicates that NDs were electrically isolated from each other. In the MFM image taken in the noncontact tapping mode with a distance of 〜10 nm between the tip and the sample surface, a clear contrast was obtained with a good correlation to the NDs indicating the presence of perpendicular magnetic anisotropy of the CoPt-alloy NDs. These results imply that CoPt-alloy NDs can be active elements for both spin and charge storage.
内容記述タイプ Abstract
出版者
出版者 一般社団法人電子情報通信学会
言語
言語 jpn
資源タイプ
資源タイプresource http://purl.org/coar/resource_type/c_6501
タイプ journal article
ISSN
収録物識別子タイプ ISSN
収録物識別子 0913-5685
書誌情報 電子情報通信学会技術研究報告. SDM, シリコン材料・デバイス

巻 113, 号 87, p. 47-50, 発行日 2013-06-11
著者版フラグ
値 publisher
URI
識別子 http://ci.nii.ac.jp/naid/110009779101/
識別子タイプ URI
URI
識別子 http://hdl.handle.net/2237/23596
識別子タイプ HDL
戻る
0
views
See details
Views

Versions

Ver.1 2021-03-01 15:22:06.159525
Show All versions

Share

Mendeley CiteULike Twitter Facebook Print Addthis

Cite as

Export

OAI-PMH
  • OAI-PMH JPCOAR
  • OAI-PMH DublinCore
  • OAI-PMH DDI
Other Formats
  • JSON
  • BIBTEX

Confirm


Powered by CERN Data Centre & Invenio


Powered by CERN Data Centre & Invenio